公开(公告)号：US10535487B1

公开(公告)日：2020-01-14

申请号：US16261672

申请日：2019-01-30

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tsuyoshi Kodama ,  Yasuyuki Kohno ,  Shinichi Hara ,  Kazuto Ohashi

IPC: H01J9/28 ,  H01J9/26 ,  H01J9/18 ,  G01J1/42 ,  H01J31/49

Abstract: A first member made of an insulating material and a jig with a protrusion narrowing toward a distal end side are prepared, and at least one of the first member and the jig is heated to a temperature at which the first member can melt and deform. After the jig is brought into contact with the first member with the first member and the plurality of protrusions facing each other, the jig is removed, and an intermediate body is formed including the first member formed with a plurality of recesses, and a plurality of conductive members passing through the first member and projecting into the recesses. A second member is prepared, openings of the plurality of recesses are closed, and the second member is hermetically joined to the intermediate body to form a plurality of internal spaces where electron is emitted, and forming a joined body.