公开(公告)号：US10030971B2

公开(公告)日：2018-07-24

申请号：US15228772

申请日：2016-08-04

Applicant: GLOBALFOUNDRIES, Inc. ,  Nova Measuring Instruments Ltd.

Inventor： Cornel Bozdog ,  Alok Vaid ,  Sridhar Mahendrakar ,  Mainul Hossain ,  Taher Kagalwala

IPC: G01B15/02 ,  G01N23/22 ,  G01B11/06 ,  G01N23/2273 ,  H01L21/66 ,  H01L27/12

Abstract: A measurement method and system are presented for in-line measurements of one or more parameters of thin films in structures progressing on a production line. First measured data and second measured data are provided from multiple measurements sites on the thin film being measured, wherein the first measured data corresponds to first type measurements from a first selected set of a relatively small number of the measurement sites, and the second measured data corresponds to second type optical measurements from a second set of significantly higher number of the measurements sites. The first measured data is processed for determining at least one value of at least one parameter of the thin film in each of the measurement sites of said first set. Such at least one parameter value is utilized for interpreting the second measured data, thereby obtaining data indicative of distribution of values of said at least one parameter within said second set of measurement sites.

公开(公告)号：US20170038201A1

公开(公告)日：2017-02-09

申请号：US15228772

申请日：2016-08-04

Applicant: GLOBALFOUNDRIES, Inc.

Inventor： Cornel Bozdog ,  Alok Vaid ,  Sridhar Mahendrakar ,  Mainul Hossain ,  Taher Kagalwala

IPC: G01B15/02 ,  G01N23/227

CPC classification number: G01B15/02 ,  G01B11/0625 ,  G01B2210/56 ,  G01N23/2273 ,  G01N2223/61 ,  G01N2223/6116 ,  H01L22/20 ,  H01L27/12

Abstract: A measurement method and system are presented for in-line measurements of one or more parameters of thin films in structures progressing on a production line. First measured data and second measured data are provided from multiple measurements sites on the thin film being measured, wherein the first measured data corresponds to first type measurements from a first selected set of a relatively small number of the measurement sites, and the second measured data corresponds to second type optical measurements from a second set of significantly higher number of the measurements sites. The first measured data is processed for determining at least one value of at least one parameter of the thin film in each of the measurement sites of said first set. Such at least one parameter value is utilized for interpreting the second measured data, thereby obtaining data indicative of distribution of values of said at least one parameter within said second set of measurement sites.

Abstract translation: 提出了一种测量方法和系统，用于对在生产线上进行的结构中的薄膜的一个或多个参数进行在线测量。 第一测量数据和第二测量数据由被测量的薄膜上的多个测量点提供，其中第一测量数据对应于来自相对较少数量的测量位置的第一选定组的第一类型测量值，以及第二测量数据 对应于来自第二组显着更高数量的测量位点的第二类型光学测量。 处理第一测量数据以确定所述第一组的每个测量位置中的薄膜的至少一个参数的至少一个值。 这样的至少一个参数值用于解释第二测量数据，由此获得指示所述第二组测量位置内的所述至少一个参数的值分布的数据。