公开(公告)号：US20210325435A1

公开(公告)日：2021-10-21

申请号：US17271042

申请日：2019-06-05

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Yoshitaka IWAKI ,  Yuji NAKAJIMA ,  Toshiki YAMADA

IPC: G01R19/00 ,  G01R31/265 ,  G01R31/311 ,  G01R31/26

Abstract: An inspection device includes a reference signal output section, a noise removal section, and an electrical characteristic measurement section. The reference signal output section is connected to an external power supply device in electrical parallel with a semiconductor sample, and outputs a reference signal according to the output of the external power supply device. The noise removal section outputs a noise removal signal obtained by removing a noise component of the output of the external power supply device from the current signal output from the semiconductor sample based on the reference signal. The electrical characteristic measurement section measures the electrical characteristic of the semiconductor sample based on the noise removal signal. The inspection device measures the electrical characteristic of the semiconductor sample to which a voltage is being applied by the external power supply device and which is being irradiated and scanned with light. The inspection device outputs a defective portion of the semiconductor sample based on the electrical characteristic.