公开(公告)号：US20130343632A1

公开(公告)日：2013-12-26

申请号：US13846441

申请日：2013-03-18

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yuta URANO ,  Akira HAMAMATSU ,  Shunji MAEDA ,  Kaoru SAKAI

IPC: G06T7/00

CPC classification number: G06T7/001 ,  G06T2207/30148

Abstract: A pattern inspection apparatus is provided to compare images of regions, corresponding to each other, of patterns that are formed so as to be identical and judge that non-coincident portions in the images are defects. The pattern inspection apparatus is equipped with an image comparing section which plots individual pixels of an inspection subject image in a feature space and detects excessively deviated points in the feature space as defects. Defects can be detected correctly even when the same patterns in images have a brightness difference due to a difference in the thickness of a film formed on a wafer.

Abstract translation: 提供了一种图案检查装置，用于将形成为相同的图案的彼此对应的区域的图像进行比较，并判断图像中的非重合部分是缺陷。 图案检查装置配备有图像比较部，其在特征空间中绘制检查对象图像的各个像素，并且将特征空间中的过度偏离的点作为缺陷进行检测。 即使图像中的相同图案由于晶片上形成的膜的厚度差而具有亮度差，因此也可以正确地检测缺陷。

公开(公告)号：US20130202188A1

公开(公告)日：2013-08-08

申请号：US13758190

申请日：2013-02-04

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Takahiro URANO ,  Toshifumi HONDA ,  Shunji MAEDA

IPC: G06K9/62

CPC classification number: G06K9/6202 ,  G06T7/001 ,  G06T2207/20081 ,  G06T2207/30148

Abstract: A defect inspection method has the following steps. An irradiation step of irradiating illumination light on an object. A detection step of detecting scattered light from the object. A defect detection step having the following steps. A first pixel-value information acquisition step of dividing an image based on the scattered light into multiple areas and obtaining first pixel value information, information of the pixel value about each of the multiple areas. A second pixel-value information acquisition step of acquiring second pixel value information, information of the pixel value about all the areas by processing the first pixel value information obtained. A similarity calculation step of calculating the similarity between each image of the multiple areas and the image of all the areas by comparing the first and the second pixel value information. A defect extraction step of extracting a defect of the object using the calculated similarity.

Abstract translation: 缺陷检查方法具有以下步骤。 将照射光照射在物体上的照射步骤。 检测来自物体的散射光的检测步骤。 缺陷检测步骤，具有以下步骤。 第一像素值信息获取步骤，基于散射光将图像分割成多个区域，并获得第一像素值信息，关于多个区域中的每一个的像素值的信息。 第二像素值信息获取步骤，通过处理获得的第一像素值信息来获取第二像素值信息，关于所有区域的像素值的信息。 相似度计算步骤，通过比较第一和第二像素值信息来计算多个区域的每个图像与所有区域的图像之间的相似度。 一种缺陷提取步骤，使用所计算的相似度来提取对象的缺陷。