公开(公告)号：US10267822B2

公开(公告)日：2019-04-23

申请号：US14763511

申请日：2013-01-31

Applicant: Hewlett-Packard Development Company, L.P.

Inventor： Jennifer Wu ,  Rodney L. Alley ,  Robert G. Walmsley ,  Donald J. Milligan

IPC: G01P15/125 ,  G01P15/08 ,  G01P1/02 ,  G01C19/5769 ,  B81B7/00

Abstract: A sensor having a particle barrier is described. In an example, a sensor includes: first and second electrode sets respectively disposed upon a planar support surface and a proof mass that is compliantly displaceable along a first axis substantially parallel to the planar support surface; and a first barrier disposed on the planar support around the first electrode set having a height less than a gap between the planar support and the proof mass to mitigate particle migration into the first or second electrode set.

公开(公告)号：US20150355223A1

公开(公告)日：2015-12-10

申请号：US14763511

申请日：2013-01-31

Applicant: HEWLETT-PACKARD DEVELOPMENT COMPANY L.P.

Inventor： Jennifer Wu ,  Rodney L. Alley ,  Robert G. Walmsley ,  Donald J. Milligan

IPC: G01P15/125 ,  G01P15/08

CPC classification number: G01P15/125 ,  B81B7/0029 ,  B81B2201/0221 ,  B81B2201/0235 ,  G01C19/5769 ,  G01P1/023 ,  G01P15/0802 ,  Y10T29/417

Abstract: A sensor having a particle barrier is described. In an example, a sensor includes: first and second electrode sets respectively disposed upon a planar support surface and a proof mass that is compliantly displaceable along a first axis substantially parallel to the planar support surface; and a first barrier disposed on the planar support around the first electrode set having a height less than a gap between the planar support and the proof mass to mitigate particle migration into the first or second electrode set.

Abstract translation: 描述具有颗粒屏障的传感器。 在一个示例中，传感器包括：分别设置在平面支撑表面上的第一和第二电极组以及沿着基本上平行于平面支撑表面的第一轴线顺应地移位的检测质量块; 以及围绕所述第一电极组设置在所述平面支撑件上的第一屏障，所述第一电极具有小于所述平面支撑件和所述检测质量块之间的间隙的高度，以减轻进入所述第一或第二电极组的颗粒迁移。