公开(公告)号：US20170019982A1

公开(公告)日：2017-01-19

申请号：US14803068

申请日：2015-07-18

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Erik Robert Hosler ,  Moseh Preil

IPC: H05G2/00 ,  G21K5/08

CPC classification number: H05H7/04 ,  H05G2/00

Abstract: At least one method, apparatus and system for providing a plurality of optical beams, such as EUV beams. A first electron beam is received. The first electron beam is converted into at least a second electron beam and a third electron beam. The second and third second and third electron beams to an undulator. Using the undulator for generating a plurality of output beams using the at least second and third electron beams. The output beams respectively comprises a plurality of optical beam components and a plurality of electron beam component. A first optical beam component of the plurality of optical beam components is provided to a first processing tool.

Abstract translation: 用于提供诸如EUV波束的多个光束的至少一种方法，装置和系统。 接收第一电子束。 第一电子束被转换成至少第二电子束和第三电子束。 第二和第三个第二和第三个电子束到波动器。 使用波动器来使用至少第二和第三电子束产生多个输出光束。 输出光束分别包括多个光束分量和多个电子束分量。 多个光束分量的第一光束分量被提供给第一处理工具。