-
1.发明申请CHARACTERIZATION WITH PICOSECOND ULTRASONICS OF METAL PORTIONS OF SAMPLES POTENTIALLY SUBJECT TO EROSION 有权表征可能潜在腐蚀的样品金属部分的PICOSECOND超声波公开(公告)号：US20100281981A1
公开(公告)日：2010-11-11
申请号：US12449837
申请日：2008-02-28
申请人： Guray Tas , Sean P. Leary , Dario Alliata , Jana Clerico , Priya Mukundhan , Zhongning Dai
发明人： Guray Tas , Sean P. Leary , Dario Alliata , Jana Clerico , Priya Mukundhan , Zhongning Dai
IPC分类号： G01H17/00
CPC分类号： G01N21/1717 , G01N21/95684 , G01N29/2418 , G01N2021/1725 , G01N2021/8416 , G01N2021/95638
摘要： A method for evaluating a manufacturing process is described. The method includes generating an optical pump beam pulse and directing the optical pump beam pulse to a surface of a sample. A probe pulse is generated and directed the probe pulse to the surface of the sample. A probe pulse response signal is detected. A change in the probe pulse varying in response to the acoustic signal forms the probe pulse response signal. An evaluation of one or more manufacturing process steps used to create the sample is made based upon the probe pulse response signal. Additionally the method may be used for process control of a CMP process. Apparatus are also described.
摘要翻译： 对制造工序的评价方法进行说明。 该方法包括产生光泵浦波束脉冲并将光泵浦波束脉冲引导到样品的表面。 产生探针脉冲并将探针脉冲引导到样品的表面。 探测脉冲响应信号。 响应于声信号变化的探针脉冲的变化形成探针脉冲响应信号。 基于探针脉冲响应信号进行用于产生样品的一个或多个制造工艺步骤的评估。 另外，该方法可以用于CMP过程的过程控制。 还描述了装置。
-
2.发明授权Characterization with picosecond ultrasonics of metal portions of samples potentially subject to erosion 有权用可能受到侵蚀的样品的金属部分的皮秒超声波进行表征公开(公告)号：US08312772B2
公开(公告)日：2012-11-20
申请号：US12449837
申请日：2008-02-28
申请人： Guray Tas , Sean P. Leary , Dario Alliata , Jana Clerico , Priya Mukundhan , Zhongning Dai
发明人： Guray Tas , Sean P. Leary , Dario Alliata , Jana Clerico , Priya Mukundhan , Zhongning Dai
CPC分类号： G01N21/1717 , G01N21/95684 , G01N29/2418 , G01N2021/1725 , G01N2021/8416 , G01N2021/95638
摘要： A method for evaluating a manufacturing process is described. The method includes generating an optical pump beam pulse and directing the optical pump beam pulse to a surface of a sample. A probe pulse is generated and directed the probe pulse to the surface of the sample. A probe pulse response signal is detected. A change in the probe pulse varying in response to the acoustic signal forms the probe pulse response signal. An evaluation of one or more manufacturing process steps used to create the sample is made based upon the probe pulse response signal. Additionally the method may be used for process control of a CMP process. Apparatus are also described.
摘要翻译： 对制造工序的评价方法进行说明。 该方法包括产生光泵浦波束脉冲并将光泵浦波束脉冲引导到样品的表面。 产生探针脉冲并将探针脉冲引导到样品的表面。 探测脉冲响应信号。 响应于声信号变化的探针脉冲的变化形成探针脉冲响应信号。 基于探针脉冲响应信号进行用于产生样品的一个或多个制造工艺步骤的评估。 另外，该方法可以用于CMP过程的过程控制。 还描述了装置。
-
搜索结果
2 条记录 (耗时 0.019 秒)
