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1.发明授权Method of evaporating melts of alloys of metals having different vapor pressures 失效蒸发具有不同蒸气压的金属合金熔体的方法
公开(公告)号：US4230739A
公开(公告)日：1980-10-28
申请号：US963236
申请日：1978-11-22
CPC分类号： C23C14/30
摘要： Method for evaporating melts of alloys of metals of different vapor pressures from continuously fed, large-area evaporating crucibles by direct bombardment of the bath surface with focused electron beams which are periodically deflected according to a pattern. The alloy material is deposited on a plurality of substrates such as turbine blades which are positioned in a field above the evaporating crucible with local adaptation of the energy density to the thermal economy of the melt bath. At least one electron beam is deflected onto at least two substantially rectangular beam fields and is guided in each of these fields through a line raster at a frequency of at least 100 Hz while shifting periodically from one to the other field with a shift frequency of at most 5 Hz.
摘要翻译： 通过直接轰击浴表面的聚焦电子束，根据图案周期性地偏转，蒸发来自连续供给的大面积蒸发坩埚的不同蒸汽压的金属的熔体熔融的方法。 合金材料沉积在诸如涡轮叶片的多个基底上，涡轮叶片定位在蒸发坩埚上方的场中，其局部适应能量密度与熔融浴的热经济性。 至少一个电子束被偏转到至少两个基本上矩形的光束场上，并且在这些场中的每一个中通过线性光栅以至少100Hz的频率被引导，同时以一个移位频率从一个周期性地移位到另一个场 最多5 Hz。
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公开(公告)号：US4184448A
公开(公告)日：1980-01-22
申请号：US963062
申请日：1978-11-22
CPC分类号： C23C14/566 , B01J3/006 , Y10S414/137 , Y10S414/139
摘要： Apparatus for batch coating of substrates under vacuum including a vacuum chamber with a coating system and a plurality of lock chambers with substrate holders which can be introduced into the vacuum chamber. At least two lock chambers with substrate holders are positioned on a common axis on opposite sides of the vacuum chamber. Each lock chamber is provided on the side facing the vacuum chamber with a lock valve. The vacuum chamber is likewise provided with lock valves on the sides facing the lock chambers whereby the lock chambers can be coupled selectively with the vacuum chamber through the individual lock valves.
摘要翻译： 用于在真空下批量涂布基材的装置，包括具有涂层系统的真空室和具有可被引入真空室中的基板保持件的多个锁定室。 具有衬底保持器的至少两个锁定室位于真空室的相对侧上的公共轴上。 每个锁定室设置在面向真空室的一侧，并具有锁定阀。 真空室同样在面向锁定室的一侧设置有锁定阀，由此锁定室可以通过单独的锁定阀与真空室选择性地联接。
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公开(公告)号：US4208042A
公开(公告)日：1980-06-17
申请号：US963059
申请日：1978-11-22
CPC分类号： C23C14/246 , C23C14/243
摘要： Evaporating crucible having a crucible floor and a peripheral rim therearound. The floor has a plurality of floor apertures for feeding a plurality of rods of evaporating material and, surrounding the floor apertures, superelevations are provided whereby the distance from the crucible floor to the maximum fill level of the evaporating material is reduced by at least fifteen percent.
摘要翻译： 具有坩埚底板和周围边缘的蒸发坩埚。 地板具有多个用于供给多个蒸发材料棒的地板孔，并且围绕地板孔，提供超高度，由此从坩埚地板到蒸发材料的最大填充水平的距离减少至少十五％ 。
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4.发明授权Melting furnace for producing strand-cast ingots in a protective gas atmosphere 失效用于在保护气体气氛中生产铸锭的熔炉
公开(公告)号：US4821791A
公开(公告)日：1989-04-18
申请号：US157910
申请日：1988-02-19
CPC分类号： C22B9/006 , B22D11/0403 , B22D11/11 , B22D27/15
摘要： Melting furnace (1) for the production of strand-cast ingots (17, 18) in a protective gas atmosphere, has a charging apparatus (8) for feeding starting material (11) into a melting area (14). Within a melting chamber provided with a chamber floor (2d) and at least one energy source (4,5) there is situated a strand-casting mold (15) for the transformation of the melt to an ingot (17, 18) and underneath the strand-casting mold is disposed an offbearing apparatus (25) for offbearing the ingot, and an offbearing chamber enveloping the ingot and the offbearing apparatus. To solve the problem of operating such a melting furnace virtually continuously, the strand-casting mold (15) together with at least one additional strand-casting mold (16) is disposed in the chamber flow (2d) in such a manner that each of the strand-casting molds (15, 16) can be brought into the drop path of the melt by a preferably horizontal relative movement. Furthermore, one offbearing apparatus (25, 26) and one offbearing chamber (23, 24) are associated with each strand-casting mold, and at least one vacuum valve (19, 20) is disposed between each strand-casting mold (15, 16) and the offbearing chamber (23, 24) associated with it. Preferably the strand-casting molds (15, 16) are disposed in a chamber floor (2d) configured as a turning disk.
摘要翻译： 在保护气体气氛中用于生产钢锭铸锭（17,18）的熔炉（1）具有用于将原料（11）进料到熔化区域（14）中的装料装置（8）。 在设置有室底板（2d）和至少一个能量源（4,5）的熔化室内设有用于将熔体转变成锭（17,18）和下面的熔池铸造模具（15） 钢绞线铸造模具设置有用于使铸锭偏心的偏心装置（25），以及包围铸块和锻造装置的止挡室。 为了解决连续地操作这种熔化炉的问题，将铸钢模具（15）与至少一个附加的铸造铸模（16）一起设置在室流（2d）中，使得每个 可以通过优选地水平的相对运动将绞合铸造模具（15,16）引入熔体的液滴路径。 此外，一个止血装置（25,26）和一个卸载室（23,24）与每个绞线铸造模具相关联，并且至少一个真空阀（19,20）设置在每个铸钢模具（15， 16）和与其相关联的离心室（23,24）。 优选地，线材铸造模具（15,16）设置在构造为转动盘的室底板（2d）中。
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公开(公告)号：US4233342A
公开(公告)日：1980-11-11
申请号：US962836
申请日：1978-11-21
CPC分类号： C23C14/505 , Y10T29/49336
摘要： Method for vacuum depositing corrosion and oxidation resistant alloy coatings on turbine buckets having leading edges and trailing edges, with simultaneous rotation of the turbine buckets about their longitudinal axis in a vapor stream above a vapor source. The time of stay of each element of the surface above the vapor source is varied during a 360.degree. rotation such that it is shortest when the leading edges and the trailing edges are pointed towards the vapor source and longest when the concave and convex flanks are presented to it.
摘要翻译： 在具有前缘和后缘的涡轮机桶上真空沉积腐蚀和抗氧化合金涂层的方法，同时在蒸汽源上方的蒸气流中同时旋转涡轮机桶绕其纵向轴线。 蒸汽源上方表面的每个元素的停留时间在360°旋转期间变化，使得当前缘和后缘指向蒸气源时最短，当凹凸面呈现时最短 给它
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6.发明授权
公开(公告)号：US4238525A
公开(公告)日：1980-12-09
申请号：US960895
申请日：1978-11-15
IPC分类号： C23C14/30 , H01J37/305 , B05D3/06
CPC分类号： H01J37/3053 , C23C14/30
摘要： Method and apparatus for vacuum depositing thin films on substrates which are located above 500.degree. C. by electron beam heating during the deposition. The substrates are positioned above an evaporating crucible filled with a bath of the material being evaporated which is also heated by electron beams. The electron beams are deflected at an angle of less than 80.degree. onto approximately one-half of the bath surface situated between the axis of symmetry and the end of the evaporating crucible.
摘要翻译： 在沉积期间通过电子束加热在500℃以上的基板上真空沉积薄膜的方法和装置。 基板位于被蒸发的材料的蒸发坩埚的上方，该坩埚也被电子束加热。 电子束以小于80°的角度偏转到位于对称轴线与蒸发坩埚末端之间的浴表面的大约一半上。
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公开(公告)号：US4237148A
公开(公告)日：1980-12-02
申请号：US964093
申请日：1978-11-24
摘要： Method for vaporizing alloys containing metals having different vapor pressures from elongated vaporizing crucibles which are fed with the alloy to be vaporized in rod form at several points along the length of the crucible. The alloy is vaporized by direct bombardment of the molten bath surface with electron beams periodically deflected according to a pattern for the deposition of the alloy coating material on a plurality of substrates positioned above the vaporizing crucible. The proportional composition of the alloy to be vaporized is regulated differently over the length of the crucible such that the alloy component with the lowest boiling point (or the highest vapor pressure) is in a smaller proportion in the alloy to be vaporized which is fed to the center of the vaporizing crucible than in the alloy fed to the ends of the vaporizing crucible.
摘要翻译： 从细长的蒸发坩埚中蒸发含有不同蒸汽压的金属的合金的方法，该坩埚在沿着坩埚的长度的几个点处以棒状蒸发的合金进料。 通过根据用于将合金涂层材料沉积在位于蒸发坩埚上方的多个基板上的图案周期性地偏转的电子束，直接轰击熔池表面而蒸发合金。 待蒸发的合金的比例组成在坩埚的长度上被不同地调节，使得具有最低沸点（或最高蒸汽压）的合金组分在待蒸发的合金中的比例较小， 蒸发坩埚的中心比供给到蒸发坩埚的端部的合金的中心。
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8.发明授权Apparatus for the production of high-purity metal powder by means of electron beam heating 失效用于通过电子束加热生产高纯度金属粉末的装置
公开(公告)号：US4295808A
公开(公告)日：1981-10-20
申请号：US85155
申请日：1979-10-15
申请人： Herbert Stephan , Hans Aichert , Joseph Heimerl
发明人： Herbert Stephan , Hans Aichert , Joseph Heimerl
CPC分类号： B22F9/14 , B22F9/10 , B22F2009/084
摘要： High-purity metal powder is made by the electron beam melting of a starting material in rod form in a vacuum wherein the molten metal is momentarily caught on a spinning plate rotating at high speed and flung therefrom and thereafter solidified by cooling. The metal on the spinning plate is bombarded with an electron beam that is so focused and periodically deflected that its focal spot is many times smaller than the diameter of the spinning plate. The beam deflection between the rotational center of the spinning plate and its marginal area is performed such that the spinning plate is scanned in a zone that extends radially of the axis of rotation of the spinning plate and is small in relation to its diameter. Cooling of the metal particles to the point of solidification is accomplished by radiation loss.
摘要翻译： 通过在真空中以棒状的原料电子束熔融形成高纯度金属粉末，其中熔融金属被瞬间捕获在高速旋转并从其中溅出的纺丝板上，然后通过冷却固化。 纺丝板上的金属被电子束轰击，电子束如此聚焦并周期性地偏转，使其焦斑比纺丝板的直径小许多倍。 进行纺丝板的旋转中心与其边缘区域之间的梁偏转，使得纺丝板在纺丝板的旋转轴线的径向延伸的区域中扫描，并且相对于其直径小。 将金属颗粒冷却至凝固点是通过辐射损失来实现的。
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公开(公告)号：US4192253A
公开(公告)日：1980-03-11
申请号：US962835
申请日：1978-11-21
IPC分类号： C23C14/22 , C23C14/50 , C23C16/458 , C23C13/08
CPC分类号： C23C14/225 , C23C14/505 , C23C16/458
摘要： Vacuum apparatus for coating substrates by rotation including a vacuum chamber with an elongated material source having a longitudinal axis and a transverse axis, a substrate rack with a plurality of fastening points for the planar arrangement of a plurality of substrates above the material source in a substantially uniform distribution over its surface and a drive associated with the substrate rack for rotating substrates. The substrate rack has to parallel substrate bearers disposed fork-wise with couplings for the substrates positioned on the confronting inner sides of the substrate bearers. The substrate bearers are connected by angle drives to the substrate couplings and a motor via a drive shaft.
摘要翻译： 用于通过旋转涂覆基底的真空装置，包括具有纵向轴线和横向轴线的细长材料源的真空室，具有多个紧固点的基底架，用于在材料源上方以基本上平行排列的多个基底 在其表面上的均匀分布和与用于旋转基底的基板支架相关联的驱动。 衬底架必须具有平行的基板承载件，叉形地布置有用于位于衬底承载件的相对内侧上的衬底的联接件。 基板载体通过角驱动器通过驱动轴连接到基板耦合件和电动机。
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公开(公告)号：US4258645A
公开(公告)日：1981-03-31
申请号：US963060
申请日：1978-11-22
CPC分类号： C23C14/56 , Y10S277/927
摘要： Coupling valve for joining stationary and movable evacuatable chambers having confronting chamber walls displaced parallel with respect to each other. A first frame is fastened to one chamber wall and is joined by a resilient member to a second movable frame which can be brought into engagement with the other chamber wall. The movable frame is provided with at least one actuator by which it can be tightened against the confronting chamber wall.
摘要翻译： 用于连接具有相对于彼此平行移位的相对室壁的静止和可移动可排出腔室的联接阀。 第一框架被紧固到一个室壁并且通过弹性构件连接到可与另一个室壁接合的第二可移动框架。 可移动框架设置有至少一个致动器，通过该致动器可将其紧固在面对的室壁上。
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