公开(公告)号：US11543606B2

公开(公告)日：2023-01-03

申请号：US17196428

申请日：2021-03-09

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Nicholas A. Polomoff ,  Jae Kyu Cho ,  Frank Kuechenmeister ,  John J. Ellis-Monaghan ,  Michal Rakowski

IPC: G02B6/42 ,  G02B6/122 ,  G02B6/13 ,  F21V8/00

Abstract: Structures including an edge coupler and a crackstop, as well as methods of forming a structure including an edge coupler and a crackstop. A waveguide core and a crackstop are located over a top surface of a dielectric layer. A communication passageway is either optically coupled or electrically coupled to the waveguide core. The communication passageway, which may include an electric conductor or a buried waveguide core, extends laterally beneath the crackstop.

公开(公告)号：US20220291464A1

公开(公告)日：2022-09-15

申请号：US17196428

申请日：2021-03-09

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Nicholas A. Polomoff ,  Jae Kyu Cho ,  Frank Kuechenmeister ,  John J. Ellis-Monaghan ,  Michal Rakowski

IPC: G02B6/42 ,  G02B6/13 ,  F21V8/00 ,  G02B6/122

Abstract: Structures including an edge coupler and a crackstop, as well as methods of forming a structure including an edge coupler and a crackstop. A waveguide core and a crackstop are located over a top surface of a dielectric layer. A communication passageway is either optically coupled or electrically coupled to the waveguide core. The communication passageway, which may include an electric conductor or a buried waveguide core, extends laterally beneath the crackstop.