公开(公告)号：US20110283802A1

公开(公告)日：2011-11-24

申请号：US12782325

申请日：2010-05-18

申请人： Gregory C. Brown ,  Thomas A. Larson ,  Curtis Rahn

发明人： Gregory C. Brown ,  Thomas A. Larson ,  Curtis Rahn

IPC分类号： G01L7/00

CPC分类号： G01L19/003

摘要： A pressure sensor device for a modular pressure sensor package is provided, comprising a substrate having a pressure port that extends through the substrate from a first side of the substrate to a second side of the substrate. A pressure sensor die is attached to the first side of the substrate, forming a seal over the pressure port on the first side of the substrate. A cover is attached to the first side of the substrate over the pressure sensor die, forming a sealed cavity wherein the pressure sensor die is located within the cavity. The device also comprises a plurality of electrical connectors mounted to the substrate external to the cavity, the plurality of electrical connectors electrically coupled to the pressure sensor die. Further, the substrate includes at least one mounting element configured to secure a pressure port interface to the second side of the substrate in a position around the pressure port.

摘要翻译： 提供了一种用于模块化压力传感器封装的压力传感器装置，包括：衬底，其具有从衬底的第一侧到衬底的第二侧延伸穿过衬底的压力端口。 压力传感器模具附接到基板的第一侧，在基板的第一侧上的压力端口上形成密封。 盖子通过压力传感器模具附接到基板的第一侧，形成密封腔体，其中压力传感器模具位于腔体内。 该装置还包括多个电连接器，其安装到空腔外部的基板，多个电连接器电耦合到压力传感器芯片。 此外，衬底包括至少一个安装元件，其被配置为在围绕压力端口的位置处将压力端口接口固定到衬底的第二侧。

公开(公告)号：US08065917B1

公开(公告)日：2011-11-29

申请号：US12782325

申请日：2010-05-18

申请人： Gregory C. Brown ,  Thomas A. Larson ,  Curtis Rahn

发明人： Gregory C. Brown ,  Thomas A. Larson ,  Curtis Rahn

IPC分类号： G01L7/00

CPC分类号： G01L19/003

摘要： A pressure sensor device for a modular pressure sensor package is provided, comprising a substrate having a pressure port that extends through the substrate from a first side of the substrate to a second side of the substrate. A pressure sensor die is attached to the first side of the substrate, forming a seal over the pressure port on the first side of the substrate. A cover is attached to the first side of the substrate over the pressure sensor die, forming a sealed cavity wherein the pressure sensor die is located within the cavity. The device also comprises a plurality of electrical connectors mounted to the substrate external to the cavity, the plurality of electrical connectors electrically coupled to the pressure sensor die. Further, the substrate includes at least one mounting element configured to secure a pressure port interface to the second side of the substrate in a position around the pressure port.

摘要翻译： 提供了一种用于模块化压力传感器封装的压力传感器装置，包括：衬底，其具有从衬底的第一侧到衬底的第二侧延伸穿过衬底的压力端口。 压力传感器模具附接到基板的第一侧，在基板的第一侧上的压力端口上形成密封。 盖子通过压力传感器模具附接到基板的第一侧，形成密封腔体，其中压力传感器模具位于腔体内。 该装置还包括多个电连接器，其安装到空腔外部的基板，多个电连接器电耦合到压力传感器芯片。 此外，衬底包括至少一个安装元件，其被配置为在围绕压力端口的位置处将压力端口接口固定到衬底的第二侧。

公开(公告)号：US20130228022A1

公开(公告)日：2013-09-05

申请号：US13412264

申请日：2012-03-05

申请人： Gregory C. Brown ,  Curtis Rahn

发明人： Gregory C. Brown ,  Curtis Rahn

IPC分类号： G01L1/00 ,  H01L21/02

CPC分类号： G01L9/0054 ,  B81B3/0081 ,  B81B2201/0264 ,  B81B2203/0127 ,  G01L9/0042

摘要： System and methods for silicon on insulator MEMS pressure sensors are provided. In one embodiment, a method comprises: applying a doping source to a silicon-on-insulator (SOI) silicon wafer having a sensor layer and an insulating layer comprising SiO2 material; doping the silicon wafer with Boron atoms from the doping source while controlling an injection energy of the doping to achieve a top-heavy ion penetration profile; and applying a heat source to diffuse the Boron atoms throughout the sensor layer of the SOI silicon wafer.

摘要翻译： 提供了硅绝缘体MEMS压力传感器的系统和方法。 在一个实施例中，一种方法包括：将掺杂源施加到具有传感器层和包含SiO 2材料的绝缘层的绝缘体上硅（SOI）硅晶片; 用来自掺杂源的硼原子掺杂硅晶片，同时控制掺杂的注入能量以获得顶部重离子渗透分布; 以及施加热源以将硼原子扩散到SOI硅晶片的整个传感器层。

公开(公告)号：US20090293628A1

公开(公告)日：2009-12-03

申请号：US12127641

申请日：2008-05-27

申请人： Gregory C. Brown ,  Curtis Rahn

发明人： Gregory C. Brown ,  Curtis Rahn

IPC分类号： G01L9/00

CPC分类号： G01L9/0055 ,  G01L19/0069 ,  G01L19/0092

摘要： A sensing apparatus for determining the pressure of a fluid includes first and second support members. The first and second support members are configured to define at least one sealed chamber. A flexible diaphragm is disposed between the first and second support members. The diaphragm includes first and second opposing surfaces. The first opposing surface is in fluid communication with a first fluid-flow circuit, and the second opposing surface is in fluid communication with a second fluid-flow circuit. A first electronic circuit is disposed within the at least one chamber and coupled to the diaphragm for sensing a first differential pressure associated with the first and second flow circuits. The first electronic circuit is configured to produce at least one electrical signal proportional to a magnitude of the first differential pressure.

摘要翻译： 用于确定流体压力的感测装置包括第一和第二支撑构件。 第一和第二支撑构件被构造成限定至少一个密封室。 柔性膜片设置在第一和第二支撑构件之间。 隔膜包括第一和第二相对表面。 第一相对表面与第一流体流动回路流体连通，并且第二相对表面与第二流体流动回路流体连通。 第一电子电路设置在所述至少一个室内并且耦合到所述隔膜以感测与所述第一和第二流动回路相关联的第一差压。 第一电子电路被配置为产生与第一压差的大小成比例的至少一个电信号。

公开(公告)号：US08813580B2

公开(公告)日：2014-08-26

申请号：US13412264

申请日：2012-03-05

申请人： Gregory C. Brown ,  Curtis Rahn

发明人： Gregory C. Brown ,  Curtis Rahn

IPC分类号： G01L1/00

CPC分类号： G01L9/0054 ,  B81B3/0081 ,  B81B2201/0264 ,  B81B2203/0127 ,  G01L9/0042

摘要： System and methods for silicon on insulator MEMS pressure sensors are provided. In one embodiment, a method comprises: applying a doping source to a silicon-on-insulator (SOI) silicon wafer having a sensor layer and an insulating layer comprising SiO2 material; doping the silicon wafer with Boron atoms from the doping source while controlling an injection energy of the doping to achieve a top-heavy ion penetration profile; and applying a heat source to diffuse the Boron atoms throughout the sensor layer of the SOI silicon wafer.

摘要翻译： 提供了硅绝缘体MEMS压力传感器的系统和方法。 在一个实施例中，一种方法包括：将掺杂源施加到具有传感器层和包含SiO 2材料的绝缘层的绝缘体上硅（SOI）硅晶片; 用来自掺杂源的硼原子掺杂硅晶片，同时控制掺杂的注入能量以获得顶部重离子渗透分布; 以及施加热源以将所述硼原子扩散到所述SOI硅晶片的整个传感器层。

公开(公告)号：US07698951B2

公开(公告)日：2010-04-20

申请号：US12127641

申请日：2008-05-27

申请人： Gregory C. Brown ,  Curtis Rahn

发明人： Gregory C. Brown ,  Curtis Rahn

IPC分类号： G01L9/00

CPC分类号： G01L9/0055 ,  G01L19/0069 ,  G01L19/0092

摘要： A sensing apparatus for determining the pressure of a fluid includes first and second support members. The first and second support members are configured to define at least one sealed chamber. A flexible diaphragm is disposed between the first and second support members. The diaphragm includes first and second opposing surfaces. The first opposing surface is in fluid communication with a first fluid-flow circuit, and the second opposing surface is in fluid communication with a second fluid-flow circuit. A first electronic circuit is disposed within the at least one chamber and coupled to the diaphragm for sensing a first differential pressure associated with the first and second flow circuits. The first electronic circuit is configured to produce at least one electrical signal proportional to a magnitude of the first differential pressure.

摘要翻译： 用于确定流体压力的感测装置包括第一和第二支撑构件。 第一和第二支撑构件被构造成限定至少一个密封室。 柔性膜片设置在第一和第二支撑构件之间。 隔膜包括第一和第二相对表面。 第一相对表面与第一流体流动回路流体连通，并且第二相对表面与第二流体流动回路流体连通。 第一电子电路设置在所述至少一个室内并且耦合到所述隔膜以感测与所述第一和第二流动回路相关联的第一差压。 第一电子电路被配置为产生与第一压差的大小成比例的至少一个电信号。

公开(公告)号：US20090288493A1

公开(公告)日：2009-11-26

申请号：US12124995

申请日：2008-05-21

申请人： Thomas A. Larson ,  Gregory C. Brown

发明人： Thomas A. Larson ,  Gregory C. Brown

IPC分类号： G01L7/06 ,  G01L9/00

CPC分类号： G01L19/0645 ,  Y10T29/49103

摘要： A pressure-sensing module includes a housing having a process-fluid port configured to be coupled to a process-fluid-flow circuit. The housing defines a first chamber into which the process fluid can flow through the process-fluid port. An isolator assembly is disposed within the housing and includes a fill port. The isolator assembly is configured to define a second chamber into which pressure-coupling fluid may be injected through the fill port. An electronic circuit is disposed within the second chamber and is configured to be pressure coupled by the coupling fluid and isolator assembly to the flow circuit. A plug having first and second ends occupies the fill port thereby sealing the second chamber. The first end is exposed to the process fluid in the first chamber, and the second end is exposed to the coupling fluid in the second chamber.

摘要翻译： 压力感测模块包括壳体，壳体具有被配置为耦合到过程流体流动回路的过程流体端口。 壳体限定第一室，工艺流体可以流过过程流体端口。 隔离器组件设置在壳体内并且包括填充端口。 隔离器组件被配置为限定第二室，压力耦合流体可以通过填充口注入到其中。 电子电路设置在第二室内并且被配置为通过耦合流体和隔离器组件压力耦合到流动回路。 具有第一和第二端的塞子占据了填充口，从而密封第二腔室。 第一端暴露于第一室中的工艺流体，第二端暴露于第二室中的耦合流体。

公开(公告)号：US08037770B2

公开(公告)日：2011-10-18

申请号：US12124995

申请日：2008-05-21

申请人： Thomas A. Larson ,  Gregory C. Brown

发明人： Thomas A. Larson ,  Gregory C. Brown

IPC分类号： G01L7/00

CPC分类号： G01L19/0645 ,  Y10T29/49103

摘要： A pressure-sensing module includes a housing having a process-fluid port configured to be coupled to a process-fluid-flow circuit. The housing defines a first chamber into which the process fluid can flow through the process-fluid port. An isolator assembly is disposed within the housing and includes a fill port. The isolator assembly is configured to define a second chamber into which pressure-coupling fluid may be injected through the fill port. An electronic circuit is disposed within the second chamber and is configured to be pressure coupled by the coupling fluid and isolator assembly to the flow circuit. A plug having first and second ends occupies the fill port thereby sealing the second chamber. The first end is exposed to the process fluid in the first chamber, and the second end is exposed to the coupling fluid in the second chamber.

摘要翻译： 压力感测模块包括壳体，壳体具有被配置为耦合到过程流体流动回路的过程流体端口。 壳体限定第一室，工艺流体可以流过过程流体端口。 隔离器组件设置在壳体内并且包括填充端口。 隔离器组件被配置为限定第二室，压力耦合流体可以通过填充口注入到其中。 电子电路设置在第二室内并且被配置为通过耦合流体和隔离器组件压力耦合到流动回路。 具有第一和第二端的塞子占据了填充口，从而密封第二腔室。 第一端暴露于第一室中的工艺流体，第二端暴露于第二室中的耦合流体。

公开(公告)号：US07861595B2

公开(公告)日：2011-01-04

申请号：US12463504

申请日：2009-05-11

申请人： Gregory C. Brown ,  Thomas A. Larson

发明人： Gregory C. Brown ,  Thomas A. Larson

IPC分类号： G01L7/00

CPC分类号： G01L9/0035 ,  G01L19/0645

摘要： A pressure sensing device comprises a substrate having an opening, a pressure sensor die electrically connected to the substrate, and a pedestal having an upper surface that extends through the opening in the substrate, with the upper surface affixed to the sensor die. The pedestal has a pressure port that extends from the upper surface to a bottom surface of the pedestal, with the pressure port containing a hermetic sealing tube therein. A hermetic sealing cover is affixed to the substrate over the sensor die, with the cover and the substrate containing a reference pressure for the sensor die. A media isolation component has a chamber filled with a fluid that transmits a pressure applied to the media isolation component to the pressure sensor die. A capillary tube is affixed within the pressure port of the pedestal and is in communication with the sealing tube. The capillary tube and the sealing tube provide fluid communication between the chamber of the media isolation component and the sensor die.

摘要翻译： 压力感测装置包括具有开口的基板，与基板电连接的压力传感器模具，以及具有延伸穿过基板中的开口的上表面的基座，上表面固定在传感器模具上。 基座具有从基座的上表面延伸到底面的压力端口，压力端口包含密封密封管。 气密密封盖固定在传感器芯片上的基板上，盖子和基板包含传感器管芯的基准压力。 介质隔离部件具有填充有将施加到介质隔离部件的压力传递到压力传感器管芯的流体的室。 毛细管固定在基座的压力端口内并与密封管连通。 毛细管和密封管提供介质隔离部件的室与传感器管芯之间的流体连通。

公开(公告)号：US20100281994A1

公开(公告)日：2010-11-11

申请号：US12463504

申请日：2009-05-11

申请人： Gregory C. Brown ,  Thomas A. Larson

发明人： Gregory C. Brown ,  Thomas A. Larson

IPC分类号： G01L7/06 ,  G01L9/00 ,  G01L7/00

CPC分类号： G01L9/0035 ,  G01L19/0645

摘要： A pressure sensing device comprises a substrate having an opening, a pressure sensor die electrically connected to the substrate, and a pedestal having an upper surface that extends through the opening in the substrate, with the upper surface affixed to the sensor die. The pedestal has a pressure port that extends from the upper surface to a bottom surface of the pedestal, with the pressure port containing a hermetic sealing tube therein. A hermetic sealing cover is affixed to the substrate over the sensor die, with the cover and the substrate containing a reference pressure for the sensor die. A media isolation component has a chamber filled with a fluid that transmits a pressure applied to the media isolation component to the pressure sensor die. A capillary tube is affixed within the pressure port of the pedestal and is in communication with the sealing tube. The capillary tube and the sealing tube provide fluid communication between the chamber of the media isolation component and the sensor die.

摘要翻译： 压力感测装置包括具有开口的基板，与基板电连接的压力传感器模具，以及具有延伸穿过基板中的开口的上表面的基座，上表面固定在传感器模具上。 基座具有从基座的上表面延伸到底面的压力端口，压力端口包含密封密封管。 气密密封盖固定在传感器芯片上的基板上，盖子和基板包含传感器管芯的基准压力。 介质隔离部件具有填充有将施加到介质隔离部件的压力传递到压力传感器管芯的流体的室。 毛细管固定在基座的压力端口内并与密封管连通。 毛细管和密封管提供介质隔离部件的室与传感器管芯之间的流体连通。