公开(公告)号：US20030041910A1

公开(公告)日：2003-03-06

申请号：US10277147

申请日：2002-10-22

申请人： Tadahiro Ohmi, Sendai-shi, Japan and Fujikin Incorporated

发明人： Hiroshi Morokoshi ,  Michio Yamaji ,  Shigeaki Tanaka ,  Keiji Hirao ,  Yuji Kawano ,  Takashi Hirose ,  Kosuke Yokoyama ,  Michio Kuramochi ,  Masayuki Hatano ,  Nobukazu Ikeda

IPC分类号： F16K001/00

CPC分类号： F15B13/0817 ,  F15B13/0871 ,  F15B13/0892 ,  F15B13/0896 ,  F15B2013/006 ,  Y10T137/87249 ,  Y10T137/87265 ,  Y10T137/87885

摘要： An on-off device disposed at each of the inlet and the outlet of a fluid controller is one of five kinds of on-off devices, i.e., on-off device having a two-port valve, on-off device having a two-port valve and a three-port valve, on-off device having a two-port valve and two three-port valves, on-off device having two three-port valves, and on-off device having three three-port valves, The main bodies of two-port valves of all types of on-off devices are identical in configuration and each have an inlet and an outlet in a bottom face thereof. Main bodies of three-port valves of all types of on-off devices are identical in configuration and each formed in a bottom face thereof with an inlet, an outlet always in communication with the inlet, and an inlet-outlet subopening.

公开(公告)号：US20040137744A1

公开(公告)日：2004-07-15

申请号：US10724101

申请日：2003-12-01

申请人： Fujikin Incorporated ,  Tadahiro OHMI

发明人： Tadahiro Ohmi ,  Nobukazu Ikeda ,  Yukio Minami ,  Kouji Kawada ,  Katunori Komehana ,  Teruo Honiden ,  Touru Hirai ,  Akihiro Morimoto ,  Toshirou Nariai ,  Keiji Hirao ,  Masaharu Taguchi ,  Osamu Nakamura

IPC分类号： H01L021/311

CPC分类号： B01J3/006 ,  B01J7/00 ,  B01J12/007 ,  C01B5/00

摘要： A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.

摘要翻译： 一种用于从氢气和氧气产生水蒸汽并将高纯度水分提供给诸如半导体生产的过程的安全的减压装置。 该设备通过保持催化反应器的内部压力以消除气体点燃的可能性，以产生高水平的水分，同时在减压下从反应器中提供湿气。 散热反应器的改进通过有效冷却反应器耐氧化铝处理的翅片而大大地增加了水分产生而不会扩大尺寸。

公开(公告)号：US20020124894A1

公开(公告)日：2002-09-12

申请号：US10141884

申请日：2002-05-10

申请人： Tadahiro Ohmi

发明人： Tadahiro Ohmi ,  Yukio Minami ,  Akihiro Morimoto ,  Nobukazu Ikeda ,  Keiji Hirao ,  Takashi Hirose ,  Michio Yamaji ,  Kazuhiro Yoshikawa

IPC分类号： E03B001/00 ,  E03C001/00 ,  F17D001/00

CPC分类号： F16K27/003 ,  Y10T137/87684

摘要： A fluid control device comprises a first passageway, and a second passageway communicating therewith and having a terminating end closed with a fluid control unit or instrument. The first passageway is adapted to pass a fluid therethrough with a different fluid remaining in the second passageway. The first passageway comprises an upstream portion and a downstream portion communicating with the upstream portion at an approximate right angle therewith. The second passageway extends from a terminating end of the upstream portion of the first passageway in alignment with the upstream portion.

摘要翻译： 流体控制装置包括第一通道和与之连通的第二通道，并且具有用流体控制单元或仪器封闭的终止端。 第一通道适于使流体通过其中残留在第二通道中的不同流体。 第一通道包括与上游部分以大致直角连通的上游部分和下游部分。 第二通道从第一通道的上游部分的终止端延伸，与上游部分对准。

公开(公告)号：US20040247502A1

公开(公告)日：2004-12-09

申请号：US10884917

申请日：2004-07-07

申请人： Fujikin Incorporated

发明人： Tadahiro Ohmi ,  Kouji Kawada ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Kenji Tubota ,  Teruo Honiden ,  Touru Hirai ,  Katunori Komehana ,  Keiji Hirao

IPC分类号： B01J010/00 ,  B01J008/02

CPC分类号： B01J12/007 ,  B01J2219/00058 ,  B01J2219/00087 ,  B01J2219/00096 ,  C01B5/00

摘要： A reactor for generating moisture wherein ignition of hydrogen gas, backfire to the gas supply source side, the peeling off of the platinum coat catalyst layer inside are prevented more completely to further increase the safety of the reactor for generating moisture and wherein the dead space in the interior space is reduced to further reduce the size of the reactor shell. The reactor comprises: a reactor shell A with an interior space formed with a reactor structural component on the inlet side and a reactor structural component on the outlet side opposed to and united with each other by welding, the reactor structural component 1 on the inlet side provided with a gas feed port 1a and the reactor, structural component 2 on the outlet side provided with a moisture gas take-out port 2a; a reflector on the inlet side facing the gas feed port in the interior space of the reactor; a reflector on the outlet side facing the moisture gas take-out port in the interior space; and a platinum coat catalyst layer 8 formed on the inside wall of the reactor structural component on the outlet side, wherein hydrogen and oxygen fed into the interior space of the reactor through the gas feed port are brought into contact with the platinum coat 8b to activate the reactivity, thereby reacting hydrogen and oxygen into water in a non-combustion state.

摘要翻译： 一种用于产生水分的反应器，其中更加完全地防止了氢气的点燃，气体供应源侧的反应，内部的铂涂层催化剂层的剥离，从而进一步提高了产生水分的反应器的安全性， 减少内部空间以进一步减小反应器壳体的尺寸。 反应器包括：反应器壳体A，内部空间形成有入口侧的反应器结构部件，出口侧的反应器结构部件通过焊接彼此相对并且彼此结合，反应器结构部件1在入口侧 设有气体供给口1a和反应器，出口侧的结构部件2设置有湿气取出口2a; 入口侧的反射器，其面对反应器内部空间中的气体供给口; 出口侧的反射器面向内部空间中的湿气取出口; 以及在出口侧的反应器结构部件的内壁上形成的铂涂层催化剂层8，其中通过气体供给口供入反应器的内部空间的氢和氧与铂涂层8b接触以激活 反应性，从而使氢和氧在非燃烧状态下反应成水。

公开(公告)号：US20010048907A1

公开(公告)日：2001-12-06

申请号：US09905209

申请日：2001-07-12

申请人： Fujikin Incorporated

发明人： Tadahiro Ohmi ,  Kouji Kawada ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Kenji Tubota ,  Teruo Honiden ,  Touru Hirai ,  Katunori Komehana ,  Keiji Hirao

IPC分类号： B01J019/08

CPC分类号： B01J12/007 ,  B01J2219/00058 ,  B01J2219/00087 ,  B01J2219/00096 ,  C01B5/00

摘要： A reactor for generating moisture wherein ignition of hydrogen gas, backfire to the gas supply source side, the peeling off of the platinum coat catalyst layer inside are prevented more completely to further increase the safety of the reactor for generating moisture and wherein the dead space in the interior space is reduced to further reduce the size of the reactor shell. The reactor comprises: a reactor shell A with an interior space formed with a reactor structural component on the inlet side and a reactor structural component on the outlet side opposed to and united with each other by welding, the reactor structural component 1 on the inlet side provided with a gas feed port 1a and the reactor structural component 2 on the outlet side provided with a moisture gas take-out port 2a; a reflector on the inlet side facing the gas feed port in the interior space of the reactor; a reflector on the outlet side facing the moisture gas take-out port in the interior space; and a platinum coat catalyst layer 8 formed on the inside wall of the reactor structural component on the outlet side, wherein hydrogen and oxygen fed into the interior space of the reactor through the gas feed port are brought into contact with the platinum coat 8b to activate the reactivity, thereby reacting hydrogen and oxygen into water in a non-combustion state.

摘要翻译： 一种用于产生水分的反应器，其中更加完全地防止了氢气的点燃，气体供应源侧的反应，内部的铂涂层催化剂层的剥离，从而进一步提高了产生水分的反应器的安全性， 减少内部空间以进一步减小反应器壳体的尺寸。 反应器包括：反应器壳体A，内部空间形成有入口侧的反应器结构部件，出口侧的反应器结构部件通过焊接彼此相对并且彼此结合，反应器结构部件1在入口侧 设置有气体供给口1a和反应器结构部件2，该反应器结构部件2具有设置有湿气取出口2a的出口侧; 入口侧的反射器，其面对反应器内部空间中的气体供给口; 出口侧的反射器面向内部空间中的湿气取出口; 以及在出口侧的反应器结构部件的内壁上形成的铂涂层催化剂层8，其中通过气体供给口供入反应器的内部空间的氢和氧与铂涂层8b接触以激活 反应性，从而使氢和氧在非燃烧状态下反应成水。