Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program
    1.
    发明申请
    Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program 有权
    用于振动检测的方法和装置,用于振动分析的方法和装置,光刻设备,装置制造方法和计算机程序

    公开(公告)号:US20060058972A1

    公开(公告)日:2006-03-16

    申请号:US10941019

    申请日:2004-09-15

    IPC分类号: G01L7/00 G01F17/00

    摘要: According to one embodiment, a method for determining information relating to vibration includes projecting an aerial image at an image position in a projection plane; mapping an intensity of the aerial image into an image map, the image map arranged for comprising values of coordinates of sampling locations and of the intensity sampled at each sampling location; and measuring intensity of the aerial image received through a slot pattern. Further, the method includes determining from the image map a detection position of a slope portion of the image map; at the detection position of the slope portion, measuring a temporal intensity of the aerial image and relative positions of the slot pattern and the image position, the relative positions of the slot being measured as position-related data of the slot pattern; and determining from the temporal intensity of the aerial image information relating to vibration for said aerial image.

    摘要翻译: 根据一个实施例,一种用于确定与振动有关的信息的方法包括在投影平面中的图像位置投影空中图像; 将所述空间图像的强度映射到图像映射中,所述图像映射被布置为包括采样位置的坐标值和在每个采样位置采样的强度值; 并测量通过狭槽模式接收的空中图像的强度。 此外,该方法包括从图像映射确定图像映射的斜率部分的检测位置; 在斜坡部分的检测位置处,测量空中图像的时间强度和缝隙图案和图像位置的相对位置,测量的时隙的相对位置作为时隙图案的位置相关数据; 并根据与所述航空图像的振动有关的空中图像信息的时间强度来确定。

    Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program
    2.
    发明授权
    Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program 有权
    用于振动检测的方法和装置,用于振动分析的方法和装置,光刻设备,装置制造方法和计算机程序

    公开(公告)号:US07308368B2

    公开(公告)日:2007-12-11

    申请号:US10941019

    申请日:2004-09-15

    IPC分类号: G06F19/00

    摘要: A method is provided for determining information relating to vibration. The method includes projecting an aerial image at an image position in a projection plane; mapping an intensity of the aerial image into an image map that contains values of coordinates of sampling locations and of the intensity sampled at each sampling location; and measuring intensity of the aerial image received through a slot pattern. The method may also include determining from the image map a detection position of a slope portion of the image map; at the detection position of the slope portion, measuring a temporal intensity of the aerial image and relative positions of the slot pattern and the image position; and determining from the temporal intensity of the aerial image information relating to vibration for the aerial image. The relative positions of the slot can be measured as position-related data of the slot pattern.

    摘要翻译: 提供了一种用于确定与振动有关的信息的方法。 该方法包括在投影平面中的图像位置投影航空图像; 将空间图像的强度映射成包含采样位置的坐标值和在每个采样位置采样的强度的图像映射; 并测量通过狭槽模式接收的空中图像的强度。 该方法还可以包括从图像映射确定图像映射的斜率部分的检测位置; 在倾斜部分的检测位置处,测量空中图像的时间强度和缝隙图案和图像位置的相对位置; 并根据与航空图像的振动有关的空中图像信息的时间强度来确定。 槽的相对位置可以被测量为槽模式的位置相关数据。

    Protection of a surface by partially subjecting it to an electrochemical treatment
    3.
    发明授权
    Protection of a surface by partially subjecting it to an electrochemical treatment 有权
    通过部分使其进行电化学处理来保护表面

    公开(公告)号:US06869684B2

    公开(公告)日:2005-03-22

    申请号:US10766662

    申请日:2004-01-27

    IPC分类号: C25D11/04 B32B15/04 B26B19/00

    摘要: In a method of providing a surface with a protection layer having at least a first surface area (2) and a second surface area (1), which surface areas (1, 2) are distinguishable in that the surface areas (1, 2) differ from each other in at least one visual property, parts of the surface situated outside the first surface area (2) are masked with a mask layer which partially covers the surface, and the surface is subjected to an electrochemical treatment (14, 20), whereby non-masked parts of the surface are treated. As the mask layer provided on the surface is a sol-gel layer forming the protection layer in the second surface area (1), a wear-resistant surface-protection layer having visually distinguishable surface areas is provided in an efficient manner. An object which can be obtained by means of the proposed method is also described.

    摘要翻译: 在提供具有至少第一表面区域(2)和第二表面区域(1))的保护层的表面的方法中,所述表面区域(1,2)可区分为表面区域(1,2) 在至少一个视觉特性中彼此不同,位于第一表面区域(2)外部的表面的部分被部分覆盖表面的掩模层掩蔽,并且对表面进行电化学处理(14,20) ,由此处理表面的非掩蔽部分。 由于设置在表面上的掩模层是在第二表面区域(1)中形成保护层的溶胶 - 凝胶层,因此以有效的方式提供具有视觉上可区分的表面积的耐磨表面保护层。 还描述了可以通过所提出的方法获得的对象。

    Protection of a surface by partially subjecting it to an electrochemical treatment
    4.
    发明授权
    Protection of a surface by partially subjecting it to an electrochemical treatment 有权
    通过部分使其进行电化学处理来保护表面

    公开(公告)号:US06685816B1

    公开(公告)日:2004-02-03

    申请号:US09706666

    申请日:2000-11-06

    IPC分类号: C25D502

    摘要: In a method of providing a surface with a protection layer having at least a first surface area (2) and a second surface area (1), which surface areas (1, 2) are distinguishable in that the surface areas (1, 2) differ from each other in at least one visual property, parts of the surface situated outside the first surface area (2) are masked with a mask layer which partially covers the surface, and the surface is subjected to an electrochemical treatment (14, 20), whereby non-masked parts of the surface are treated. As the mask layer provided on the surface is a sol-gel layer forming the protection layer in the second surface area (1), a wear-resistant surface-protection layer having visually distinguishable surface areas is provided in an efficient manner. An object which can be obtained by the proposed method is also described.

    摘要翻译: 在提供具有至少第一表面区域(2)和第二表面区域(1))的保护层的表面的方法中,所述表面区域(1,2)可区分为表面区域(1,2) 在至少一个视觉特性中彼此不同,位于第一表面区域(2)外部的表面的部分被部分覆盖表面的掩模层掩蔽,并且对表面进行电化学处理(14,20) ,由此处理表面的非掩蔽部分。 由于设置在表面上的掩模层是在第二表面区域(1)中形成保护层的溶胶 - 凝胶层,因此以有效的方式提供具有视觉上可区分的表面积的耐磨表面保护层。 还描述了可以通过所提出的方法获得的对象。