Crystal grating apparatus
    1.
    发明授权
    Crystal grating apparatus 有权
    水晶光栅装置

    公开(公告)号:US07515262B2

    公开(公告)日:2009-04-07

    申请号:US10542865

    申请日:2004-01-21

    IPC分类号: G01J3/02 G01J3/30

    CPC分类号: G01N21/21 G01J3/447

    摘要: Apparatus for analyzing light having at least one wavelength, the apparatus comprising: (a) a light deflector for deflecting the light so as to provide a deflected light beam characterized by at least one wavelength-dependent angle, respectively corresponding to the at least one wavelength of the light; (b) an encoder, capable of encoding the deflected light beam so as to provide an encoded light beam characterized by at least one angle-dependent polarization state, respectively corresponding to the at least one wavelength-dependent angle; and (c) a decoder, for decoding the encoded light beam so as to determine at least one spectral component of the light.

    摘要翻译: 用于分析具有至少一个波长的光的装置,所述装置包括:(a)用于偏转光的光偏转器,以便提供偏转的光束,其特征在于分别对应于至少一个波长的至少一个波长相关的角度 的光; (b)编码器,其能够编码偏转的光束,以便提供分别对应于至少一个与波长相关的角度的至少一个依赖于角度的偏振状态的编码光束; 和(c)解码器,用于对编码的光束进行解码,以便确定光的至少一个光谱分量。

    Crystal grating apparatus
    2.
    发明申请

    公开(公告)号:US20060126067A1

    公开(公告)日:2006-06-15

    申请号:US10542865

    申请日:2004-01-21

    IPC分类号: G01J4/00

    CPC分类号: G01N21/21 G01J3/447

    摘要: Apparatus for analyzing light having at least one wavelength, the apparatus comprising: (a) a light deflector for deflecting the light so as to provide a deflected light beam characterized by at least one wavelength-dependent angle, respectively corresponding to the at least one wavelength of the light; (b) an encoder, capable of encoding the deflected light beam so as to provide an encoded light beam characterized by at least one angle-dependent polarization state, respectively corresponding to the at least one wavelength-dependent angle; and (c) a decoder, for decoding the encoded light beam so as to determine at least one spectral component of the light.

    Lithographic and measurement techniques using the optical properties of biaxial crystals
    3.
    发明申请
    Lithographic and measurement techniques using the optical properties of biaxial crystals 有权
    使用双轴晶体的光学性质的光刻和测量技术

    公开(公告)号:US20070171432A1

    公开(公告)日:2007-07-26

    申请号:US11488176

    申请日:2006-07-14

    IPC分类号: G01B11/14

    摘要: A method and apparatus for accurately retrieving the position of an optical feature. The method uses the optical properties of biaxial crystals to conically refract the optical feature and transform the image of the optical feature to a circular ring structure. The position of the optical feature is then calculated by locating a center point associated with the circular ring structure.

    摘要翻译: 一种用于准确地检索光学特征的位置的方法和装置。 该方法采用双轴晶体的光学特性,将光学特征圆锥折射,并将光学特征的图像转换为圆环结构。 然后通过定位与圆环结构相关联的中心点来计算光学特征的位置。

    Lithographic and measurement techniques using the optical properties of biaxial crystals
    4.
    发明授权
    Lithographic and measurement techniques using the optical properties of biaxial crystals 有权
    使用双轴晶体的光学性质的光刻和测量技术

    公开(公告)号:US07541600B2

    公开(公告)日:2009-06-02

    申请号:US11488176

    申请日:2006-07-14

    IPC分类号: G01J1/00 G01N21/00 G01N23/00

    摘要: A method and apparatus for accurately retrieving the position of an optical feature. The method uses the optical properties of biaxial crystals to conically refract the optical feature and transform the image of the optical feature to a circular ring structure. The position of the optical feature is then calculated by locating a center point associated with the circular ring structure.

    摘要翻译: 一种用于准确地检索光学特征的位置的方法和装置。 该方法采用双轴晶体的光学特性,将光学特征圆锥折射,并将光学特征的图像转换为圆环结构。 然后通过定位与圆环结构相关联的中心点来计算光学特征的位置。