-
公开(公告)号:US20130240884A1
公开(公告)日:2013-09-19
申请号:US13729145
申请日:2012-12-28
申请人: Hans-Joachim Barth , Horst Baumeister , Peter Baumgartner , Philipp Riess , Jesenka Veledar Krueger
发明人: Hans-Joachim Barth , Horst Baumeister , Peter Baumgartner , Philipp Riess , Jesenka Veledar Krueger
IPC分类号: H01L23/544 , H01L27/04
CPC分类号: H01L23/544 , H01L23/562 , H01L23/642 , H01L27/04 , H01L2224/16225
摘要: A capacitive sensor and measurement circuitry is described that may be able to reproducibly measure miniscule capacitances and variations thereof. The capacitance may vary depending upon local environmental conditions such as mechanical stress (e.g., warpage or shear stress), mechanical pressure, temperature, and/or humidity. It may be desirable to provide a capacitor integrated into a semiconductor chip that is sufficiently small and sensitive to accurately measure conditions expected to be experienced by a semiconductor chip.
摘要翻译: 描述了可以可重复地测量微小电容及其变化的电容传感器和测量电路。 电容可以根据当地的环境条件(例如机械应力(例如翘曲或剪切应力)),机械压力,温度和/或湿度而变化。 可能需要提供集成到半导体芯片中的电容器,该电容器足够小并且敏感以准确地测量半导体芯片预期经历的条件。
-
公开(公告)号:US09793220B2
公开(公告)日:2017-10-17
申请号:US13729145
申请日:2012-12-28
申请人: Hans-Joachim Barth , Horst Baumeister , Peter Baumgartner , Philipp Riess , Jesenka Veledar Krueger
发明人: Hans-Joachim Barth , Horst Baumeister , Peter Baumgartner , Philipp Riess , Jesenka Veledar Krueger
IPC分类号: G01R31/3187 , G01R31/26 , H01L23/544 , H01L27/04 , H01L23/00 , H01L23/64
CPC分类号: H01L23/544 , H01L23/562 , H01L23/642 , H01L27/04 , H01L2224/16225
摘要: A capacitive sensor and measurement circuitry is described that may be able to reproducibly measure miniscule capacitances and variations thereof. The capacitance may vary depending upon local environmental conditions such as mechanical stress (e.g., warpage or shear stress), mechanical pressure, temperature, and/or humidity. It may be desirable to provide a capacitor integrated into a semiconductor chip that is sufficiently small and sensitive to accurately measure conditions expected to be experienced by a semiconductor chip.
-