公开(公告)号：US20210356429A1

公开(公告)日：2021-11-18

申请号：US16874712

申请日：2020-05-15

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Jay Mody ,  Hemant Dixit

IPC: G01N27/62 ,  H01J37/285

Abstract: In APT systems and methods, a sample is analyzed by concurrently applying different types of energy to the tip of the sample, thereby causing atom evaporation from the end of the tip. Evaporated atoms are analyzed to determine chemical nature and original position information, which is used to generate a compositional profile. To ensure an accurate profile, the applied energy includes: a D.C. voltage, which lowers the critical energy level (Q) for atom evaporation; first laser pulses, which are applied to opposing first sides of the tip near the end to further lower Q and which are phase-shifted so resulting standing wave patterns of heat distribution have energy maxima that are offset and below a threshold to avoid damage to tip side surfaces; and second laser pulse(s), which is/are applied to second side(s) of the tip near the distal end to reach Q and cause atom evaporation from the end.

公开(公告)号：US11009525B1

公开(公告)日：2021-05-18

申请号：US15931792

申请日：2020-05-14

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Jay Mody ,  Hemant Dixit

IPC: G01R1/067 ,  G01R31/28 ,  G01N27/22 ,  G01B11/28

Abstract: An illustrative system disclosed herein includes a conductive probe that is adapted to hold a quantity of mercury, wherein the conductive probe includes a conductive body with an outlet and a mercury control system adapted to supply mercury to the conductive probe. In this example, the system also includes an image sensor that is adapted to obtain an image of a mercury droplet positioned on a surface of a material and a measurement system that is adapted to receive the image of the mercury droplet and calculate a contact area between the mercury droplet and the surface of the material based upon the image of the mercury droplet.

公开(公告)号：US11217424B2

公开(公告)日：2022-01-04

申请号：US16874712

申请日：2020-05-15

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Jay Mody ,  Hemant Dixit

IPC: H01J37/285 ,  G01N27/62

Abstract: In APT systems and methods, a sample is analyzed by concurrently applying different types of energy to the tip of the sample, thereby causing atom evaporation from the end of the tip. Evaporated atoms are analyzed to determine chemical nature and original position information, which is used to generate a compositional profile. To ensure an accurate profile, the applied energy includes: a D.C. voltage, which lowers the critical energy level (Q) for atom evaporation; first laser pulses, which are applied to opposing first sides of the tip near the end to further lower Q and which are phase-shifted so resulting standing wave patterns of heat distribution have energy maxima that are offset and below a threshold to avoid damage to tip side surfaces; and second laser pulse(s), which is/are applied to second side(s) of the tip near the distal end to reach Q and cause atom evaporation from the end.

公开(公告)号：US11175307B1

公开(公告)日：2021-11-16

申请号：US17005883

申请日：2020-08-28

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Jay Mody ,  Hemant Dixit

IPC: G01Q30/16 ,  G01Q60/24

Abstract: An illustrative method disclosed herein includes measuring at least one electrical-related parameter of a doped semiconductor material by simultaneously irradiating at least a portion of an upper surface of the doped semiconductor material, urging a conductive tip of a cantilever beam probe into conductive contact with the upper surface of the irradiated portion of the doped semiconductor material, and generating an electrical current that flows through the doped semiconductor material, through a measurement device that is operatively coupled to the cantilever beam probe and through the cantilever beam probe, wherein the measurement device measures the at least one electrical-related parameter of the doped semiconductor material.