公开(公告)号：US09846415B2

公开(公告)日：2017-12-19

申请号：US13746280

申请日：2013-01-21

申请人： GLOBALFOUNDRIES Singapore Pte. Ltd.

发明人： Weng Cheong Choo ,  Vei Tzee @ Kelvin Bui ,  Yuanfeng Zhang ,  Ting Lik Edmund Tan ,  Chee Wai Leong ,  Jong Youn Hwang ,  Shin Yit Lee ,  Wee Jin Tey ,  Kah Hing Ting ,  Ai Ling Nancy Chua

IPC分类号： G05B11/01 ,  G05B19/418

CPC分类号： G05B11/01 ,  G05B19/4189 ,  G05B2219/31002 ,  Y02P90/28 ,  Y02P90/285 ,  Y02P90/60

摘要： Methods for manufacturing automation and a computer executed automated handling system for forming a device are presented. The method includes issuing a transfer request by a tool. The transfer request is processed by a production control system configured for tracking and controlling the flow of carriers. The processing of the transfer request includes selecting a carrier containing production material. A transport system having transport and load/unload (U/L) units in a production area to effect a transfer is controlled and the carrier is transferred by the transport system.