公开(公告)号：US20230129245A1

公开(公告)日：2023-04-27

申请号：US18010550

申请日：2021-06-15

申请人： Friedrich-Schiller-Universität Jena ,  Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.

发明人： Maxime CHAMBONNEAU ,  Stefan NOLTE ,  Qingfeng LI

IPC分类号： B23K26/21 ,  B23K26/046

摘要： The invention relates to a method for welding a first workpiece (11) to a second workpiece (12) by means of a laser. It is an object of the invention to provide a reliable, repeatable and reproducible approach for laser welding of two workpieces one of which consists of a semiconductor material. The method proposed by the invention comprises the following steps: Irradiating the first workpiece (11) with a beam of pulsed laser radiation, wherein the first workpiece (11) consists of a semiconductor material which is transparent at the wavelength of the laser radiation, so that the beam enters the first workpiece (11) through an entrance surface and leaves it through an exit surface, the geometric focus of the beam being positioned in the plane of the exit surface; determining a delocalization of the focus caused by nonlinear interaction of the laser radiation with the semiconductor material; placing the second workpiece (12) against the first workpiece (11); and, again, irradiating the first workpiece (11) with the laser beam of pulsed laser radiation, the focus of the laser radiation being positioned along the beam direction taking into account the determined delocalization so that the intensity maximum is located in the plane of the exit surface forming the interface of the two workpieces (11, 12), whereby the first workpiece (11) is welded to the second workpiece (12). Moreover, the invention relates to a system for welding a first workpiece (11) to a second workpiece (12).

公开(公告)号：US20210402512A1

公开(公告)日：2021-12-30

申请号：US17270470

申请日：2019-08-23

申请人： Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung E.V. ,  Friedrich-Schiller-Universität Jena

发明人： Malte Per SIEMS ,  Stefan NOLTE ,  Daniel RICHTER ,  Ria KRÄMER ,  Thorsten Albert GOEBEL ,  Maximilian HECK

IPC分类号： B23K26/0622 ,  B23K26/00

摘要： The invention relates to a method for producing an optical component (1) by means of laser radiation. The object of the invention is that of providing a method that is improved compared with the prior art, which method allows for the correction of deviations of the optical functionality of the component from specified target parameters. For this purpose, the method according to the invention comprises the following method steps: generating a structure in the material of the component (1) which gives the component (1) an optical functionality, and modifying the refractive index in the material of the component (1) by means of laser beams in a pre- and/or post-processing step, i.e. before or after the generation of the structure, in order to correct deviations of the optical functionality of the component (1) from specified target parameters.

公开(公告)号：US20230377970A1

公开(公告)日：2023-11-23

申请号：US18221501

申请日：2023-07-13

申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. ,  Trumpf Laser- und Systemtechnik Gmbh

发明人： Markus BLOTHE ,  Maxime CHAMBONNEAU ,  Stefan NOLTE ,  Malte KUMKAR

IPC分类号： H01L21/78 ,  B23K26/53 ,  B23K26/0622 ,  H01L21/268

CPC分类号： H01L21/78 ,  B23K26/53 ,  B23K26/0622 ,  H01L21/268 ,  B23K2103/56

摘要： The invention relates to a method for dividing a transparent workpiece (1) by means of pulsed laser radiation (2) by way of creating a beam convergence zone (3) in the volume of the workpiece, in which the intensity of the laser radiation (2) exceeds a threshold value for non-linear absorption, wherein the beam convergence zone (3) and the workpiece (1) are moved relative to each other, thereby creating a two-dimensional weakening in the workpiece (1) extending along a predetermined separating line (4), and wherein the workpiece (1) is subsequently divided along the separating line (4). The invention proposes that by selecting the duration of the energy input generated by the non-linear absorption of the pulsed laser radiation and by spatial beam shaping, non-linear propagation of the laser radiation (2) in the volume (1) of the workpiece outside the beam convergence zone (3) is suppressed.