公开(公告)号：US20130133444A1

公开(公告)日：2013-05-30

申请号：US13687217

申请日：2012-11-28

Applicant: Hitachi High-Technologies Corporation

Inventor： Yoshinori KITANO ,  Teruaki TOKUTOMI ,  Akira TOBITA

IPC: G01R33/12

CPC classification number: G01R33/1207

Abstract: There is provided a head element inspection apparatus that can adjust the position of a cantilever for a short time without using any adjusting jig in the case of replacing a cantilever. A head element inspection apparatus includes a cantilever holder that holds a cantilever, a holder base on which the cantilever holder is mounted, a Z-direction drive shaft that drives the holder base in the Z-direction, and a workpiece table that holds a head element and drives the head element in X- and Y-directions. The cantilever holder and the holder base include adjusting mechanisms (an adjusting screw and an off-center pin) that adjust the position of the cantilever in the X-direction and the Y-direction.

Abstract translation: 提供一种头元件检查装置，在更换悬臂的情况下，可以在不使用任何调节夹具的情况下短暂地调节悬臂的位置。 头元件检查装置包括：保持悬臂的悬臂支架，安装有悬臂支架的保持器基座，沿Z方向驱动保持器基座的Z方向驱动轴，以及保持头部的工件台 并且在X和Y方向上驱动头元件。 悬臂支架和支架底座包括调节悬臂在X方向和Y方向上的位置的调节机构（调节螺钉和偏心销）。

公开(公告)号：US20140090117A1

公开(公告)日：2014-03-27

申请号：US13967658

申请日：2013-08-15

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Teruaki TOKUTOMI ,  Tsuneo NAKAGOMI ,  Akira TOBITA ,  Norimitsu MATSUSITA

IPC: G11B5/455

CPC classification number: G11B5/455 ,  G11B5/3166

Abstract: The magnetic head inspection method includes, exciting the cantilever of a magnetic force microscope at a predetermined frequency, the cantilever being provided with a magnetic probe on the end thereof, floating the magnetic probe over the writing head of the magnetic head and two-dimensionally scanning a search range, detecting the specific position of the writing head based on the search two-dimensional magnetic field intensity of the writing head with exciting state of the cantilever in the two-dimensional scan, setting a shape detection range smaller than the search range for detecting the shape of the writing head based on the specific position, and floating the magnetic probe over the writing head with exciting state of the cantilever, detecting the shape of the writing head by detecting the detection two-dimensional magnetic field intensity of the writing head in the two-dimensional scan.

Abstract translation: 磁头检查方法包括以预定频率激励磁力显微镜的悬臂，悬臂在其末端设置有磁性探针，将磁性探针浮在磁头的写入头上，并且二维扫描 搜索范围，基于在二维扫描中具有悬臂的激励状态的写入头的搜索二维磁场强度来检测写入头的特定位置，设置小于搜索范围的形状检测范围 基于特定位置检测写入头的形状，并且利用悬臂的激励状态将磁性探头浮置在写入头上，通过检测写入头的检测二维磁场强度来检测写入头的形状 在二维扫描中。