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公开(公告)号：US07167311B2
公开(公告)日：2007-01-23
申请号：US10970952
申请日：2004-10-22
申请人： Gemot Brasen , Christian Laue , Matthias Loeffler
发明人： Gemot Brasen , Christian Laue , Matthias Loeffler
CPC分类号： G02B5/04 , G02B5/3083 , G02B27/283 , G11B5/3163
摘要： A polarizing beamsplitter is provided, comprising two wedge-shaped prisms of a birefringent material, the prisms forming a plan-parallel plate, wherein an incident light beam is separated into two partial beams being arranged parallel to the incident beam when emerging from the beamsplitter, the partial beams having a lateral distance with respect to each other, which is continuously changeable.
摘要翻译： 提供了一种偏振分束器，其包括两个双折射材料的楔形棱镜，棱镜形成平面平行板，其中入射光束被分离为当从分束器出射时与入射光束平行布置的两个部分光束， 该部分光束具有相对于彼此的横向距离，其可连续变化。
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公开(公告)号：US07693324B2
公开(公告)日：2010-04-06
申请号：US11160707
申请日：2005-07-06
申请人： Gernot Brasen , Christian Laue , Matthias Loeffler , Heiko Theuer
发明人： Gernot Brasen , Christian Laue , Matthias Loeffler , Heiko Theuer
IPC分类号： G06K9/00
CPC分类号： G01N21/95607 , G01N2201/0675 , H01L21/67288
摘要： The present invention provides a method, an optical inspection apparatus as well as a computer program product for optical inspection of a surface. The optical inspection apparatus can be effectively applied for optical inspection of periodic structures on e.g. a semi-conductor wafer for the purpose of quality control. By effectively splitting a light beam into a plurality of spatially separated light beams and by selective usage of these light beams, various surface segments of the surface can be inspected simultaneously by superposition of respective images. A resulting superposition image can then be compared with a reference image for detection of defects of the surface.
摘要翻译： 本发明提供一种光学检查装置以及用于光学检查表面的计算机程序产品的方法。 光学检查装置可以有效地应用于例如周期性结构的光学检查。 半导体晶片，用于质量控制。 通过将光束有效地分割成多个空间分离的光束并且通过选择性地使用这些光束，可以通过叠加各个图像同时检查表面的各种表面段。 然后可以将所得到的叠加图像与用于检测表面缺陷的参考图像进行比较。
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公开(公告)号：US07342654B2
公开(公告)日：2008-03-11
申请号：US10904986
申请日：2004-12-08
IPC分类号： G01N21/00
CPC分类号： G01N21/47 , G01N21/958 , G01N2021/4711 , G01N2021/4735
摘要： The invention relates to a system and method of detecting impurities in a cylindrically shaped transparent medium, wherein the cylindrically shaped transparent medium is illuminated with electromagnetic radiation, and the radiation having components emerging radially from the medium, and at least some of the components are received by a detector for detecting impurities of the medium. The components are detected at a multiplicity of relative angular positions around the symmetry axis of the cylinder, so as to form an impurity diagram that may be analyzed to detect and measure impurities in the medium.
摘要翻译： 本发明涉及一种在圆柱形透明介质中检测杂质的系统和方法，其中圆柱形透明介质用电磁辐射照射，辐射具有从介质径向出射的部件，并且至少部分部件被接收 通过用于检测介质的杂质的检测器。 在围绕圆柱体的对称轴线的多个相对角度位置处检测部件，以便形成可以被分析以检测和测量介质中的杂质的杂质图。
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公开(公告)号：US07221459B2
公开(公告)日：2007-05-22
申请号：US10806593
申请日：2004-03-23
申请人： Gernot Brasen , Christian Laue , Matthias Loeffler , Heiko Theuer
发明人： Gernot Brasen , Christian Laue , Matthias Loeffler , Heiko Theuer
IPC分类号： G01B9/02
CPC分类号： G01B9/0207 , G01B9/02019 , G01B11/0608 , G01B2290/70
摘要： The invention relates to an interferometric method for measuring a height of a first region on a first surface, the first surface having first areas having first optical properties and second areas having second optical properties, the method comprising the steps of generating of first and second coherent light beams, reflecting at least the first coherent light beam from the first region into a first return beam and reflecting the second coherent light beam from a second region into a second return beam, measuring at least a first reflectivity of the first region, determining a topography-dependent phase shift of the first and second return beams for the height measurement based on the first reflectivity.
摘要翻译： 本发明涉及一种用于测量第一表面上的第一区域的高度的干涉测量方法，所述第一表面具有具有第一光学特性的第一区域和具有第二光学特性的第二区域，所述方法包括以下步骤：产生第一和第二相干 光束，至少反射从第一区域到第一返回光束的第一相干光束，并将第二相干光束从第二区域反射到第二返回光束中，测量第一区域的至少第一反射率， 基于第一反射率的高度测量的第一和第二返回光束的地形相关相移。
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公开(公告)号：US20060250619A1
公开(公告)日：2006-11-09
申请号：US11481101
申请日：2006-07-05
申请人： Gernot Brasen , Christian Laue , Matthias Loeffler , Heiko Theuer
发明人： Gernot Brasen , Christian Laue , Matthias Loeffler , Heiko Theuer
IPC分类号： G01B11/02
CPC分类号： G01B9/0207 , G01B9/02019 , G01B11/0608 , G01B2290/70
摘要： The invention relates to an interferometric method for measuring a height of a first region on a first surface, the first surface having first areas having first optical properties and second areas having second optical properties, the method comprising the steps of generating of first and second coherent light beams, reflecting at least the first coherent light beam from the first region into a first return beam and reflecting the second coherent light beam from a second region into a second return beam, measuring at least a first reflectivity of the first region, determining a topography-dependent phase shift of the first and second return beams for the height measurement based on the first reflectivity.
摘要翻译： 本发明涉及一种用于测量第一表面上的第一区域的高度的干涉测量方法，所述第一表面具有具有第一光学特性的第一区域和具有第二光学特性的第二区域，所述方法包括以下步骤：产生第一和第二相干 光束，至少反射从第一区域到第一返回光束的第一相干光束，并将第二相干光束从第二区域反射到第二返回光束中，测量第一区域的至少第一反射率， 基于第一反射率的高度测量的第一和第二返回光束的地形相关相移。
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公开(公告)号：US07088453B2
公开(公告)日：2006-08-08
申请号：US10703307
申请日：2003-11-07
申请人： Gernot Brasen , Christian Laue , Matthias Loeffler
发明人： Gernot Brasen , Christian Laue , Matthias Loeffler
IPC分类号： G01B9/02
CPC分类号： G02B5/3083
摘要： An optical device has a rotatable birefringent crystal. The crystal is rotatable around a first axis (4; 42) and has a crystallographic-optical axis (6; 44) in a plane that is perpendicular to the first axis. In addition, the crystal is rotated around the first axis in order to control a displacement (Δx) of a light beam in the plane when the light beam is polarized within the plane and directed onto the crystal.
摘要翻译： 光学装置具有可旋转的双折射晶体。 晶体可围绕第一轴线（4; 42）旋转，并且在垂直于第一轴线的平面中具有晶体光轴（6; 44）。 此外，当光束在平面内被偏振并被引导到晶体上时，晶体围绕第一轴旋转以便控制平面中光束的位移（Deltax）。
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公开(公告)号：US20080180689A1
公开(公告)日：2008-07-31
申请号：US12059017
申请日：2008-03-31
申请人： Gernot Brasen , Christian Laue , Matthias Loeffler , Heiko Theuer
发明人： Gernot Brasen , Christian Laue , Matthias Loeffler , Heiko Theuer
IPC分类号： G01B11/06
CPC分类号： G01B9/0207 , G01B9/02019 , G01B11/0608 , G01B2290/70
摘要： The invention relates to an interferometric method for measuring a height of a first region on a first surface, the first surface having first areas having first optical properties and second areas having second optical properties, the method comprising the steps of generating of first and second coherent light beams, reflecting at least the first coherent light beam from the first region into a first return beam and reflecting the second coherent light beam from a second region into a second return beam, measuring at least a first reflectivity of the first region, determining a topography-dependent phase shift of the first and second return beams for the height measurement based on the first reflectivity.
摘要翻译： 本发明涉及一种用于测量第一表面上的第一区域的高度的干涉测量方法，所述第一表面具有具有第一光学特性的第一区域和具有第二光学特性的第二区域，所述方法包括以下步骤：产生第一和第二相干 光束，至少反射从第一区域到第一返回光束的第一相干光束，并将第二相干光束从第二区域反射到第二返回光束中，测量第一区域的至少第一反射率， 基于第一反射率的高度测量的第一和第二返回光束的地形相关相移。
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公开(公告)号：US20080180687A1
公开(公告)日：2008-07-31
申请号：US12059001
申请日：2008-03-31
申请人： Gernot Brasen , Christian Laue , Matthias Loeffler , Heiko Theuer
发明人： Gernot Brasen , Christian Laue , Matthias Loeffler , Heiko Theuer
IPC分类号： G01B11/02
CPC分类号： G01B9/0207 , G01B9/02019 , G01B11/0608 , G01B2290/70
摘要： The invention relates to an interferometric method for measuring a height of a first region on a first surface, the first surface having first areas having first optical properties and second areas having second optical properties, the method comprising the steps of generating of first and second coherent light beams, reflecting at least the first coherent light beam from the first region into a first return beam and reflecting the second coherent light beam from a second region into a second return beam, measuring at least a first reflectivity of the first region, determining a topography-dependent phase shift of the first and second return beams for the height measurement based on the first reflectivity.
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公开(公告)号：US07230763B2
公开(公告)日：2007-06-12
申请号：US11426557
申请日：2006-06-26
申请人： Gernot Brasen , Christian Laue , Matthias Loeffler
发明人： Gernot Brasen , Christian Laue , Matthias Loeffler
IPC分类号： G02B27/10
CPC分类号： G02B5/04 , G02B5/3083 , G02B27/283 , G11B5/3163
摘要： A polarizing beamsplitter is provided, comprising two wedge-shaped prisms of a birefringent material, the prisms forming a plan-parallel plate, wherein an incident light beam is separated into two partial beams being arranged parallel to the incident beam when emerging from the beamsplitter, the partial beams having a lateral distance with respect to each other, which is continuously changeable.
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公开(公告)号：US20050146796A1
公开(公告)日：2005-07-07
申请号：US10970952
申请日：2004-10-22
申请人： Gernot Brasen , Christian Laue , Matthias Loeffler
发明人： Gernot Brasen , Christian Laue , Matthias Loeffler
CPC分类号： G02B5/04 , G02B5/3083 , G02B27/283 , G11B5/3163
摘要： A polarizing beamsplitter is provided, comprising two wedge-shaped prisms of a birefringent material, the prisms forming a plan-parallel plate, wherein an incident light beam is separated into two partial beams being arranged parallel to the incident beam when emerging from the beamsplitter, the partial beams having a lateral distance with respect to each other, which is continuously changeable.
摘要翻译： 提供了一种偏振分束器，其包括两个双折射材料的楔形棱镜，棱镜形成平面平行板，其中入射光束被分离为当从分束器出射时与入射光束平行布置的两个部分光束， 该部分光束具有相对于彼此的横向距离，其可连续变化。
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