公开(公告)号：US20190080038A1

公开(公告)日：2019-03-14

申请号：US15868364

申请日：2018-01-11

Applicant: GLOBALFOUNDRIES INC.

Inventor： Christina TURLEY ,  Jed H. RANKIN ,  Xuemei CHEN ,  Allen H. GABOR ,  Timothy A. BRUNNER

IPC: G06F17/50 ,  G03F1/22

Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to mask structures and methods of manufacture. The method includes determining a plane through a frontside surface and a backside surface of a mask, each plane representing a flatness of the frontside surface and the backside surface, respectively; subtracting, using at least one computing device, a difference between the plane of the frontside surface and the plane of the backside surface to find a thickness variation; generating, using the at least one computing device, a fitting to fit the thickness variation; and subtracting, using the at least one computing device, the fitting from the thickness variation to generate a residual structure for collecting a residual flatness measurement.

公开(公告)号：US20190121022A1

公开(公告)日：2019-04-25

申请号：US16216321

申请日：2018-12-11

Applicant: GLOBALFOUNDRIES INC.

Inventor： John J. ELLIS-MONAGHAN ,  Jeffrey P. GAMBINO ,  Mark D. JAFFE ,  Kirk D. PETERSON ,  Jed H. RANKIN

IPC: G02B6/122 ,  G02B6/136 ,  G02B6/125

Abstract: Methods and structures for shielding optical waveguides are provided. A method includes forming a first optical waveguide core and forming a second optical waveguide core adjacent to the first optical waveguide core. The method also includes forming an insulator layer over the first optical waveguide core and the second optical waveguide core. The method further includes forming a shielding structure in the insulator layer between the first optical waveguide core and the second optical waveguide core.