公开(公告)号：US20150185455A1

公开(公告)日：2015-07-02

申请号：US14657428

申请日：2015-03-13

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Akiko FUJISAWA ,  Hiroyuki KOBAYASHI ,  Eiko NAKAZAWA

IPC: G02B21/00

CPC classification number: G02B21/008 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/226

Abstract: A sample observation method of the present invention comprises a step of defining, with respect to an electron microscope image, an outline of an observation object with respect to a sample (3), or a plurality of points located along the outline, and a step of arranging a plurality of fields of view for an electron microscope along the outline, wherein electron microscope images of the plurality of fields of view that have been defined and arranged along the shape of the observation object through each of the above-mentioned steps are acquired. It is thus made possible to provide a sample observation method that is capable of selectively acquiring, with respect to observation objects of various shapes, an electron microscope image based on a field of view definition that is in accordance with the shape of the observation object, as well as an electron microscope apparatus that realizes such a sample observation method.

Abstract translation: 本发明的样本观察方法包括相对于电子显微镜图像定义关于样本（3）的观察对象的轮廓或沿着轮廓的多个点的步骤，以及步骤 沿着轮廓布置电子显微镜的多个视野，其中通过上述步骤沿着观察对象的形状定义和布置的多个视场的电子显微镜图像被获取 。 因此，能够提供一种能够根据与观察对象的形状相对应的视场定义，针对各种形状的观察对象选择性地获取电子显微镜图像的样本观察方法， 以及实现这种样品观察方法的电子显微镜装置。