公开(公告)号：US09748392B1

公开(公告)日：2017-08-29

申请号：US15053867

申请日：2016-02-25

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yanzhen Wang ,  Jidong Huang ,  Hui Zang

IPC: H01L21/283 ,  H01L29/78 ,  H01L29/66 ,  H01L29/06 ,  H01L21/285 ,  H01L21/28 ,  H01L29/49

CPC classification number: H01L29/7851 ,  H01L21/28008 ,  H01L21/2855 ,  H01L29/0649 ,  H01L29/495 ,  H01L29/4966 ,  H01L29/66795 ,  H01L29/785

Abstract: An angled gas cluster ion beam is used for each sidewall and top of a fin (two applications) to form work-function metal layer(s) only on the sidewalls and top of each fin.