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    Fuel cell with integral manifold
    2.
    发明授权
    Fuel cell with integral manifold 有权
    带集成歧管的燃料电池

    公开(公告)号：US07348087B2

    公开(公告)日：2008-03-25

    申请号：US10628946

    申请日：2003-07-28

    申请人： Daniel A Kearl ,  David Champion ,  Gregory S Herman ,  Richard B. Peterson

    发明人： Daniel A Kearl ,  David Champion ,  Gregory S Herman ,  Richard B. Peterson

    IPC分类号： H01M8/10 ,  B05D5/12

    CPC分类号： H01M8/1097 ,  H01M8/0258 ,  H01M8/0263 ,  H01M8/1004 ,  H01M8/241 ,  H01M8/2418 ,  H01M8/2483

    摘要： A MEMS-based fuel cell has a substrate, an electrolyte in contact with the substrate, a cathode in contact with the electrolyte, an anode spaced apart from the cathode and in contact with the electrolyte, and an integral manifold for supplying either a fuel or an oxidant or both together, the integral manifold extending over at least a portion of the electrolyte and over at least one of the anode and cathode. Methods for making and using arrays of the fuel cells are disclosed.

    摘要翻译： 基于MEMS的燃料电池具有衬底，与衬底接触的电解质，与电解质接触的阴极，与阴极隔开并与电解质接触的阳极，以及用于供应燃料或 氧化剂或两者在一起，整个歧管在电解质的至少一部分上延伸并且在阳极和阴极中的至少一个之上。 公开了制造和使用燃料电池阵列的方法。

    Method of fabricating an integrated orifice plate and cap structure
    5.
    发明授权
    Method of fabricating an integrated orifice plate and cap structure 有权
    制造集成孔板和盖结构的方法

    公开(公告)号：US08940559B2

    公开(公告)日：2015-01-27

    申请号：US13289208

    申请日：2011-11-04

    申请人： Daniel A Kearl ,  Rio Rivas

    发明人： Daniel A Kearl ,  Rio Rivas

    IPC分类号： H01L21/00 ,  B41J2/16

    CPC分类号： B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1645

    摘要： In an embodiment, a method of fabricating an integrated orifice plate and cap structure includes forming an orifice bore on the front side of a product wafer, coating side walls of the orifice bore with a protective material, grinding the product wafer from its back side to a final thickness, forming a first hardmask for subsequent cavity formation, forming a second hardmask over the first hardmask for subsequent descender formation, forming a softmask over the second hardmask for subsequent convergent bore formation, etching a latent convergent bore using the softmask as an etch delineation feature, etching a descender using the second hardmask as an etch delineation feature, and anisotropic etching of convergent bore walls and cavities using the first hardmask as an etch delineation feature.

    摘要翻译： 在一个实施例中，制造集成孔板和盖结构的方法包括在产品晶片的正面上形成孔口孔，用保护材料涂覆孔孔的侧壁，将产品晶片从其背面研磨到 最后的厚度，形成用于后续空腔形成的第一硬掩模，在第一硬掩模上形成第二硬掩模用于随后的下沉形成，在第二硬掩模上形成软掩模以用于随后的会聚孔形成，使用软掩模蚀刻潜在会聚孔作为蚀刻 描绘特征，使用第二硬掩模蚀刻下坡作为蚀刻描绘特征，以及使用第一硬掩模作为蚀刻描绘特征的会聚孔壁和空腔的各向异性蚀刻。