公开(公告)号：US20190121022A1

公开(公告)日：2019-04-25

申请号：US16216321

申请日：2018-12-11

Applicant: GLOBALFOUNDRIES INC.

Inventor： John J. ELLIS-MONAGHAN ,  Jeffrey P. GAMBINO ,  Mark D. JAFFE ,  Kirk D. PETERSON ,  Jed H. RANKIN

IPC: G02B6/122 ,  G02B6/136 ,  G02B6/125

Abstract: Methods and structures for shielding optical waveguides are provided. A method includes forming a first optical waveguide core and forming a second optical waveguide core adjacent to the first optical waveguide core. The method also includes forming an insulator layer over the first optical waveguide core and the second optical waveguide core. The method further includes forming a shielding structure in the insulator layer between the first optical waveguide core and the second optical waveguide core.