公开(公告)号：US10732202B2

公开(公告)日：2020-08-04

申请号：US15083787

申请日：2016-03-29

Applicant: GLOBALFOUNDRIES INC.

Inventor： Craig M. Bocash ,  David L. Gardell ,  Peter W. Neff

IPC: G01R1/067 ,  G01R3/00 ,  G01R1/073

Abstract: A repairable rigid test probe system includes an annular gimbal supported by an annular gimbal bearing of a probe card assembly, a test substrate seated and aligned within the annular gimbal, a rigid die including thick periphery and a thin center containing an array of through holes that is aligned above the test substrate, and an array of rigid probes inserted into each of the array of through holes, where each rigid probe includes: a tail end that contacts a connection on a facing surface of the test substrate, a collar limiting a distance of insertion, and a tip that contacts a corresponding contact on a facing surface of a device under test.