公开(公告)号：US20230083401A1

公开(公告)日：2023-03-16

申请号：US17472722

申请日：2021-09-13

Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.

Inventor： Guoquan TEO ,  Meng Yew SEAH ,  Yongshun SUN ,  Eng Huat TOH

IPC: G01R1/073 ,  G01R33/07 ,  G01R35/00 ,  G01R31/28

Abstract: The present disclosure provides a wafer probe card including: a non-magnetic printed circuit board (PCB) having a first side and a second side opposite the first side, the first side configured to face a magnet; a plurality of connection structures provided on the first side of the non-magnetic PCB; and a Hall sensor unit fixedly provided on the first side of the non-magnetic PCB, the Hall sensor electrically connected to at least one of the plurality of connection structures.