公开(公告)号：US09720101B2

公开(公告)日：2017-08-01

申请号：US14242283

申请日：2014-04-01

Applicant: GLOBALFOUNDRIES INC.

Inventor： Michael S. Gordon ,  Kenneth P. Rodbell ,  Emmanuel Yashchin

IPC: G01T1/178

CPC classification number: G01T1/178 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A system, method and computer program product for determining whether a material meets an alpha particle emissivity specification that includes measuring a background alpha particle emissivity for the counter and measuring a combined alpha particle emissivity from the counter containing a sample of the material. The combined alpha particle emissivity includes the background alpha particle emissivity in combination with a sample alpha particle emissivity. The decision statistic is computed based on the observed data and compared to a threshold value. When the decision statistic is less than the threshold value, the material meets the alpha particle emissivity specification. The testing times are computed based on pre-specified criteria so as to meet the needs of both Producer and Consumer.