公开(公告)号：US07671333B2

公开(公告)日：2010-03-02

申请号：US12026419

申请日：2008-02-05

申请人： Alexandra Valerievna Agronskaja ,  Hans Casper Gerritsen ,  Adrianus Johannes Verkleij ,  Abraham Johannes Koster

发明人： Alexandra Valerievna Agronskaja ,  Hans Casper Gerritsen ,  Adrianus Johannes Verkleij ,  Abraham Johannes Koster

IPC分类号： G01N13/12 ,  H01J37/20 ,  H01J37/28 ,  H01J37/244

CPC分类号： H01J37/26 ,  G01N21/6458 ,  H01J37/226 ,  H01J2237/20

摘要： An apparatus for observing a sample (1) with a TEM column and an optical high resolution scanning microscope (10). The sample position when observing the sample with the TEM column differs from the sample position when observing the sample with the optical microscope in that in the latter case the sample is tilted towards the light-optical microscope. By using an optical microscope of the scanning type, and preferably using monochromatic light, the lens elements (11) of the optical microscope facing the sample position can be sufficiently small to be positioned between the pole faces (8A, 8B) of the (magnetic) particle-optical objective lens (7). This is in contrast with the objective lens systems conventionally used in optical microscopes, which show a large diameter. Furthermore the optical microscope, or at least the parts (11) close to the sample, may be retractable so as to free space when imaging in TEM mode.

摘要翻译： 一种用TEM柱和光学高分辨率扫描显微镜（10）观察样品（1）的装置。 用TEM显示器观察样品时的样品位置不同于用光学显微镜观察样品时的样品位置，因为在后一种情况下样品向光学显微镜倾斜。 通过使用扫描型的光学显微镜，并且优选使用单色光，面向样品位置的光学显微镜的透镜元件（11）可以足够小以定位在（磁性的）磁极的极面（8A，8B）之间 ）粒子光学物镜（7）。 这与通常用于显示大直径的光学显微镜中的物镜系统形成对比。 此外，光学显微镜或至少靠近样品的部分（11）可以是可缩回的，以便在TEM模式下成像时自由空间。

公开(公告)号：US20080210869A1

公开(公告)日：2008-09-04

申请号：US12026419

申请日：2008-02-05

申请人： Hans Casper Gerritsen ,  Adrianus Johannes Verkleij ,  Alexandra Valerievna Agronskaja ,  Abraham Johannes Koster

发明人： Hans Casper Gerritsen ,  Adrianus Johannes Verkleij ,  Alexandra Valerievna Agronskaja ,  Abraham Johannes Koster

IPC分类号： H01J37/26

CPC分类号： H01J37/26 ,  G01N21/6458 ,  H01J37/226 ,  H01J2237/20

摘要： An apparatus for observing a sample (1) with a TEM column and an optical high resolution scanning microscope (10). The sample position when observing the sample with the TEM column differs from the sample position when observing the sample with the optical microscope in that in the latter case the sample is tilted towards the light-optical microscope. By using an optical microscope of the scanning type, and preferably using monochromatic light, the lens elements (11) of the optical microscope facing the sample position can be sufficiently small to be positioned between the pole faces (8A, 8B) of the (magnetic) particle-optical objective lens (7). This is in contrast with the objective lens systems conventionally used in optical microscopes, which show a large diameter. Furthermore the optical microscope, or at least the parts (11) close to the sample, may be retractable so as to free space when imaging in TEM mode.

摘要翻译： 一种用TEM柱和光学高分辨率扫描显微镜（10）观察样品（1）的装置。 用TEM显示器观察样品时的样品位置不同于用光学显微镜观察样品时的样品位置，因为在后一种情况下样品向光学显微镜倾斜。 通过使用扫描型的光学显微镜，并且优选使用单色光，面向样品位置的光学显微镜的透镜元件（11）可以足够小以定位在所述扫描类型的极面（8A，8B）之间 （磁性）粒子 - 光学物镜（7）。 这与通常用于显示大直径的光学显微镜中的物镜系统形成对比。 此外，光学显微镜或至少靠近样品的部分（11）可以是可缩回的，以便在TEM模式下成像时自由空间。