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1.发明授权Printhead integrated circuit having exposed active beam coated with polymer layer 有权具有涂覆有聚合物层的曝光的活性束的打印头集成电路公开(公告)号：US08277024B2
公开(公告)日：2012-10-02
申请号：US12976394
申请日：2010-12-22
CPC分类号： B41J2/1645 , B41J2/1404 , B41J2/14427 , B41J2/1601 , B41J2/1606 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2/1648 , B41J2002/14475 , B41J2202/11 , B41J2202/15
摘要： A printhead integrated circuit includes: a substrate comprising drive circuitry; a ceramic nozzle plate spaced apart from the substrate, the nozzle plate having a plurality of nozzle openings and a plurality of moveable portions defined therein; an active beam disposed on each moveable portion of the nozzle plate, such that each moveable portion is moveable towards the substrate when a current from the drive circuitry is passed through a respective active beam; and a polymer layer coating the nozzle plate and the active beams, wherein the polymer layer is comprised of a polymerized siloxane.
摘要翻译： 打印头集成电路包括：包括驱动电路的基板; 与所述基板间隔开的陶瓷喷嘴板，所述喷嘴板具有多个喷嘴开口和限定在其中的多个可移动部分; 设置在所述喷嘴板的每个可移动部分上的主动束，使得当来自所述驱动电路的电流通过相应的有源光束时，每个可移动部分可朝向所述衬底移动; 以及涂覆喷嘴板和活性束的聚合物层，其中聚合物层由聚合的硅氧烷组成。
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2.发明申请公开(公告)号：US20110228007A1
公开(公告)日：2011-09-22
申请号：US13118457
申请日：2011-05-30
IPC分类号： B41J2/045
CPC分类号： B41J2/14 , B41J2/1404 , B41J2/16 , B41J2/1601 , B41J2/1606 , B41J2/1628 , B41J2/1631 , B41J2/1635 , B41J2/1639 , B41J2/1645 , B41J2/1646 , B41J2002/14459 , B41J2002/14475 , B41J2202/15
摘要： An inkjet printhead includes a ceramic nozzle plate having a plurality of movable portions defined therein and a polymeric material covering the nozzle plate and the plurality of movable portions.
摘要翻译： 喷墨打印头包括具有限定在其中的多个可移动部分的陶瓷喷嘴板和覆盖喷嘴板和多个可移动部分的聚合物材料。
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公开(公告)号：US07605009B2
公开(公告)日：2009-10-20
申请号：US11763444
申请日：2007-06-15
IPC分类号： H01L21/00
CPC分类号： B41J2/14 , B41J2/1404 , B41J2/16 , B41J2/1601 , B41J2/1606 , B41J2/1628 , B41J2/1631 , B41J2/1635 , B41J2/1639 , B41J2/1645 , B41J2/1646 , B41J2002/14459 , B41J2002/14475 , B41J2202/15
摘要： A method of fabricating a plurality of MEMS integrated circuits from a wafer having a MEMS layer formed on a frontside thereof and a polymer coating over said MEMS layer, said polymer coating having a plurality of frontside dicing streets defined therethrough, said method comprising the steps of: (a) releasably attaching a first holding means to said polymer coating; and (b) performing at least one operation on a backside of the wafer, said at least one operation including etching a plurality of backside dicing streets through the wafer, each backside dicing street meeting with a respective frontside dicing street, thereby providing the plurality of MEMS integrated circuits releasably attached to said first holding means, wherein each MEMS integrated circuit comprises a respective polymer coating.
摘要翻译： 一种制造多个MEMS集成电路的方法，该晶片具有在其前侧形成的MEMS层和在所述MEMS层上的聚合物涂层，所述聚合物涂层具有通过其定义的多个前侧切割街道，所述方法包括以下步骤： ：（a）将第一保持装置可释放地附接到所述聚合物涂层; 和（b）在所述晶片的背面执行至少一个操作，所述至少一个操作包括通过所述晶片蚀刻多个后侧切割街道，每个后侧切割街道与相应的前方切割街道相交，从而提供所述多个 可释放地附接到所述第一保持装置的MEMS集成电路，其中每个MEMS集成电路包括相应的聚合物涂层。
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公开(公告)号：US07568787B2
公开(公告)日：2009-08-04
申请号：US11763443
申请日：2007-06-15
IPC分类号： B41J2/04
CPC分类号： B41J2/1601 , B41J2/14 , B41J2/1404 , B41J2/16 , B41J2/1606 , B41J2/1628 , B41J2/1631 , B41J2/1639 , B41J2/1645 , B41J2/1646 , B41J2002/14459 , B41J2002/14475 , B41J2202/15
摘要： An inkjet printhead comprising a plurality of nozzle assemblies is provided. Each nozzle assembly has a moving portion for ejection of ink. The printhead includes a seal membrane joining the moving portions to the printhead.
摘要翻译： 提供了包括多个喷嘴组件的喷墨打印头。 每个喷嘴组件具有用于喷射墨水的移动部分。 打印头包括将移动部分连接到打印头的密封膜。
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公开(公告)号：US20080227229A1
公开(公告)日：2008-09-18
申请号：US11763444
申请日：2007-06-15
IPC分类号： H01L21/00
CPC分类号： B41J2/14 , B41J2/1404 , B41J2/16 , B41J2/1601 , B41J2/1606 , B41J2/1628 , B41J2/1631 , B41J2/1635 , B41J2/1639 , B41J2/1645 , B41J2/1646 , B41J2002/14459 , B41J2002/14475 , B41J2202/15
摘要： A method of fabricating a plurality of MEMS integrated circuits from a wafer having a MEMS layer formed on a frontside thereof and a polymer coating over said MEMS layer, said polymer coating having a plurality of frontside dicing streets defined therethrough, said method comprising the steps of: (a) releasably attaching a first holding means to said polymer coating; and (b) performing at least one operation on a backside of the wafer, said at least one operation including etching a plurality of backside dicing streets through the wafer, each backside dicing street meeting with a respective frontside dicing street, thereby providing the plurality of MEMS integrated circuits releasably attached to said first holding means, wherein each MEMS integrated circuit comprises a respective polymer coating.
摘要翻译： 一种制造多个MEMS集成电路的方法，该晶片具有在其前侧形成的MEMS层和在所述MEMS层上的聚合物涂层，所述聚合物涂层具有通过其定义的多个前侧切割街道，所述方法包括以下步骤： ：（a）将第一保持装置可释放地附接到所述聚合物涂层; 和（b）在所述晶片的背面执行至少一个操作，所述至少一个操作包括通过所述晶片蚀刻多个后侧切割街道，每个后侧切割街道与相应的前方切割街道相交，从而提供所述多个 可释放地附接到所述第一保持装置的MEMS集成电路，其中每个MEMS集成电路包括相应的聚合物涂层。
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公开(公告)号：US07984973B2
公开(公告)日：2011-07-26
申请号：US11607976
申请日：2006-12-04
CPC分类号： B41J2/14427 , B41J2002/14435 , B41J2202/03 , B41J2202/15
摘要： A thermal bend actuator, having a plurality of elements, is provided. The actuator comprises a first active element for connection to drive circuitry a second passive element mechanically cooperating with the first element. When a current is passed through the first element, the first element expands relative to the second element, resulting in bending of the actuator. The first element is comprised of an aluminium alloy.
摘要翻译： 提供具有多个元件的热弯曲致动器。 致动器包括用于连接到驱动电路的第一有源元件，与第一元件机械配合的第二无源元件。 当电流通过第一元件时，第一元件相对于第二元件膨胀，导致致动器的弯曲。 第一个元素由铝合金组成。
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公开(公告)号：US20100149266A1
公开(公告)日：2010-06-17
申请号：US12704496
申请日：2010-02-11
IPC分类号： B41J2/14
CPC分类号： B41J2/14427 , B41J2/1404 , B41J2/1601 , B41J2/1606 , B41J2/1628 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1648 , B41J2002/14475 , B41J2202/11 , B41J2202/15
摘要： A MEMS integrated circuit comprises: a silicon substrate having a passivated CMOS layer, a MEMS layer disposed on the passivated CMOS layer, and a polymer layer disposed on the MEMS layer. The CMOS layer comprises drive circuitry for actuating actuator devices in the MEMS layer and the polymer layer comprises a polymerized siloxane.
摘要翻译： MEMS集成电路包括：具有钝化CMOS层的硅衬底，设置在钝化CMOS层上的MEMS层和设置在MEMS层上的聚合物层。 CMOS层包括用于致动MEMS层中的致动器装置的驱动电路，聚合物层包含聚合的硅氧烷。
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8.发明申请WAFER ASSEMBLY COMPRISING MEMS WAFER WITH POLYMERIZED SILOXANE ATTACHMENT SURFACE 有权含有聚硅氧烷连接表面的MEMS波形的波形组件公开(公告)号：US20100090296A1
公开(公告)日：2010-04-15
申请号：US12563956
申请日：2009-09-21
IPC分类号： H01L29/84
CPC分类号： B41J2/14 , B41J2/1404 , B41J2/16 , B41J2/1601 , B41J2/1606 , B41J2/1628 , B41J2/1631 , B41J2/1635 , B41J2/1639 , B41J2/1645 , B41J2/1646 , B41J2002/14459 , B41J2002/14475 , B41J2202/15
摘要： A wafer assembly comprises a wafer having a MEMS layer formed on a frontside and a polymer coating covering the MEMS layer. A holding means is releasably attached to the polymer coating so that the wafer assembly facilitates performance of backside operations on a backside of the wafer. The polymer coating is comprised of a polymerized siloxane.
摘要翻译： 晶片组件包括具有在前侧形成的MEMS层和覆盖MEMS层的聚合物涂层的晶片。 保持装置可释放地附接到聚合物涂层，使得晶片组件有助于在晶片的背面上执行背面操作。 聚合物涂层由聚合的硅氧烷组成。
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公开(公告)号：US20090278899A1
公开(公告)日：2009-11-12
申请号：US12505507
申请日：2009-07-19
IPC分类号： B41J2/05
CPC分类号： B41J2/1601 , B41J2/14 , B41J2/1404 , B41J2/16 , B41J2/1606 , B41J2/1628 , B41J2/1631 , B41J2/1639 , B41J2/1645 , B41J2/1646 , B41J2002/14459 , B41J2002/14475 , B41J2202/15
摘要： A printhead integrated circuit comprises a substrate having drive circuitry and a plurality of nozzle assemblies positioned on the substrate. Each nozzle assembly has a moving portion moveable relative to a stationary portion for ejection of ink. The printhead integrated circuit is covered with a polymeric layer. The polymeric layer covers a gap defined between each moving portion and each stationary portion.
摘要翻译： 打印头集成电路包括具有驱动电路和位于基板上的多个喷嘴组件的基板。 每个喷嘴组件具有相对于用于喷射墨水的静止部分可移动的移动部分。 打印头集成电路被聚合物层覆盖。 聚合物层覆盖在每个移动部分和每个静止部分之间限定的间隙。
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10.发明申请公开(公告)号：US20080225077A1
公开(公告)日：2008-09-18
申请号：US11740925
申请日：2007-04-27
CPC分类号： B41J2/1645 , B41J2/1404 , B41J2/14427 , B41J2/1601 , B41J2/1606 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2/1648 , B41J2002/14475 , B41J2202/11 , B41J2202/15
摘要： A method of fabricating a printhead having a hydrophobic ink ejection face, the method comprising the steps of: (a) providing a partially-fabricated printhead comprising a plurality of nozzle chambers and a nozzle plate having relatively hydrophilic nozzle surface, the nozzle surface at least partially defining the ink ejection face of the printhead; (b) defining a plurality of nozzle openings in the nozzle plate; (c) depositing a hydrophobic polymeric layer onto the nozzle surface; (d) depositing a protective metal film onto the polymeric layer; (e) subjecting the printhead to an oxidizing plasma; and (f) removing the protective metal film, thereby providing a printhead having a relatively hydrophobic ink ejection face. Step (b) may be performed immediately after any of steps (a), (c) or (d).
摘要翻译： 一种制造具有疏水墨水喷射面的打印头的方法，所述方法包括以下步骤：（a）提供部分制造的打印头，其包括多个喷嘴室和具有相对亲水喷嘴表面的喷嘴板，喷嘴表面至少 部分地限定打印头的喷墨面; （b）在所述喷嘴板中限定多个喷嘴开口; （c）在喷嘴表面上沉积疏水聚合物层; （d）在所述聚合物层上沉积保护性金属膜; （e）使打印头经受氧化等离子体; 和（f）去除保护金属膜，从而提供具有相对疏水的喷墨面的打印头。 步骤（b）可以在步骤（a），（c）或（d）中的任一步骤之后立即进行。
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