公开(公告)号：US11131709B2

公开(公告)日：2021-09-28

申请号：US17021288

申请日：2020-09-15

Applicant: FormFactor, Inc.

Inventor： Joseph George Frankel ,  Kazuki Negishi ,  Michael E. Simmons ,  Eric Robert Christenson ,  Daniel Rishavy

IPC: G01R31/28 ,  G01R1/067

Abstract: Probe systems for optically probing a device under test (DUT) and methods of operating the probe systems. The probe systems include a probing assembly that includes an optical probe that defines a probe tip and a distance sensor. The probe systems also include a support surface configured to support a substrate, which defines a substrate surface and includes an optical device positioned below the substrate surface. The probe systems further include a positioning assembly configured to selectively regulate a relative orientation between the probing assembly and the DUT. The probe systems also include a controller programmed to control the operation of the probe systems. The methods include methods of operating the probe systems.

公开(公告)号：US11874301B2

公开(公告)日：2024-01-16

申请号：US17078778

申请日：2020-10-23

Applicant: FormFactor, Inc.

Inventor： Kazuki Negishi ,  Yu-Wen Huang ,  Gerald Lee Gisler ,  Eric Robert Christenson ,  Michael E. Simmons

IPC: G01R1/07 ,  G01R31/308 ,  G01R31/319

CPC classification number: G01R1/07 ,  G01R31/308 ,  G01R31/31905

Abstract: Probe systems including imaging devices with objective lens isolators and related methods are disclosed herein. A probe system includes an enclosure with an enclosure volume for enclosing a substrate that includes one or more devices under test (DUTs), a testing assembly, and an imaging device. The imaging device includes an imaging device objective lens, an imaging device body, and an objective lens isolator. In examples, the probe system includes an electrical grounding assembly configured to restrict electromagnetic noise from entering the enclosure volume. In examples, methods of preparing the imaging device include assembling the imaging device such that the imaging device objective lens is at least partially electrically isolated from the imaging device body. In some examples, utilizing the probe system includes testing the one or more DUTs while restricting electrical noise from propagating from the imaging device to the substrate.

公开(公告)号：US11047795B2

公开(公告)日：2021-06-29

申请号：US16884921

申请日：2020-05-27

Applicant: FormFactor, Inc.

Inventor： Kazuki Negishi ,  Michael E. Simmons ,  Christopher Anthony Storm ,  Joseph George Frankel ,  Eric Robert Christenson ,  Mario René Berg

IPC: G01N21/27 ,  G01B11/02 ,  G01R31/28 ,  G01R31/308 ,  G01R35/00 ,  G01B11/14 ,  H01L21/66 ,  G01B21/04

Abstract: Calibration chucks for optical probe systems, optical probe systems including the calibration chucks, and methods of utilizing the optical probe systems. The calibration chucks include a calibration chuck body that defines a calibration chuck support surface. The calibration chucks also include at least one optical calibration structure that is supported by the calibration chuck body. The at least one optical calibration structure includes a horizontal viewing structure. The horizontal viewing structure is configured to facilitate viewing of a horizontally viewed region from a horizontal viewing direction that is at least substantially parallel to the calibration chuck support surface. The horizontal viewing structure also is configured to facilitate viewing of the horizontally viewed region via an imaging device of the optical probe system that is positioned vertically above the calibration chuck support surface.