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公开(公告)号：US20190033228A1
公开(公告)日：2019-01-31
申请号：US16133354
申请日：2018-09-17
Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
Inventor： Masami MAKUUCHI , Kazuma OGAWA , Akira HAMAMATSU
CPC classification number: G01N21/8806 , G01N21/94 , G01N21/9501 , G01N21/956 , G01N2021/8848 , G01N2201/067
Abstract: The present invention provides an inspection device that is capable of detecting foreign matter with high accuracy, the inspection device including: a light source; an electro-optic element on which light from the light source is incident and which changes a phase of the light into at least two states; and a controller. The controller corrects a phase fluctuation of the electro-optic element itself, using intensity modulation characteristics of the eletro-optic element which are obtained by changing an applied voltage that is input to the electro-optic element.
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公开(公告)号：US20180017502A1
公开(公告)日：2018-01-18
申请号：US15546615
申请日：2016-01-26
Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
Inventor： Masami MAKUUCHI , Kazuma OGAWA , Akira HAMAMATSU
CPC classification number: G01N21/8806 , G01N21/94 , G01N21/9501 , G01N21/956 , G01N2021/8848 , G01N2201/067
Abstract: The present invention provides an inspection device that is capable of detecting foreign matter with high accuracy, the inspection device including: a light source; an electro-optic element on which light from the light source is incident and which changes a phase of the light into at least two states; and a controller. The controller corrects a phase fluctuation of the electro-optic element itself, using intensity modulation characteristics of the eletro-optic element which are obtained by changing an applied voltage that is input to the electro-optic element.
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