公开(公告)号：US20150035052A1

公开(公告)日：2015-02-05

申请号：US14519902

申请日：2014-10-21

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Jason STEPHENS ,  Marc TARABBIA ,  Nader HINDAWY ,  Roderick AUGUR

IPC: H01L23/48 ,  H01L29/49 ,  G06F17/50 ,  H01L27/088

CPC classification number: H01L23/481 ,  G06F17/5077 ,  H01L21/76877 ,  H01L23/5286 ,  H01L27/088 ,  H01L29/41725 ,  H01L29/4916 ,  H01L2027/11861 ,  H01L2027/11881 ,  H01L2924/0002 ,  Y02T10/82 ,  H01L2924/00

Abstract: A method for forming CA power rails using a three mask decomposition process and the resulting device are provided. Embodiments include forming a horizontal diffusion CA power rail in an active layer of a semiconductor substrate using a first color mask; forming a plurality of vertical CAs in the active layer using second and third color masks, the vertical CAs connecting the CA power rail to at least one diffusion region on the semiconductor substrate, spaced from the CA power rail, wherein each pair of CAs formed by one of the second and third color masks are separated by at least two pitches.

Abstract translation: 提供了使用三掩模分解处理形成CA电力轨道的方法和所得到的装置。 实施例包括使用第一颜色掩模在半导体衬底的有源层中形成水平扩散CA电力轨道; 使用第二和第三颜色掩模在有源层中形成多个垂直CA，垂直CA将CA电力轨连接到半导体衬底上与CA电力轨道间隔开的至少一个扩散区，其中每对CA由 第二和第三彩色掩模中的一个被至少两个间距分开。