专利检索 ap:("HORIBA STEC, CO., LTD.") AND inv:"Hirotaka YABUSHITA" 第 1 页

1.

发明申请
ION SOURCE, QUADRUPOLE MASS SPECTROMETER AND RESIDUAL GAS ANALYZING METHOD 有权

公开(公告)号：US20170170000A1

公开(公告)日：2017-06-15

申请号：US15370365

申请日：2016-12-06

申请人： HORIBA STEC, CO., LTD.

发明人： Masanobu NAKAZONO , Hirotaka YABUSHITA , Junya NAKAI , Tomoko KATSUDA

IPC分类号： H01J49/16 , H01J49/42 , H01J49/00

CPC分类号： H01J49/16 , H01J27/205 , H01J49/0027 , H01J49/147 , H01J49/42

摘要： In order to attain a main objective of the present invention to provide an ion source capable of efficiently extracting ions, the ion source is configured to include: a conductive tubular body having an ion emitting aperture in a tip surface thereof and a penetration portion in a side wall thereof allowing thermo-electrons to pass through from an outside toward an inside; a mesh surrounding an outer periphery of the penetration portion; and a thermionic emission filament surrounding an outer periphery of the mesh, such that the thermo-electrons emitted from the thermionic emission filament pass through the mesh and reach the inside of the conductive tubular body through the penetration portion.