公开(公告)号：US09330982B1

公开(公告)日：2016-05-03

申请号：US14826276

申请日：2015-08-14

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Huy Cao ,  Songkram Srivathanakul ,  Jinping Liu ,  In Soo Jung

IPC: H01L21/8238 ,  H01L21/02 ,  H01L21/324 ,  H01L27/092

CPC classification number: H01L21/823807 ,  H01L21/2255 ,  H01L21/823821 ,  H01L27/0924

Abstract: A method of forming a diffusion barrier film over fins and the resulting device are provided. Embodiments include forming silicon fins over a substrate; depositing a borosilicate glass (BSG) liner cap over a first set of the silicon fins; depositing a phosphosilicate (PSG) liner cap over a second set of the silicon fins; and depositing a silicon oxycarbide (SiOC) diffusion barrier film over the BSG and PSG liner caps.

Abstract translation: 提供了一种在翅片上形成扩散阻挡膜的方法和所得到的器件。 实施例包括在衬底上形成硅散热片; 在第一组硅片上沉积硼硅酸盐玻璃（BSG）衬垫帽; 在第二组硅片上沉积磷硅酸盐（PSG）衬垫帽; 并在BSG和PSG衬套上沉积硅碳氧化物（SiOC）扩散阻挡膜。