公开(公告)号：US3636346A

公开(公告)日：1972-01-18

申请号：US3636346D

申请日：1970-03-16

Applicant: HITACHI LTD

Inventor： AKAHORI HIROSHI ,  OHNUMA YOSHIRO ,  KUBOZOE MORIOKI

IPC: G01Q30/16 ,  H01J37/067 ,  H01J37/07 ,  H01J37/26

CPC classification number: H01J37/067 ,  H01J37/07

Abstract: An electron beam generator for electron microscopes or the like apparatus comprising an electron gun, an anode placed in a position opposite to the electron gun, and an electron gun chamber containing therein the electron gun and the anode, wherein either an electrical insulation layer is formed on the inner surface of the electron gun chamber or a cylinder of an electrically insulating material is provided to enclose the electron gun and the anode.