公开(公告)号：US09691775B1

公开(公告)日：2017-06-27

申请号：US15141087

申请日：2016-04-28

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Nicholas Vincent Licausi ,  Eric Scott Kozarsky ,  Guillaume Bouche

IPC: H01L27/11 ,  H01L27/092 ,  H01L27/02 ,  H01L21/8238 ,  H01L21/308 ,  H01L21/3105 ,  H01L21/311

CPC classification number: H01L27/1104 ,  H01L21/3081 ,  H01L21/3086 ,  H01L21/31051 ,  H01L21/31111 ,  H01L21/823821 ,  H01L27/0207 ,  H01L27/0924

Abstract: A semiconductor cell includes a substrate and an array of at least five substantially parallel fins having substantially equal fin widths disposed on the substrate. The array includes a predetermined minimum spacing distance between at least one pair of adjacent fins within the array. The array has a first n-type fin for an n-type semiconductor device, and a first p-type fin for a p-type semiconductor device. The first p-type fin is disposed adjacent the first n-type fin and spaced a predetermined first n-to-p distance apart from the first n-type fin. The first n-to-p distance is greater than the minimum spacing distance and less than the sum of the fin width plus twice the minimum spacing distance.