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公开(公告)号:US20110012024A1
公开(公告)日:2011-01-20
申请号:US12560451
申请日:2009-09-16
申请人: Gou-Chung Chi , Ping-Jung Huang , Chung-Wei Chen , Ching-Jen Pan , Yu-Lun Liu , Fu-Chun Tsao
发明人: Gou-Chung Chi , Ping-Jung Huang , Chung-Wei Chen , Ching-Jen Pan , Yu-Lun Liu , Fu-Chun Tsao
IPC分类号: H01J27/02
CPC分类号: H01J27/26 , H01J37/08 , H01J37/3171
摘要: A method for preparing an ion source from nanoparticles is provided. The method includes the steps of: providing nanoparticles, vaporizing the nanoparticles from a solid state to a gaseous state, and ionizing the gas to form the ion source. The ion source is prepared by placing solid nanoparticles in a stainless tube, heating and vaporizing the solid nanoparticles into a gaseous state, and ionizing the gas. The gas can be formed at a lower heating temperature than when solid lumps are used because solid nanoparticles have a lower melting point than solid lumps. Thus, the heating temperature is lowered, and the preparing time of the ion source is shortened. Besides, under the same temperature, an ion source prepared from nanoparticles provides higher vapor pressure and allows a higher implantation dose than when the ion source is prepared from solid lumps, thus expanding the applicability of ion implantation technology.
摘要翻译: 提供了一种从纳米颗粒制备离子源的方法。 该方法包括以下步骤:提供纳米颗粒,将纳米颗粒从固体状态汽化成气态,并使气体离子化形成离子源。 离子源通过将固体纳米颗粒置于不锈钢管中,将固体纳米颗粒加热并汽化成气态并使气体离子化来制备。 气体可以在比使用固体块时低的加热温度下形成,因为固体纳米颗粒具有比固体块更低的熔点。 因此,加热温度降低,离子源的制备时间缩短。 此外,在相同温度下,从纳米颗粒制备的离子源提供更高的蒸气压力,并且允许比从固体块制备离子源时更高的注入剂量,从而扩大了离子注入技术的适用性。
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公开(公告)号:US08283638B2
公开(公告)日:2012-10-09
申请号:US12560451
申请日:2009-09-16
申请人: Gou-Chung Chi , Ping-Jung Huang , Chung-Wei Chen , Ching-Jen Pan , Yu-Lun Liu , Fu-Chun Tsao
发明人: Gou-Chung Chi , Ping-Jung Huang , Chung-Wei Chen , Ching-Jen Pan , Yu-Lun Liu , Fu-Chun Tsao
IPC分类号: H01J27/02
CPC分类号: H01J27/26 , H01J37/08 , H01J37/3171
摘要: A method for preparing an ion source from nanoparticles is provided. The method includes the steps of: providing nanoparticles, vaporizing the nanoparticles from a solid state to a gaseous state, and ionizing the gas to form the ion source. The ion source is prepared by placing solid nanoparticles in a stainless tube, heating and vaporizing the solid nanoparticles into a gaseous state, and ionizing the gas. The gas can be formed at a lower heating temperature than when solid lumps are used because solid nanoparticles have a lower melting point than solid lumps. Thus, the heating temperature is lowered, and the preparing time of the ion source is shortened. Besides, under the same temperature, an ion source prepared from nanoparticles provides higher vapor pressure and allows a higher implantation dose than when the ion source is prepared from solid lumps, thus expanding the applicability of ion implantation technology.
摘要翻译: 提供了一种从纳米颗粒制备离子源的方法。 该方法包括以下步骤:提供纳米颗粒,将纳米颗粒从固体状态汽化成气态,并使气体离子化形成离子源。 离子源通过将固体纳米颗粒置于不锈钢管中,将固体纳米颗粒加热并汽化成气态并使气体离子化来制备。 气体可以在比使用固体块时低的加热温度下形成,因为固体纳米颗粒具有比固体块更低的熔点。 因此,加热温度降低,离子源的制备时间缩短。 此外,在相同温度下,从纳米颗粒制备的离子源提供更高的蒸气压力,并且允许比从固体块制备离子源时更高的注入剂量,从而扩大了离子注入技术的适用性。
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公开(公告)号:US20090165845A1
公开(公告)日:2009-07-02
申请号:US12055305
申请日:2008-03-25
申请人: Fu-Chun Tsao , Chi-Lin Chen
发明人: Fu-Chun Tsao , Chi-Lin Chen
CPC分类号: H01M14/005 , H01L31/022425 , H01L31/022466 , H01L31/0352 , H01L31/056 , H01L31/1884 , Y02E10/52
摘要: A back contact module for a solar cell is provided. The back contact module includes a transparent conductive layer, a plurality of nano-sized scatters in the transparent conductive layer, and a metal layer on the transparent conductive layer.
摘要翻译: 提供了一种用于太阳能电池的背接触模块。 背面接触模块包括透明导电层,透明导电层中的多个纳米级散射,以及透明导电层上的金属层。
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