公开(公告)号：US10514393B2

公开(公告)日：2019-12-24

申请号：US15933443

申请日：2018-03-23

申请人： GLOBALFOUNDRIES INC.

发明人： David L. Gardell ,  David M. Audette ,  Peter W. Neff

IPC分类号： G01R31/00 ,  G01R1/073 ,  G01R33/00 ,  G01R35/00 ,  G01R31/24 ,  G01R31/44 ,  G01R31/26 ,  H05B37/03

摘要： Aspects of the present disclosure provide a gimbal assembly test system including: a protective cover affixed to a test surface of a wafer probe card mounted within a gimbal bearing, wherein the protective cover includes an exterior surface oriented outward from the test surface of the wafer probe card; and a recess extending into the exterior surface of the protective cover and shaped to matingly engage a load cell tip therein.

公开(公告)号：US10732202B2

公开(公告)日：2020-08-04

申请号：US15083787

申请日：2016-03-29

申请人： GLOBALFOUNDRIES INC.

发明人： Craig M. Bocash ,  David L. Gardell ,  Peter W. Neff

IPC分类号： G01R1/067 ,  G01R3/00 ,  G01R1/073

摘要： A repairable rigid test probe system includes an annular gimbal supported by an annular gimbal bearing of a probe card assembly, a test substrate seated and aligned within the annular gimbal, a rigid die including thick periphery and a thin center containing an array of through holes that is aligned above the test substrate, and an array of rigid probes inserted into each of the array of through holes, where each rigid probe includes: a tail end that contacts a connection on a facing surface of the test substrate, a collar limiting a distance of insertion, and a tip that contacts a corresponding contact on a facing surface of a device under test.

公开(公告)号：US20180217184A1

公开(公告)日：2018-08-02

申请号：US15933443

申请日：2018-03-23

申请人： GLOBALFOUNDRIES INC.

发明人： David L. Gardell ,  David M. Audette ,  Peter W. Neff

IPC分类号： G01R1/073 ,  G01R31/24 ,  G01R33/00 ,  G01R35/00 ,  G01R31/26 ,  G01R31/44

摘要： Aspects of the present disclosure provide a gimbal assembly test system including: a protective cover affixed to a test surface of a wafer probe card mounted within a gimbal bearing, wherein the protective cover includes an exterior surface oriented outward from the test surface of the wafer probe card; and a recess extending into the exterior surface of the protective cover and shaped to matingly engage a load cell tip therein.

公开(公告)号：US20170219626A1

公开(公告)日：2017-08-03

申请号：US15014479

申请日：2016-02-03

申请人： GLOBALFOUNDRIES INC.

发明人： David L. Gardell ,  David M. Audette ,  Peter W. Neff

IPC分类号： G01R1/073 ,  G01R31/28 ,  G01R35/00

CPC分类号： G01R1/07364 ,  G01R1/0735 ,  G01R31/24 ,  G01R31/2635 ,  G01R31/44 ,  G01R33/0017 ,  G01R35/005

摘要： Aspects of the present disclosure provide a gimbal assembly test system including: a protective cover affixed to a test surface of a wafer probe card mounted within a gimbal bearing, wherein the protective cover includes an exterior surface oriented outward from the test surface of the wafer probe card; and a recess extending into the exterior surface of the protective cover and shaped to matingly engage a load cell tip therein.

公开(公告)号：US10041976B2

公开(公告)日：2018-08-07

申请号：US15014479

申请日：2016-02-03

申请人： GLOBALFOUNDRIES INC.

发明人： David L. Gardell ,  David M. Audette ,  Peter W. Neff

IPC分类号： G01R1/073 ,  G01R33/00 ,  G01R35/00 ,  G01R31/24 ,  G01R31/44 ,  G01R31/26

摘要： Aspects of the present disclosure provide a gimbal assembly test system including: a protective cover affixed to a test surface of a wafer probe card mounted within a gimbal bearing, wherein the protective cover includes an exterior surface oriented outward from the test surface of the wafer probe card; and a recess extending into the exterior surface of the protective cover and shaped to matingly engage a load cell tip therein.