公开(公告)号：US20180074403A1

公开(公告)日：2018-03-15

申请号：US15545751

申请日：2016-01-22

申请人： Hitachi Chemical Dupont Microsystems, Ltd.

发明人： Daisaku MATSUKAWA ,  Tetsuya ENOMOTO

IPC分类号： G03F7/023 ,  C08K5/03 ,  C08K5/42 ,  C08G73/22 ,  C08L75/04

CPC分类号： G03F7/023 ,  C08G69/32 ,  C08G71/04 ,  C08G73/22 ,  C08K5/03 ,  C08K5/42 ,  C08L75/04 ,  C09D179/04 ,  G03F7/0226 ,  G03F7/0233

摘要： A positive photosensitive resin composition comprising (a) polybenzoxazole precursor, (b) a cross-linking agent, (c) a diazonaphoquinone compound, (d) an iodonium compound and (e) a solvent.

公开(公告)号：US20210116809A1

公开(公告)日：2021-04-22

申请号：US16498139

申请日：2018-03-30

申请人： HITACHI CHEMICAL DUPONT MICROSYSTEMS, LTD.

发明人： Etsuharu TSUCHIYA ,  Tetsuya ENOMOTO ,  Takashi KAWAMORI ,  Nobuyuki SAITO ,  Yukari KOIBUCHI ,  Atsutaro YOSHIZAWA ,  Akira ASADA

IPC分类号： G03F7/038 ,  G03F7/037 ,  G03F7/028 ,  G03F7/20 ,  C08G73/10

摘要： A photosensitive resin composition comprising (A) a polyimide precursor having a polymerizable unsaturated bond; (B) a polymerizable monomer having an aliphatic cyclic skeleton; (C) a photopolymerization initiator; and (D) a solvent.

公开(公告)号：US20150337116A1

公开(公告)日：2015-11-26

申请号：US14654740

申请日：2013-12-13

申请人： HITACHI CHEMICAL DUPONT MICROSYSTEMS, LTD.

发明人： Keishi ONO ,  Tetsuya ENOMOTO ,  Masayuki OHE ,  Keiko SUZUKI ,  Kazuya SOEJIMA ,  Etsuharu SUZUKI

IPC分类号： C08K5/5455 ,  C08K5/544 ,  C08K5/33 ,  G03F7/40 ,  G03F7/16 ,  G03F7/20 ,  G03F7/32 ,  C08G73/10 ,  C09D179/08

摘要： A resin composition including the following components (a) and (b). (a) A polyimide precursor having a structural unit represented by the following general formula (1); and (b) a compound represented by the following general formula (2): wherein in the formula R1 is a tetravalent organic group, R2 is a divalent organic group and R3 and R4 are independently a hydrogen atom, an alkyl group, a cycloalkyl group or a monovalent organic group having a carbon-carbon unsaturated double bond. R5 is an alkyl group having 1 to 4 carbon atoms, R6 is independently a hydroxyl group or an alkyl group having 1 to 4 carbon atoms, a is an integer of 0 to 3, n is an integer of 1 to 6, and R7 is a group represented by the following general formula (3) or (4): wherein in the formula (3) or (4), R8 is an alkyl group having 1 to 10 carbon atoms or a monovalent organic group derived from hydroxyalkylsilane and R9 is an alkyl group having 1 to 10 carbon atoms, a monovalent organic group derived from aminoalkylsilane or a heterocyclic group, and R8 and R9 may independently have a substituent.

摘要翻译： 一种树脂组合物，其包含以下组分（a）和（b）。 （a）具有由以下通式（1）表示的结构单元的聚酰亚胺前体; 和（b）由以下通式（2）表示的化合物：其中在式中R1是四价有机基团，R2是二价有机基团，R3和R4独立地是氢原子，烷基，环烷基 或具有碳 - 碳不饱和双键的一价有机基团。 R5是具有1至4个碳原子的烷基，R6独立地是羟基或具有1至4个碳原子的烷基，a是0-3的整数，n是1至6的整数，R7是 由以下通式（3）或（4）表示的基团：其中在式（3）或（4）中，R 8为具有1-10个碳原子的烷基或衍生自羟烷基硅烷的一价有机基团，R 9为 具有1-10个碳原子的烷基，衍生自氨基烷基硅烷或杂环基的一价有机基团，以及R 8和R 9可以独立地具有取代基。