公开(公告)号：US20040137744A1

公开(公告)日：2004-07-15

申请号：US10724101

申请日：2003-12-01

Applicant: Fujikin Incorporated ,  Tadahiro OHMI

Inventor： Tadahiro Ohmi ,  Nobukazu Ikeda ,  Yukio Minami ,  Kouji Kawada ,  Katunori Komehana ,  Teruo Honiden ,  Touru Hirai ,  Akihiro Morimoto ,  Toshirou Nariai ,  Keiji Hirao ,  Masaharu Taguchi ,  Osamu Nakamura

IPC: H01L021/311

CPC classification number: B01J3/006 ,  B01J7/00 ,  B01J12/007 ,  C01B5/00

Abstract: A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.

Abstract translation: 一种用于从氢气和氧气产生水蒸汽并将高纯度水分提供给诸如半导体生产的过程的安全的减压装置。 该设备通过保持催化反应器的内部压力以消除气体点燃的可能性，以产生高水平的水分，同时在减压下从反应器中提供湿气。 散热反应器的改进通过有效冷却反应器耐氧化铝处理的翅片而大大地增加了水分产生而不会扩大尺寸。

公开(公告)号：US20020124894A1

公开(公告)日：2002-09-12

申请号：US10141884

申请日：2002-05-10

Applicant: Tadahiro Ohmi

Inventor： Tadahiro Ohmi ,  Yukio Minami ,  Akihiro Morimoto ,  Nobukazu Ikeda ,  Keiji Hirao ,  Takashi Hirose ,  Michio Yamaji ,  Kazuhiro Yoshikawa

IPC: E03B001/00 ,  E03C001/00 ,  F17D001/00

CPC classification number: F16K27/003 ,  Y10T137/87684

Abstract: A fluid control device comprises a first passageway, and a second passageway communicating therewith and having a terminating end closed with a fluid control unit or instrument. The first passageway is adapted to pass a fluid therethrough with a different fluid remaining in the second passageway. The first passageway comprises an upstream portion and a downstream portion communicating with the upstream portion at an approximate right angle therewith. The second passageway extends from a terminating end of the upstream portion of the first passageway in alignment with the upstream portion.

Abstract translation: 流体控制装置包括第一通道和与之连通的第二通道，并且具有用流体控制单元或仪器封闭的终止端。 第一通道适于使流体通过其中残留在第二通道中的不同流体。 第一通道包括与上游部分以大致直角连通的上游部分和下游部分。 第二通道从第一通道的上游部分的终止端延伸，与上游部分对准。

公开(公告)号：US20020136676A1

公开(公告)日：2002-09-26

申请号：US10096247

申请日：2002-03-12

Applicant: Fujikin Incorporated

Inventor： Katsunori Komehana ,  Yukio Minami ,  Koji Kawada ,  Akihiro Morimoto ,  Nobukazu Ikeda ,  Osamu Nakamura ,  Teruo Honiden ,  Toru Hirai

IPC: B01J007/00 ,  B01J008/00

CPC classification number: C01B5/00 ,  B01J12/007

Abstract: A reactor (2) for generating moisture in which the starting material gases are caused to undergo turbulence so as to increase the efficiency of the moisture-generating reaction. The reactor (2) for generating moisture comprises a first inlet-side reactor structural component (4) which is adapted to supply the starting material gases from a starting material gas feed port into the inlet side of an interior space; a second outlet-side reactor structural component (2) which is adapted to transfer generated gas to a moisture gas take-out port (30a) from a moisture gas feed passage (28); a reflector (12) clamped air-tightly between the first and second structural components (4, 20 ) and having a plurality of blowing holes (16) at predetermined locations for communicating with the inlet-side interior space (8); a reactor chamber (18) formed with a narrow gap d provided between the reflector (12) and the second structural component (20); a nozzle hole (24) formed in the second structural component (20) for communicating with the moisture gas feed passage (28); and a coating catalyst layer (21) formed on a wall surface (20a) of the reaction chamber opposing the reflector (12); wherein when hydrogen and oxygen gas fed from the starting material gas feed port flow into the reaction chamber (18) through the blowing holes (16) in the reflector (12), they react and generate moisture gas by a non-combustive pathway by the catalytic effect of the coating catalyst layer (21)

Abstract translation: 一种用于产生水分的反应器（2），其中使起始材料气体发生湍流，以提高发生水反应的效率。 用于产生水分的反应器（2）包括第一入口侧反应器结构部件（4），其适于将起始原料气体进料口供应到内部空间的入口侧; 第二出口侧反应器结构部件（2），其适于将产生的气体从湿气供给通道（28）转移到湿气输出口（30a）; 在第一和第二结构部件（4,20）之间气密地夹紧并且在预定位置具有多个吹风孔（16）的反射器（12），用于与入口侧内部空间（8）连通; 形成有设置在反射器（12）和第二结构部件（20）之间的窄间隙d的反应室（18）; 形成在第二结构部件（20）中的用于与湿气供给通道（28）连通的喷嘴孔（24）; 以及形成在所述反应室的与所述反射体（12）相对的壁面（20a）上的涂层催化剂层（21）。 其中当从原料气体供给口供给的氢气和氧气通过反射器（12）中的吹出孔（16）流入反应室（18）时，它们通过非燃烧途径反应并产生湿气 涂层催化剂层（21）的催化作用

公开(公告)号：US20040247502A1

公开(公告)日：2004-12-09

申请号：US10884917

申请日：2004-07-07

Applicant: Fujikin Incorporated

Inventor： Tadahiro Ohmi ,  Kouji Kawada ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Kenji Tubota ,  Teruo Honiden ,  Touru Hirai ,  Katunori Komehana ,  Keiji Hirao

IPC: B01J010/00 ,  B01J008/02

CPC classification number: B01J12/007 ,  B01J2219/00058 ,  B01J2219/00087 ,  B01J2219/00096 ,  C01B5/00

Abstract: A reactor for generating moisture wherein ignition of hydrogen gas, backfire to the gas supply source side, the peeling off of the platinum coat catalyst layer inside are prevented more completely to further increase the safety of the reactor for generating moisture and wherein the dead space in the interior space is reduced to further reduce the size of the reactor shell. The reactor comprises: a reactor shell A with an interior space formed with a reactor structural component on the inlet side and a reactor structural component on the outlet side opposed to and united with each other by welding, the reactor structural component 1 on the inlet side provided with a gas feed port 1a and the reactor, structural component 2 on the outlet side provided with a moisture gas take-out port 2a; a reflector on the inlet side facing the gas feed port in the interior space of the reactor; a reflector on the outlet side facing the moisture gas take-out port in the interior space; and a platinum coat catalyst layer 8 formed on the inside wall of the reactor structural component on the outlet side, wherein hydrogen and oxygen fed into the interior space of the reactor through the gas feed port are brought into contact with the platinum coat 8b to activate the reactivity, thereby reacting hydrogen and oxygen into water in a non-combustion state.

Abstract translation: 一种用于产生水分的反应器，其中更加完全地防止了氢气的点燃，气体供应源侧的反应，内部的铂涂层催化剂层的剥离，从而进一步提高了产生水分的反应器的安全性， 减少内部空间以进一步减小反应器壳体的尺寸。 反应器包括：反应器壳体A，内部空间形成有入口侧的反应器结构部件，出口侧的反应器结构部件通过焊接彼此相对并且彼此结合，反应器结构部件1在入口侧 设有气体供给口1a和反应器，出口侧的结构部件2设置有湿气取出口2a; 入口侧的反射器，其面对反应器内部空间中的气体供给口; 出口侧的反射器面向内部空间中的湿气取出口; 以及在出口侧的反应器结构部件的内壁上形成的铂涂层催化剂层8，其中通过气体供给口供入反应器的内部空间的氢和氧与铂涂层8b接触以激活 反应性，从而使氢和氧在非燃烧状态下反应成水。

公开(公告)号：US20020134135A1

公开(公告)日：2002-09-26

申请号：US10098038

申请日：2002-03-13

Applicant: FUJIKIN INCORPORATED

Inventor： Katsunori Komehana ,  Yukio Minami ,  Akihiro Morimoto ,  Koji Kawada ,  Teruo Honiden ,  Osamu Nakamura ,  Toru Hirai ,  Nobukazu Ikeda

IPC: G01N007/00

CPC classification number: G01N25/36 ,  G01N25/28 ,  G01N27/16

Abstract: An unreacted gas detector including a reactor unit for producing a target gas by way of reacting material gases in its reaction chamber, a sensor body connected to the reactor unit, a measurement space provided in the sensor body for allowing the target gas to flow, an unreacted gas sensor having a temperature measurement section covered by a catalyst layer and disposed inside the measurement space, and a target gas sensor with its temperature measurement section disposed in the sensor body. Any unreacted gas remaining in the target gas is reacted by the catalyst layer so that a resulted temperature change is detected by the unreacted gas sensor, and a target gas temperature is measured by target gas temperature sensor, thus finding a unreacted gas concentration from a temperature difference between the temperatures obtained by the unreacted gas sensor and the target gas temperature sensor.

Abstract translation: 一种未反应的气体检测器，包括用于通过在其反应室中反应材料气体来生产目标气体的反应器单元，连接到反应器单元的传感器主体，设置在传感器主体中用于允许目标气体流动的测量空间， 未反应气体传感器，其具有由催化剂层覆盖并设置在测量空间内的温度测量部分，以及其目标气体传感器，其温度测量部分设置在传感器主体中。 残留在目标气体中的任何未反应气体都被催化剂层反应，从而通过未反应的气体传感器检测到所产生的温度变化，并且通过目标气体温度传感器测量目标气体温度，从而从温度 由未反应气体传感器和目标气体温度传感器获得的温度之间的差。

公开(公告)号：US20040154664A1

公开(公告)日：2004-08-12

申请号：US10775104

申请日：2004-02-11

Applicant: ,  Fujikin Incorporated ,  Tokyo Electron Ltd.

Inventor： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

IPC: G05D007/06

CPC classification number: G05D7/0658 ,  G05D7/0664 ,  Y10S438/935 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/86389 ,  Y10T137/87877 ,  Y10T137/87917

Abstract: A fluid supply apparatus with a plurality of flow lines branching out from one regulator for adjustment of pressure, the flow lines being arranged in parallel, wherein a measure is taken that the operation, that is, opening or closing of one flow passage will have no transient effect on the steady flow of the other flow passages. For this purpose, each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time nullt from the starting point. Also provided are a method and an apparatus for the above in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system. To that end, a formula for calculating the flow rate of a gas is theoretically derived that flows with a pressure ratio not higher than the critical pressure ratio. From that formula, the flow factor is defined, so that the formula may be applied to a number of gas types using flow factors. The method includes calculating the flow rate Qc of a gas passing through an orifice according to formula QcnullKP1 (Knullconstant) with a pressure P1 on an upstream side of the orifice set at twice or more higher than pressure P2 on a downstream side, wherein the flow factor FF for each kind of gas is calculated as follows:FFnull(k/nulls)null2/(nullnull1)null1/(nullnull1)nullnull/null(nullnull1)Rnullnull1/2and wherein, if the calculated flow rate of gas type A is QA, and, when gas type B is allowed to flow through the same orifice under the same pressure on the upstream side and at the same temperature on the upstream side, the flow rate QB is calculated as follows:QBnull(FFB/FFA)QAwhere nullsnullconcentration of gas in standard state; nullnullratio of specific heat of gas; Rnullconstant of gas; Knullproportional constant not depending on the type of gas; FFAnullflow factor of gas type A; and FFBnullflow factor of gas type B.

公开(公告)号：US20010048907A1

公开(公告)日：2001-12-06

申请号：US09905209

申请日：2001-07-12

Applicant: Fujikin Incorporated

Inventor： Tadahiro Ohmi ,  Kouji Kawada ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Kenji Tubota ,  Teruo Honiden ,  Touru Hirai ,  Katunori Komehana ,  Keiji Hirao

IPC: B01J019/08

CPC classification number: B01J12/007 ,  B01J2219/00058 ,  B01J2219/00087 ,  B01J2219/00096 ,  C01B5/00

Abstract: A reactor for generating moisture wherein ignition of hydrogen gas, backfire to the gas supply source side, the peeling off of the platinum coat catalyst layer inside are prevented more completely to further increase the safety of the reactor for generating moisture and wherein the dead space in the interior space is reduced to further reduce the size of the reactor shell. The reactor comprises: a reactor shell A with an interior space formed with a reactor structural component on the inlet side and a reactor structural component on the outlet side opposed to and united with each other by welding, the reactor structural component 1 on the inlet side provided with a gas feed port 1a and the reactor structural component 2 on the outlet side provided with a moisture gas take-out port 2a; a reflector on the inlet side facing the gas feed port in the interior space of the reactor; a reflector on the outlet side facing the moisture gas take-out port in the interior space; and a platinum coat catalyst layer 8 formed on the inside wall of the reactor structural component on the outlet side, wherein hydrogen and oxygen fed into the interior space of the reactor through the gas feed port are brought into contact with the platinum coat 8b to activate the reactivity, thereby reacting hydrogen and oxygen into water in a non-combustion state.

Abstract translation: 一种用于产生水分的反应器，其中更加完全地防止了氢气的点燃，气体供应源侧的反应，内部的铂涂层催化剂层的剥离，从而进一步提高了产生水分的反应器的安全性， 减少内部空间以进一步减小反应器壳体的尺寸。 反应器包括：反应器壳体A，内部空间形成有入口侧的反应器结构部件，出口侧的反应器结构部件通过焊接彼此相对并且彼此结合，反应器结构部件1在入口侧 设置有气体供给口1a和反应器结构部件2，该反应器结构部件2具有设置有湿气取出口2a的出口侧; 入口侧的反射器，其面对反应器内部空间中的气体供给口; 出口侧的反射器面向内部空间中的湿气取出口; 以及在出口侧的反应器结构部件的内壁上形成的铂涂层催化剂层8，其中通过气体供给口供入反应器的内部空间的氢和氧与铂涂层8b接触以激活 反应性，从而使氢和氧在非燃烧状态下反应成水。