公开(公告)号：US20170371321A1

公开(公告)日：2017-12-28

申请号：US15630057

申请日：2017-06-22

申请人： Seiko Epson Corporation

发明人： Masaki MOTOYOSHI ,  Ryosuke IMAI

IPC分类号： G05B19/418

CPC分类号： G05B19/41815 ,  B25J9/162 ,  B25J9/1638 ,  G05B19/418 ,  G05B2219/31002 ,  G05B2219/31264 ,  G05B2219/32061 ,  G05B2219/39155 ,  G05B2219/39163 ,  G05B2219/39178

摘要： A robot includes a movable section capable of moving, a driving section configured to drive the movable section, a transmitting section located between the movable section and the driving section, a first position detecting section configured to detect a position on an input side of the transmitting section, a second position detecting section configured to detect a position on an output side of the transmitting section, and an inertial sensor provided in the movable section. The driving section is driven on the basis of a detection result of the first position detecting section, a detection result of the second position detecting section, and a detection result of the inertial sensor.

公开(公告)号：US20070276530A1

公开(公告)日：2007-11-29

申请号：US11838284

申请日：2007-08-14

申请人： David Duffin ,  Daniel Jessop ,  Michael Teferra ,  Amitabh Puri ,  Glade Warner

发明人： David Duffin ,  Daniel Jessop ,  Michael Teferra ,  Amitabh Puri ,  Glade Warner

IPC分类号： G06F19/00

CPC分类号： G05B19/4189 ,  G05B2219/31002 ,  G05B2219/32266 ,  G05B2219/32277 ,  G05B2219/45031 ,  G06Q10/06 ,  H01L21/67276 ,  H01L21/67769 ,  Y02P90/20 ,  Y02P90/28 ,  Y02P90/285

摘要： Methods and apparatus are provided for managing movement of small lots between processing tools within an electronic device manufacturing facility. In some embodiments, a number of priority lots to be processed is determined and an equivalent number of carrier storage locations are reserved at a substrate loading station of a processing tool. The number of reserved carrier storage locations are made available either by processing and advancing occupying non-priority lots and/or moving unprocessed occupying non-priority lots from the substrate loading station. Priority lots are then transferred to the reserved carrier storage locations. Other embodiments are provided.

摘要翻译： 提供了用于管理电子设备制造设备内的处理工具之间的小批量移动的方法和装置。 在一些实施例中，确定要处理的多个优先批次，并且在处理工具的基板装载站处保留等量数量的载体存储位置。 可以通过处理和推进占用非优先权批次和/或从基板装载站移动未处理的占用非优先权批次来提供保留载体存储位置的数量。 优先批次然后被转移到保留的运营商存储位置。 提供其他实施例。

公开(公告)号：US06705523B1

公开(公告)日：2004-03-16

申请号：US10256992

申请日：2002-09-27

申请人： Erick F. Stamm ,  Michael Endsley

发明人： Erick F. Stamm ,  Michael Endsley

IPC分类号： G06F1760

CPC分类号： G06Q10/08 ,  G05B19/41895 ,  G05B2219/31002 ,  G05B2219/31283 ,  Y02P90/285 ,  Y02P90/60

摘要： A system and method is disclosed for delivering supplies from a loading dock to a production line using a supply delivery computer system that interfaces with a conveyor computer system to control transportation of supplies from a conveyor system to pickup stations and a vehicle facility manager computer system to control automated guided vehicles that transport supplies from pickup stations on the conveyor system to delivery stations on a production line. Supplies are labeled with barcodes indicating production line delivery location (i.e., an identifier for a delivery station), load sequence number, load quantity, and lot number to facilitate tracking and routing from the time they are unloaded at the manufacturing plant loading dock on to the conveyor system until they delivered to delivery stations on the production line.

摘要翻译： 公开了一种系统和方法，用于使用与输送机计算机系统连接的供应输送计算机系统将装载货物的供应物从装载台运送到生产线，以控制从输送系统到拾取站的运输，以及车辆设施管理者计算机系统 控制自动引导车辆，将输送系统上的拾取站的物资运送到生产线上的送货站。 耗材标有条形码，指示生产线的交货位置（即出货站的标识符），装载顺序号，装载数量和批号，以方便从制造厂装卸码头卸载时到达和跟踪路线。 输送系统，直到它们交付到生产线上的送货站。

公开(公告)号：US20040046545A1

公开(公告)日：2004-03-11

申请号：US10465915

申请日：2003-06-27

发明人： Shuji Akiyama ,  Toshihiko Iijima ,  Hiroki Hosaka

IPC分类号： G01R001/00

CPC分类号： H01L21/6835 ,  G05B19/00 ,  G05B19/41815 ,  G05B2219/31002 ,  G05B2219/45031 ,  H01L21/67276 ,  Y02P90/08 ,  Y02P90/285 ,  Y02P90/60

摘要： A conveyance system E for wafers W includes a host computer 1 for carrying out the management of the production of semiconductor devices, a plurality of probers 2 for inspecting the electric characteristics of the wafers W under the administration of the host computer 1, an AGV 3 for automatically transporting the wafers W in block of a carrier in order to deliver the wafers W one by one to these probers 2 according to respective demands and an AGV controller 4 for controlling the operation of the AGV 3 under the administration of the host computer 1.

摘要翻译： 用于晶片W的输送系统E包括用于执行半导体器件的生产的管理的主计算机1，用于在主计算机1的管理下检查晶片W的电特性的多个探测器2，AGV 3 用于在载体的块中自动输送晶片W，以便根据各自的要求将晶片W一个一个地传送到这些探测器2;以及AGV控制器4，用于在主计算机1的管理下控制AGV 3的操作 。

公开(公告)号：US3796163A

公开(公告)日：1974-03-12

申请号：US3796163D

申请日：1972-07-12

申请人： KEARNEY & TRECKER CORP

发明人： SEDGWICK R ,  SCHLUGE J ,  MEYER R ,  SCHALK F

IPC分类号： B23Q41/06 ,  G05B19/418 ,  B61L25/00

CPC分类号： G05B19/4189 ,  B23Q41/06 ,  G05B2219/31002 ,  G05B2219/31268 ,  Y02P80/114 ,  Y02P90/28 ,  Y02P90/285

摘要： A manufacturing system having one or more loading and unloading stations and a plurality of spaced apart numerically controlled machine tools, the operation of which is effected by direct computer control. The manufacturing system includes a workpiece supply system comprising a closed loop trackway on which one or more cars are supported for guided movement to the various stations. The car carries a pallet on which a work holding fixture with a workpiece is secured, and transports the pallet to a computer selected machine station. At the selected station the pallet is automatically removed from the car and placed on a multiple positionable table which serves as a workpiece receiving and storage device from which a desired next workpiece to be supplied to the machine tool is automatically selected and transferred thereto by computer control. The computer automatically directs an empty car to the unloading side of the machine tool to receive a pallet work a workpiece that a work operation has been performed on and then by computer direction returns to the unload station where the pallet is removed or the car will be directed to advance the workpiece to a different machine tool.

摘要翻译： 具有一个或多个加载和卸载站以及多个间隔开的数控机床的制造系统，其操作通过直接的计算机控制来实现。 该制造系统包括工件供应系统，该工件供应系统包括一个闭合的轨道，一个或多个轿厢被支撑在该闭合轨道上，以引导移动到各个站。 该车载有一个托盘，其上固定有工件的工件固定夹具，并将托盘运送到计算机选定的机器站。 在选定的车站，托盘自动从汽车上取下并放置在作为工件接收和存储装置的多重定位台上，通过计算机控制自动选择要供应给机床的所需下一个工件 。 计算机自动将空车引导到机床的卸载侧，以接收托盘作业，进行工作操作的工件，然后通过计算机方向返回卸载站，或卸下托盘 旨在将工件推进到不同的机床。

公开(公告)号：US09846415B2

公开(公告)日：2017-12-19

申请号：US13746280

申请日：2013-01-21

申请人： GLOBALFOUNDRIES Singapore Pte. Ltd.

发明人： Weng Cheong Choo ,  Vei Tzee @ Kelvin Bui ,  Yuanfeng Zhang ,  Ting Lik Edmund Tan ,  Chee Wai Leong ,  Jong Youn Hwang ,  Shin Yit Lee ,  Wee Jin Tey ,  Kah Hing Ting ,  Ai Ling Nancy Chua

IPC分类号： G05B11/01 ,  G05B19/418

CPC分类号： G05B11/01 ,  G05B19/4189 ,  G05B2219/31002 ,  Y02P90/28 ,  Y02P90/285 ,  Y02P90/60

摘要： Methods for manufacturing automation and a computer executed automated handling system for forming a device are presented. The method includes issuing a transfer request by a tool. The transfer request is processed by a production control system configured for tracking and controlling the flow of carriers. The processing of the transfer request includes selecting a carrier containing production material. A transport system having transport and load/unload (U/L) units in a production area to effect a transfer is controlled and the carrier is transferred by the transport system.

公开(公告)号：US09581983B2

公开(公告)日：2017-02-28

申请号：US13903527

申请日：2013-05-28

申请人： Comau LLC

发明人： Velibor Kilibarda ,  William J. Maybee

IPC分类号： G05B11/01 ,  B21D39/03 ,  B23P11/00 ,  G05B15/02 ,  G05D1/02 ,  G05B19/418 ,  B23K37/047

CPC分类号： G05B15/02 ,  B23K37/047 ,  G05B19/4189 ,  G05B19/41895 ,  G05B2219/31002 ,  G05D1/0225 ,  Y02P90/04 ,  Y02P90/285 ,  Y02P90/60

摘要： An automated guided cart (AGC) that is configured to travel along a cart path according to generally non-precision movements is implemented to support a build process requiring precise positioning of vehicle build devices. In an example of a method of use, a vehicle build device for the build process is engaged with the AGC. When the AGC travels proximate a build operation area, the AGC can be secured in a dimensionally fixed position, with the result that both the AGC and a vehicle build device engaged with the AGC are located in precise positions. Based on the precise location of the vehicle build device, the vehicle build device can be interfaced with robots or other automated equipment according to preprogrammed and/or precise movements to carry out a build process.

摘要翻译： 实现了被配置为沿着通常非精确移动的车辆路径行进的自动导向车（AGC），以支持需要车辆构建装置的精确定位的构建过程。 在使用方法的示例中，用于构建过程的车辆制造装置与AGC接合。 当AGC靠近构建操作区域行进时，AGC可以被固定在尺寸固定的位置，结果是与AGC接合的AGC和车辆构建装置都位于精确位置。 基于车辆构造装置的精确位置，车辆构建装置可以根据预编程和/或精确移动与机器人或其他自动化设备接口，以执行构建过程。

公开(公告)号：US20160079103A1

公开(公告)日：2016-03-17

申请号：US14852802

申请日：2015-09-14

申请人： DENSO CORPORATION ,  MURATA MACHINERY, LTD.

发明人： Masaaki KUROYANAGI ,  Toshihiro OKUMURA ,  Keisuke YOSHIDA ,  Kenji OTA

IPC分类号： H01L21/677 ,  H01L21/67 ,  B25J11/00

CPC分类号： H01L21/67276 ,  G05B19/4189 ,  G05B2219/31002 ,  G05B2219/31014 ,  G05B2219/45031 ,  H01L21/6773 ,  Y02P90/08 ,  Y02P90/28 ,  Y02P90/285

摘要： In a transfer system, at least one of a plurality of process apparatuses is connected to a station as a connected process apparatus. A station control unit controls a transfer device provided in the station through a communication with a process apparatus control unit to load the processing object to the connected process apparatus from the station and to unload the processing object from the connected process apparatus to the station. The station control unit controls the transfer device to begin unloading of the processing object from the connected process apparatus to the station after receiving a signal indicative of a presence of the processing object to be unloaded from the process apparatus control unit.

摘要翻译： 在传送系统中，作为连接的处理装置，将多个处理装置中的至少一个连接到站。 站控制单元通过与处理装置控制单元的通信来控制站中提供的传送装置，以将处理对象从站载入连接的处理装置，并将处理对象从连接的处理装置卸载到站。 站控制单元在从处理设备控制单元接收到指示要卸载的处理对象的信号的信号之后，控制传送设备开始将处理对象从连接的处理设备卸载到站。

公开(公告)号：US20130325159A1

公开(公告)日：2013-12-05

申请号：US13903527

申请日：2013-05-28

申请人： Comau, Inc.

发明人： Velibor Kilibarda ,  William J. Maybee

IPC分类号： G05B15/02 ,  G05D1/02

CPC分类号： G05B15/02 ,  B23K37/047 ,  G05B19/4189 ,  G05B19/41895 ,  G05B2219/31002 ,  G05D1/0225 ,  Y02P90/04 ,  Y02P90/285 ,  Y02P90/60

摘要： An automated guided cart (AGC) that is configured to travel along a cart path according to generally non-precision movements is implemented to support a build process requiring precise positioning of vehicle build devices. In an example of a method of use, a vehicle build device for the build process is engaged with the AGC. When the AGC travels proximate a build operation area, the AGC can be secured in a dimensionally fixed position, with the result that both the AGC and a vehicle build device engaged with the AGC are located in precise positions. Based on the precise location of the vehicle build device, the vehicle build device can be interfaced with robots or other automated equipment according to preprogrammed and/or precise movements to carry out a build process.

摘要翻译： 实现了被配置为沿着通常非精确移动的车辆路径行进的自动导向车（AGC），以支持需要车辆构建装置的精确定位的构建过程。 在使用方法的示例中，用于构建过程的车辆制造装置与AGC接合。 当AGC靠近构建操作区域行进时，AGC可以被固定在尺寸固定的位置，结果是与AGC接合的AGC和车辆构建装置都位于精确位置。 基于车辆构造装置的精确位置，车辆构建装置可以根据预编程和/或精确移动与机器人或其他自动化设备接口，以执行构建过程。

公开(公告)号：US07826918B2

公开(公告)日：2010-11-02

申请号：US11374998

申请日：2006-03-15

申请人： Toshihiko Iijima ,  Shinya Shimizu ,  Kaori Ishihara

发明人： Toshihiko Iijima ,  Shinya Shimizu ,  Kaori Ishihara

IPC分类号： G06F7/00

CPC分类号： H01L21/67736 ,  G01R31/2893 ,  G05B19/41815 ,  G05B2219/31002 ,  G05B2219/31216 ,  G05B2219/33198 ,  G05B2219/45031 ,  H01L21/67265 ,  Y02P90/08 ,  Y02P90/285 ,  Y10S414/135

摘要： A transfer method employs a transfer system including a semiconductor handling device and an automatic transfer device. The semiconductor handling device includes a first transfer mechanism and a first optically coupled parallel I/O communications interface. The automatic transfer device includes a second transfer mechanism and a second optically coupled parallel I/O communications interface. The transfer method includes a successive transfer notifying step wherein the automatic transfer device and the semiconductor handling device notify each other that a successive transfer is possible via an optical communications between the first and the second optically coupled parallel I/O communications interface in case where a plurality of objects to be processed are able to be successively transferred one by one between the first and the second transfer mechanism; and a successive transfer step wherein the objects are transferred one by one between the first and the second transfer mechanism.

摘要翻译： 转印方法采用包括半导体处理装置和自动转印装置的转印系统。 半导体处理装置包括第一传送机构和第一光耦合并行I / O通信接口。 自动传送装置包括第二传送机构和第二光耦合并行I / O通信接口。 传送方法包括连续传送通知步骤，其中自动传送设备和半导体处理设备通过彼此通过第一和第二光耦合并行I / O通信接口之间的光通信可以进行连续的传送， 要处理的多个物体能够在第一和第二传送机构之间逐个地依次传送; 以及连续传送步骤，其中物体在第一和第二传送机构之间逐个传送。