Transport device having a deflectable sealing frame
    2.
    发明授权
    Transport device having a deflectable sealing frame 有权
    运输装置具有可偏转的密封框架

    公开(公告)号:US08740537B2

    公开(公告)日:2014-06-03

    申请号:US13138714

    申请日:2010-04-23

    IPC分类号: H01L21/67

    摘要: A device for transporting a substrate (5) into a working area (2, 3, 22) which can be temporarily separated in a vacuum-tight manner, and a corresponding method. A transport element (4) transports a substrate (5) in the plane (XY) to a defined working area (2, 3, 22) of a chamber (1). The transport element (4) has a deflectable sealing frame (6) which can be moved in a Z-direction perpendicular with respect to the XY-plane. The sealing frame (6) has two opposing sealing surfaces (10, 11) in the Z-direction. By pressing a closure element (16, 21, 24) against a first sealing surface (10, 11) and thus pressing the second sealing surface (11, 10) against a chamber wall (32, 31), the space of the working area (2, 3, 22) of the chamber (1) can be sealed.

    摘要翻译: 一种用于将基板(5)输送到可以以真空密封方式临时分离的工作区域(2,3,22)的装置以及相应的方法。 输送元件(4)将平面(XY)中的基板(5)输送到室(1)的限定的工作区域(2,3,22)。 运输元件(4)具有可偏转的密封框架(6),其可以相对于XY平面垂直于Z方向移动。 密封框架(6)在Z方向上具有两个相对的密封面(10,11)。 通过将闭合元件(16,21,24)压靠在第一密封表面(10,11)上,并且因此将第二密封表面(11,10)压靠在室壁(32,31)上,工作区域的空间 (1)的腔室(2,3,22)可被密封。

    TRANSPORT DEVICE HAVING A DEFLECTABLE SEALING FRAME
    3.
    发明申请
    TRANSPORT DEVICE HAVING A DEFLECTABLE SEALING FRAME 有权
    具有防水密封框架的运输设备

    公开(公告)号:US20120027952A1

    公开(公告)日:2012-02-02

    申请号:US13138714

    申请日:2010-04-23

    摘要: The invention describes a device for transporting a substrate (5) into a working area (2, 3, 22) which can be temporarily separated in a vacuum-tight manner, and a corresponding method. A transport means (4) transports a substrate (5) in the plane (XY) to a defined working area (2, 3, 22) of a chamber (1). The transport means (4) has a deflectable sealing frame (6) which can be moved in a Z-direction perpendicular with respect to the XY-plane. The sealing frame (6) has two opposing sealing surfaces (10, 11) in the Z-direction. By pressing a closure means (16, 21, 24) against a first sealing surface (10, 11) and thus pressing the second sealing surface (11, 10) against a chamber wall (32, 31), the space of the working area (2, 3, 22) of the chamber (1) can be sealed.

    摘要翻译: 本发明描述了一种用于将基板(5)输送到可以以真空密封方式临时分离的工作区域(2,3,22)的装置和相应的方法。 传送装置(4)将平面(XY)中的基板(5)传送到室(1)的限定的工作区域(2,3,22)。 传送装置(4)具有可偏转的密封框架(6),其可相对于XY平面垂直于Z方向移动。 密封框架(6)在Z方向上具有两个相对的密封面(10,11)。 通过将闭合装置(16,21,24)压靠在第一密封表面(10,11)上,从而将第二密封表面(11,10)压靠在室壁(32,31)上,工作区域的空间 (1)的腔室(2,3,22)可被密封。