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    Method of nano-patterning using surface plasmon effect and method of manufacturing nano-imprint master and discrete track magnetic recording media using the nano-patterning method
    1.
    发明授权
    Method of nano-patterning using surface plasmon effect and method of manufacturing nano-imprint master and discrete track magnetic recording media using the nano-patterning method 有权
    使用表面等离子体效应的纳米图案化方法和使用纳米图案法制造纳米压印母版和离散轨道磁记录介质的方法

    公开(公告)号：US07998661B2

    公开(公告)日：2011-08-16

    申请号：US12048421

    申请日：2008-03-14

    申请人： Hae-sung Kim ,  Myung-bok Lee ,  Jin-seung Sohn

    发明人： Hae-sung Kim ,  Myung-bok Lee ,  Jin-seung Sohn

    IPC分类号： G03F7/20

    CPC分类号： G03F7/2014 ,  G03F1/50 ,  G03F7/70375

    摘要： A method of nano-patterning, a method of manufacturing a nano-imprinting master and a discrete track magnetic recording medium are all provided. The method of nano-patterning includes (a) sequentially forming on a substrate an etching object material layer, a photoresist layer, and a metal layer patterned to a first pattern having a structure in which line patterns are repeatedly arranged with a predetermined interval; (b) irradiating light onto a surface of the metal layer to excite surface plasmon so that the photoresist layer is exposed to a second pattern by the surface plasmon; (c) removing the metal layer and developing the photoresist layer; and (d) etching the etching object material layer using the photoresist layer patterned to the second pattern as a mask.

    摘要翻译： 提供纳米图案化方法，制造纳米压印母版和离散轨道磁记录介质的方法。 纳米图案化方法包括：（a）在衬底上依次形成蚀刻对象材料层，光致抗蚀剂层和图案化为具有以预定间隔反复排列线图案的结构的第一图案的金属层; （b）将光照射到金属层的表面上以激发表面等离子体激元，使得光致抗蚀剂层通过表面等离子体激元暴露于第二图案; （c）去除金属层并显影光致抗蚀剂层; 和（d）使用图案化为第二图案的光致抗蚀剂层作为掩模蚀刻蚀刻对象物层。

    Near field light generating device and heat assisted magnetic recording head with the same
    2.
    发明授权
    Near field light generating device and heat assisted magnetic recording head with the same 有权
    近场光产生装置与热辅助磁记录头相同

    公开(公告)号：US07742368B2

    公开(公告)日：2010-06-22

    申请号：US11492860

    申请日：2006-07-26

    申请人： Myung-bok Lee ,  Jin-seung Sohn ,  Sung-dong Suh ,  Hae-sung Kim

    发明人： Myung-bok Lee ,  Jin-seung Sohn ,  Sung-dong Suh ,  Hae-sung Kim

    IPC分类号： G11B11/00

    CPC分类号： G11B5/1278 ,  G11B5/314 ,  G11B7/1387 ,  G11B2005/0021

    摘要： A near field light generating device generating near field light from incident light by using a solid immersion mirror and a heat assisted magnetic recording head with the same are provided. The near field light generating device includes a light source; a waveguide core which transmits light; and a solid immersion mirror, which generates near field light, including an upper transmission surface through which light from the waveguide core is transmitted into the solid immersion mirror, a lower reflection surface, opposite the upper transmission surface, which reflections light incident thereon, lateral reflection surfaces, facing each other at sides of the solid immersion mirror, which reflect light incident thereon, and a lower transmission region disposed at a center of the lower reflection surface. Light reflected from the lateral reflection surfaces forms a light spot on the lower transmission region.

    摘要翻译： 提供了通过使用固体浸没镜从入射光产生近场光的近场光产生装置和具有该近场光产生装置的热辅助磁记录头。 近场光产生装置包括光源; 透光的波导芯; 以及固体浸没镜，其产生近场光，包括上传播面，通过该透射面将来自波导芯的光透过该固体浸没镜;上反射面，反射入射在其上的光的上反射面;侧面 反射面，其反射入射在其上的光的固体浸没镜的侧面，以及设置在下反射面的中心的下部透射区域。 从侧面反射面反射的光在下部透射区域上形成光斑。

    Light delivery module, method of fabricating the same and heat-assisted magnetic recording head using the light delivery module
    4.
    发明授权
    Light delivery module, method of fabricating the same and heat-assisted magnetic recording head using the light delivery module 有权
    光输送模块，其制造方法和使用光输送模块的热辅助磁记录头

    公开(公告)号：US07663982B2

    公开(公告)日：2010-02-16

    申请号：US11512354

    申请日：2006-08-30

    申请人： Eun-hyoung Cho ,  Sung-dong Suh ,  Hae-sung Kim ,  Myung-bok Lee ,  Jin-seung Sohn

    发明人： Eun-hyoung Cho ,  Sung-dong Suh ,  Hae-sung Kim ,  Myung-bok Lee ,  Jin-seung Sohn

    IPC分类号： G11B11/00

    CPC分类号： G11B5/314 ,  G11B5/02 ,  G11B5/3163 ,  G11B2005/0005 ,  G11B2005/0021

    摘要： A light delivery module, a method of fabricating the same, a heat-assisted magnetic recording head using the light delivery module are provided. The light delivery module delivers light emitted from a light source. The light delivery module includes an optical waveguide having an inclined plane of an angle Φ with respect to an incident light axis to deliver an incident light, and a nano aperture changing an energy distribution of the light delivered through the inclined plane to generate an enhanced near-field. The heat-assisted magnetic recording head is mounted on one end of a slider with an air bearing surface to perform a recording operation on a recording medium. The heat-assisted magnetic recording head includes a magnetic path forming unit forming a magnetic field for recording, a light source emitting light for heating a predetermined region of a recording surface of the recording medium, and the light delivery module.

    摘要翻译： 提供光输送模块，其制造方法，使用光输送模块的热辅助磁记录头。 光输送模块传送从光源发出的光。 光传输模块包括光波导，其具有相对于入射光轴的角度Phi的倾斜平面以输送入射光，并且纳米孔径改变通过倾斜平面传送的光的能量分布，以产生增强的近 -领域。 热辅助磁记录头安装在具有空气轴承表面的滑块的一端上，以在记录介质上执行记录操作。 热辅助磁记录头包括形成用于记录的磁场的磁路形成单元，用于加热记录介质的记录表面的预定区域的光源和光输送模块。

    Integrated optical pickup and optical recording and/or reproducing apparatus using the same
    5.
    发明授权
    Integrated optical pickup and optical recording and/or reproducing apparatus using the same 失效
    集成光学拾取器和使用其的光学记录和/或再现装置

    公开(公告)号：US07428194B2

    公开(公告)日：2008-09-23

    申请号：US10986838

    申请日：2004-11-15

    申请人： Jin-seung Sohn ,  Myung-bok Lee ,  Mee-suk Jung ,  Eun-hyoung Cho ,  Hae-sung Kim

    发明人： Jin-seung Sohn ,  Myung-bok Lee ,  Mee-suk Jung ,  Eun-hyoung Cho ,  Hae-sung Kim

    IPC分类号： G11B7/00

    CPC分类号： G11B7/1378 ,  G11B7/124 ,  G11B7/1353

    摘要： An optical pickup and an optical recording and/or reproducing apparatus using the optical pickup are provided. The optical pickup includes: a light source; an optical bench on which the light source is mounted; a focusing member including an objective lens, focusing light emitted from the light source to form a light spot on an optical information storage medium; and an optical path forming member having a transparent block that includes a light entrance/exit surface on which the optical bench and the focusing member are arranged, a first reflection surface, and a second reflection surface opposing the first reflection surface, where the optical path forming member directs the light emitted from the light source toward the objective lens by reflecting the light emitted from the light source on the first and second reflection surfaces. The optical pickup satisfies the requirement for smaller, slimmer design and can be integrated using semiconductor manufacturing processes.

    摘要翻译： 提供了使用光学拾取器的光学拾取器和光学记录和/或再现装置。 光学拾取器包括：光源; 安装光源的光台; 聚焦构件，包括物镜，聚焦从光源发射的光以在光学信息存储介质上形成光斑; 以及具有透明块的光路形成构件，所述透光块包括配置有所述光学台和所述聚焦构件的光入射/出射面，第一反射面和与所述第一反射面相对的第二反射面， 成形构件通过将从光源发射的光反射在第一和第二反射面上而将从光源发射的光朝向物镜引导。 光学拾取器满足更小，更薄的设计的要求，并且可以使用半导体制造工艺进行集成。

    Near field light generating device and heat assisted magnetic recording head with the same
    6.
    发明申请
    Near field light generating device and heat assisted magnetic recording head with the same 有权
    近场光产生装置和热辅助磁记录头相同

    公开(公告)号：US20070081426A1

    公开(公告)日：2007-04-12

    申请号：US11492860

    申请日：2006-07-26

    申请人： Myung-bok Lee ,  Jin-seung Sohn ,  Sung-dong Suh ,  Hae-sung Kim

    发明人： Myung-bok Lee ,  Jin-seung Sohn ,  Sung-dong Suh ,  Hae-sung Kim

    IPC分类号： G11B11/00

    CPC分类号： G11B5/1278 ,  G11B5/314 ,  G11B7/1387 ,  G11B2005/0021

    摘要： A near field light generating device generating near field light from incident light by using a solid immersion mirror and a heat assisted magnetic recording head with the same are provided. The near field light generating device includes a light source; a waveguide core which transmits light; and a solid immersion mirror, which generates near field light, including an upper transmission surface through which light from the waveguide core is transmitted into the solid immersion mirror, a lower reflection surface, opposite the upper transmission surface, which reflections light incident thereon, lateral reflection surfaces, facing each other at sides of the solid immersion mirror, which reflect light incident thereon, and a lower transmission region disposed at a center of the lower reflection surface. Light reflected from the lateral reflection surfaces forms a light spot on the lower transmission region.

    摘要翻译： 提供了通过使用固体浸没镜从入射光产生近场光的近场光产生装置和具有该近场光产生装置的热辅助磁记录头。 近场光产生装置包括光源; 透光的波导芯; 以及固体浸没镜，其产生近场光，包括上传播面，通过该透射面将来自波导芯的光透过该固体浸没镜;上反射面，反射入射在其上的光的上反射面;侧面 反射面，其反射入射在其上的光的固体浸没镜的侧面，以及设置在下反射面的中心的下部透射区域。 从侧面反射面反射的光在下部透射区域上形成光斑。

    Light delivery module, method of fabricating the same and heat-assisted magnetic recording head using the light delivery module
    7.
    发明申请
    Light delivery module, method of fabricating the same and heat-assisted magnetic recording head using the light delivery module 有权
    光输送模块，其制造方法和使用光输送模块的热辅助磁记录头

    公开(公告)号：US20070165494A1

    公开(公告)日：2007-07-19

    申请号：US11512354

    申请日：2006-08-30

    申请人： Eun-hyoung Cho ,  Sung-dong Suh ,  Hae-sung Kim ,  Myung-bok Lee ,  Jin-seung Sohn

    发明人： Eun-hyoung Cho ,  Sung-dong Suh ,  Hae-sung Kim ,  Myung-bok Lee ,  Jin-seung Sohn

    IPC分类号： G11B11/00 ,  G11B5/127

    CPC分类号： G11B5/314 ,  G11B5/02 ,  G11B5/3163 ,  G11B2005/0005 ,  G11B2005/0021

    摘要： A light delivery module, a method of fabricating the same, a heat-assisted magnetic recording head using the light delivery module are provided. The light delivery module delivers light emitted from a light source. The light delivery module includes an optical waveguide having an inclined plane of an angle Φ with respect to an incident light axis to deliver an incident light, and a nano aperture changing an energy distribution of the light delivered through the inclined plane to generate an enhanced near-field. The heat-assisted magnetic recording head is mounted on one end of a slider with an air bearing surface to perform a recording operation on a recording medium. The heat-assisted magnetic recording head includes a magnetic path forming unit forming a magnetic field for recording, a light source emitting light for heating a predetermined region of a recording surface of the recording medium, and the light delivery module.

    摘要翻译： 提供光输送模块，其制造方法，使用光输送模块的热辅助磁记录头。 光输送模块传送从光源发出的光。 光传输模块包括光波导，其具有相对于入射光轴的角度Phi的倾斜平面以输送入射光，并且纳米孔径改变通过倾斜平面传送的光的能量分布，以产生增强的近 -领域。 热辅助磁记录头安装在具有空气轴承表面的滑块的一端上，以在记录介质上执行记录操作。 热辅助磁记录头包括形成用于记录的磁场的磁路形成单元，用于加热记录介质的记录表面的预定区域的光源和光输送模块。

    Method of exposing using electron beam
    10.
    发明申请
    Method of exposing using electron beam 有权
    使用电子束曝光的方法

    公开(公告)号：US20050184258A1

    公开(公告)日：2005-08-25

    申请号：US11066187

    申请日：2005-02-25

    申请人： Hae-sung Kim ,  Myung-bok Lee ,  Jin-seung Sohn ,  Mee-suk Jung ,  Eun-hyoung Cho

    发明人： Hae-sung Kim ,  Myung-bok Lee ,  Jin-seung Sohn ,  Mee-suk Jung ,  Eun-hyoung Cho

    IPC分类号： H01L21/027 ,  H01J37/08

    CPC分类号： H01J37/3026 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3174 ,  Y10S430/143

    摘要： Provided is a method of exposing using an electron beam. The provided method of exposing using the electron beam includes defining main fields on an exposure area of an electron beam exposure target and defining a plurality of sub-fields on the main fields, selecting a main field to be exposed, selecting at least one sub-field of the selected main field, exposing the selected sub-field by using the electron beam, and selecting at least one of the other sub-field, which is not adjacent to the previously selected sub-field and not exposed yet, and exposing the sub-field by using the electron beam.

    摘要翻译： 提供了使用电子束曝光的方法。 所提供的使用电子束曝光的方法包括限定在电子束曝光目标的曝光区域上的主场，并且在主场上定义多个子场，选择要曝光的主场，选择至少一个子场， 选择的主场的场，通过使用电子束曝光所选择的子场，并且选择与先前选择的子场不相邻并且尚未曝光的另一个子场中的至少一个，并且将 子场通过使用电子束。