公开(公告)号：US10429414B2

公开(公告)日：2019-10-01

申请号：US15013106

申请日：2016-02-02

Applicant: GLOBALFOUNDRIES INC.

Inventor： Marvin G. L. Montaque ,  Stephen P. Ayotte ,  David L. Gardell

IPC: G01R1/073 ,  G01R3/00

Abstract: A system and method for disassembling a multiple contact probe head including a plurality of contact probes positioned by a first die at a first end of the plurality of probes and a second die at a second end of the plurality of probes, are provided. The system may include a manifold configured to sealingly receive an opposing side of the first die from the second die; and a vacuum source operatively coupled to the manifold to apply a vacuum to an interior of the manifold applying a force to the plurality of contact probes in position in the first die across. Where the probes include a paramagnetic material, a magnetic source may be employed to hold the probes during disassembly.

公开(公告)号：US20170219631A1

公开(公告)日：2017-08-03

申请号：US15013106

申请日：2016-02-02

Applicant: GLOBALFOUNDRIES INC.

Inventor： Marvin G. L. Montaque ,  Stephen P. Ayotte ,  David L. Gardell

IPC: G01R3/00 ,  G01R1/073

CPC classification number: G01R3/00 ,  G01R1/073 ,  G01R1/07357

Abstract: A system and method for disassembling a multiple contact probe head including a plurality of contact probes positioned by a first die at a first end of the plurality of probes and a second die at a second end of the plurality of probes, are provided. The system may include a manifold configured to sealingly receive an opposing side of the first die from the second die; and a vacuum source operatively coupled to the manifold to apply a vacuum to an interior of the manifold applying a force to the plurality of contact probes in position in the first die across. Where the probes include a paramagnetic material, a magnetic source may be employed to hold the probes during disassembly.