-
1.发明授权Device for generating plasma having a high range along an axis by electron cyclotron resonance (ECR) from a gaseous medium 有权用于通过电子回旋共振（ECR）从气体介质产生沿轴线具有高范围的等离子体的装置公开(公告)号：US09490102B2
公开(公告)日：2016-11-08
申请号：US14425409
申请日：2013-09-04
Applicant: H.E.F.
Inventor： Beat Schmidt , Christophe Heau , Philippe Maurin-Perrier
CPC classification number: H01J37/32009 , H01J37/32192 , H01J37/32678 , H05H1/46 , H05H2001/463
Abstract: The device includes at least two coaxial waveguides each formed of a central conductor and of an external conductor to bring microwaves into a treatment chamber. The at least two electromagnetic wave injection guides are combined with a magnetic circuit elongated in one direction. The magnetic circuit surrounding the waveguides by creating a magnetic field capable of achieving an ECR condition close to the waveguides.
Abstract translation: 该装置包括至少两个由中心导体和外部导体形成的同轴波导，以将微波带入处理室。 至少两个电磁波注入引导件与沿一个方向伸长的磁路组合。 通过产生能够实现靠近波导的ECR状态的磁场来围绕波导的磁路。
-
2.发明申请DEVICE FOR GENERATING PLASMA HAVING A HIGH RANGE ALONG AN AXIS BY ELECTRON CYCLOTRON RESONANCE (ECR) FROM A GASEOUS MEDIUM 有权通过电子循环共振（ECR）从气体介质产生具有高范围的等离子体的装置公开(公告)号：US20150214008A1
公开(公告)日：2015-07-30
申请号：US14425409
申请日：2013-09-04
Applicant: H.E.F.
Inventor： Beat Schmidt , Christophe Heau , Philippe Maurin-Perrier
IPC: H01J37/32
CPC classification number: H01J37/32009 , H01J37/32192 , H01J37/32678 , H05H1/46 , H05H2001/463
Abstract: The device includes at least two coaxial waveguides each formed of a central conductor and of an external conductor to bring microwaves into a treatment chamber. The at least two electromagnetic wave injection guides are combined with a magnetic circuit elongated in one direction. The magnetic circuit surrounding the waveguides by creating a magnetic field capable of achieving an ECR condition close to the waveguides.
Abstract translation: 该装置包括至少两个由中心导体和外部导体形成的同轴波导，以将微波带入处理室。 至少两个电磁波注入引导件与沿一个方向伸长的磁路组合。 通过产生能够实现靠近波导的ECR状态的磁场来围绕波导的磁路。
-
Search Results
2
records
(took 0.01 seconds)
