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公开(公告)号:US20240369760A1
公开(公告)日:2024-11-07
申请号:US18141753
申请日:2023-05-01
Applicant: GlobalFoundries U.S. Inc.
Inventor: Arpan Dasgupta , Zahidur Chowdhury , Takako Hirokawa , Vaishnavi Karra , Norman Robson
Abstract: Structures including a light source and an edge coupler, and methods of forming and using such structures. The structure comprises a semiconductor substrate and a back-end-of-line stack on the semiconductor substrate. The back-end-of-line stack includes a first dielectric layer, a first plurality of metal features in the first dielectric layer, a second dielectric layer on the first dielectric layer, and a second plurality of metal features in the second dielectric layer. The second plurality of metal features have a non-overlapping relationship with the first plurality of metal features. The structure further comprises an edge coupler adjacent to the first plurality of metal features and the second plurality of metal features.
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公开(公告)号:US20240329308A1
公开(公告)日:2024-10-03
申请号:US18127220
申请日:2023-03-28
Applicant: GlobalFoundries U.S. Inc.
Inventor: Arpan Dasgupta , Yusheng Bian , John M. Safran , Norman Robson
CPC classification number: G02B6/1228 , G02B6/13
Abstract: Structures including multiple photonics chips and methods of fabricating a structure including multiple photonics chips. The structure comprises a first chip including a first edge and a first plurality of optical couplers disposed at the first edge, and a second chip including a second edge adjacent to the first edge of the first chip and a second plurality of optical couplers. The second plurality of optical couplers are disposed at the second edge adjacent to the first plurality of optical couplers.
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