公开(公告)号：US20140090117A1

公开(公告)日：2014-03-27

申请号：US13967658

申请日：2013-08-15

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Teruaki TOKUTOMI ,  Tsuneo NAKAGOMI ,  Akira TOBITA ,  Norimitsu MATSUSITA

IPC: G11B5/455

CPC classification number: G11B5/455 ,  G11B5/3166

Abstract: The magnetic head inspection method includes, exciting the cantilever of a magnetic force microscope at a predetermined frequency, the cantilever being provided with a magnetic probe on the end thereof, floating the magnetic probe over the writing head of the magnetic head and two-dimensionally scanning a search range, detecting the specific position of the writing head based on the search two-dimensional magnetic field intensity of the writing head with exciting state of the cantilever in the two-dimensional scan, setting a shape detection range smaller than the search range for detecting the shape of the writing head based on the specific position, and floating the magnetic probe over the writing head with exciting state of the cantilever, detecting the shape of the writing head by detecting the detection two-dimensional magnetic field intensity of the writing head in the two-dimensional scan.

Abstract translation: 磁头检查方法包括以预定频率激励磁力显微镜的悬臂，悬臂在其末端设置有磁性探针，将磁性探针浮在磁头的写入头上，并且二维扫描 搜索范围，基于在二维扫描中具有悬臂的激励状态的写入头的搜索二维磁场强度来检测写入头的特定位置，设置小于搜索范围的形状检测范围 基于特定位置检测写入头的形状，并且利用悬臂的激励状态将磁性探头浮置在写入头上，通过检测写入头的检测二维磁场强度来检测写入头的形状 在二维扫描中。