公开(公告)号：US20120132992A1

公开(公告)日：2012-05-31

申请号：US13367646

申请日：2012-02-07

申请人： Hanyi Ding ,  Kai D. Feng ,  Zhong-Xiang He ,  Zhenrong Jin ,  Xuefeng Liu ,  Yun Shi

发明人： Hanyi Ding ,  Kai D. Feng ,  Zhong-Xiang He ,  Zhenrong Jin ,  Xuefeng Liu ,  Yun Shi

IPC分类号： H01L27/12

CPC分类号： H01L27/088 ,  H01L21/823462 ,  H01L21/823481 ,  H01L27/1207

摘要： A first field effect transistor includes a gate dielectric and a gate electrode located over a first portion of a top semiconductor layer in a semiconductor-on-insulator (SOI) substrate. A second field effect transistor includes a portion of a buried insulator layer and a source region and a drain region located underneath the buried insulator layer. In one embodiment, the gate electrode of the second field effect transistor is a remaining portion of the top semiconductor layer. In another embodiment, the gate electrode of the second field effect transistor is formed concurrently with the gate electrode of the first field effect transistor by deposition and patterning of a gate electrode layer. The first field effect transistor may be a high performance device and the second field effect transistor may be a high voltage device. A design structure for the semiconductor structure is also provided.

摘要翻译： 第一场效应晶体管包括栅极电介质和位于绝缘体上半导体（SOI））衬底中顶部半导体层的第一部分上方的栅电极。 第二场效应晶体管包括掩埋绝缘体层的一部分和位于掩埋绝缘体层下方的源区和漏区。 在一个实施例中，第二场效应晶体管的栅电极是顶部半导体层的剩余部分。 在另一个实施例中，第二场效应晶体管的栅极通过栅极电极层的沉积和图案化与第一场效应晶体管的栅电极同时形成。 第一场效应晶体管可以是高性能器件，第二场效应晶体管可以是高电压器件。 还提供了用于半导体结构的设计结构。

公开(公告)号：US20100035390A1

公开(公告)日：2010-02-11

申请号：US12188366

申请日：2008-08-08

申请人： Hanyi Ding ,  Kai D. Feng ,  Zhong-Xiang He ,  Zhenrong Jin ,  Xuefeng Liu ,  Yun Shi

发明人： Hanyi Ding ,  Kai D. Feng ,  Zhong-Xiang He ,  Zhenrong Jin ,  Xuefeng Liu ,  Yun Shi

IPC分类号： H01L21/84

CPC分类号： H01L21/84 ,  H01L21/823462 ,  H01L21/823481 ,  H01L27/1203 ,  H01L27/1207

摘要： A first portion of a top semiconductor layer of a semiconductor-on-insulator (SOI) substrate is protected, while a second portion of the top semiconductor layer is removed to expose a buried insulator layer. A first field effect transistor including a gate dielectric and a gate electrode located over the first portion of the top semiconductor layer is formed. A portion of the exposed buried insulator layer is employed as a gate dielectric for a second field effect transistor. In one embodiment, the gate electrode of the second field effect transistor is a remaining portion of the top semiconductor layer. In another embodiment, the gate electrode of the second field effect transistor is formed concurrently with the gate electrode of the first field effect transistor by deposition and patterning of a gate electrode layer.

摘要翻译： 保护绝缘体上半导体（SOI）衬底的顶部半导体层的第一部分，同时去除顶部半导体层的第二部分以暴露掩埋的绝缘体层。 形成包括位于顶部半导体层的第一部分上方的栅极电介质和栅电极的第一场效应晶体管。 暴露的掩埋绝缘体层的一部分用作第二场效应晶体管的栅极电介质。 在一个实施例中，第二场效应晶体管的栅电极是顶部半导体层的剩余部分。 在另一个实施例中，第二场效应晶体管的栅极通过栅极电极层的沉积和图案化与第一场效应晶体管的栅电极同时形成。

公开(公告)号：US08519892B2

公开(公告)日：2013-08-27

申请号：US13534350

申请日：2012-06-27

申请人： Hanyi Ding ,  Kai D. Feng ,  Zhong-Xiang He ,  Zhenrong Jin ,  Xuefeng Liu

发明人： Hanyi Ding ,  Kai D. Feng ,  Zhong-Xiang He ,  Zhenrong Jin ,  Xuefeng Liu

IPC分类号： H01Q1/38 ,  H01Q19/10

CPC分类号： H01Q1/2283 ,  H01Q1/40 ,  H01Q9/26 ,  H01Q9/285 ,  H01Q19/108 ,  H01Q19/30

摘要： A semiconductor chip integrating a transceiver, an antenna, and a receiver is provided. The transceiver is located on a front side of a semiconductor substrate. A through substrate via provides electrical connection between the transceiver and the receiver located on a backside of the semiconductor substrate. The antenna connected to the transceiver is located in a dielectric layer located on the front side of the substrate. The separation between the reflector plate and the antenna is about the quarter wavelength of millimeter waves, which enhances radiation efficiency of the antenna. An array of through substrate dielectric vias may be employed to reduce the effective dielectric constant of the material between the antenna and the reflector plate, thereby reducing the wavelength of the millimeter wave and enhance the radiation efficiency. A design structure for designing, manufacturing, or testing a design for such a semiconductor chip is also provided.

摘要翻译： 提供集成收发器，天线和接收器的半导体芯片。 收发器位于半导体衬底的前侧。 通过基底通孔提供收发器和位于半导体衬底背面的接收器之间的电连接。 连接到收发器的天线位于位于基板正面的电介质层中。 反射板与天线之间的间隔大约是毫米波的四分之一波长，这提高了天线的辐射效率。 可以采用贯穿衬底电介质通孔的阵列来降低天线和反射板之间材料的有效介电常数，由此减小毫米波的波长并提高辐射效率。 还提供了用于设计，制造或测试这种半导体芯片的设计的设计结构。

公开(公告)号：US07943404B2

公开(公告)日：2011-05-17

申请号：US12187436

申请日：2008-08-07

申请人： Hanyi Ding ,  Kai D. Feng ,  Zhong-Xiang He ,  Zhenrong Jin ,  Xuefeng Liu

发明人： Hanyi Ding ,  Kai D. Feng ,  Zhong-Xiang He ,  Zhenrong Jin ,  Xuefeng Liu

IPC分类号： H01L21/00

CPC分类号： H01Q1/40 ,  H01Q9/28

摘要： A semiconductor chip integrating a transceiver, an antenna, and a receiver is provided. The transceiver is formed on a front side of a semiconductor substrate. At least one through substrate via provides electrical connection between the transceiver and the backside of the semiconductor substrate. The antenna, which is connected to the transceiver, is formed in a dielectric layer on the front side. The reflector plate is connected to the through substrate via, and is formed on the backside. The separation between the reflector plate and the antenna is about the quarter wavelength of millimeter waves, which enhances radiation efficiency of the antenna. An array of through substrate trenches may be formed and filled with a dielectric material to reduce the effective dielectric constant of the material between the antenna and the reflector plate, thereby reducing the wavelength of the millimeter wave and enhance the radiation efficiency.

摘要翻译： 提供集成收发器，天线和接收器的半导体芯片。 收发器形成在半导体衬底的前侧。 至少一个通过衬底通孔提供收发器和半导体衬底的背面之间的电连接。 连接到收发器的天线形成在前侧的电介质层中。 反射板与穿通基板连接，并形成在背面。 反射板与天线之间的间隔大约是毫米波的四分之一波长，这提高了天线的辐射效率。 通过衬底沟槽的阵列可以形成并填充介电材料，以减小天线和反射板之间的材料的有效介电常数，从而减小毫米波的波长并提高辐射效率。

公开(公告)号：US20100033395A1

公开(公告)日：2010-02-11

申请号：US12187442

申请日：2008-08-07

申请人： Hanyi Ding ,  Kai D. Feng ,  Zhong-Xiang He ,  Zhenrong Jin ,  Xuefeng Liu

发明人： Hanyi Ding ,  Kai D. Feng ,  Zhong-Xiang He ,  Zhenrong Jin ,  Xuefeng Liu

IPC分类号： H01Q19/10

CPC分类号： H01Q1/2283 ,  H01Q1/40 ,  H01Q9/26 ,  H01Q9/285 ,  H01Q19/108 ,  H01Q19/30

摘要： A semiconductor chip integrating a transceiver, an antenna, and a receiver is provided. The transceiver is located on a front side of a semiconductor substrate. A through substrate via provides electrical connection between the transceiver and the receiver located on a backside of the semiconductor substrate. The antenna connected to the transceiver is located in a dielectric layer located on the front side of the substrate. The separation between the reflector plate and the antenna is about the quarter wavelength of millimeter waves, which enhances radiation efficiency of the antenna. An array of through substrate dielectric vias may be employed to reduce the effective dielectric constant of the material between the antenna and the reflector plate, thereby reducing the wavelength of the millimeter wave and enhance the radiation efficiency. A design structure for designing, manufacturing, or testing a design for such a semiconductor chip is also provided.

摘要翻译： 提供集成收发器，天线和接收器的半导体芯片。 收发器位于半导体衬底的前侧。 通过基底通孔提供收发器和位于半导体衬底背面的接收器之间的电连接。 连接到收发器的天线位于位于基板正面的电介质层中。 反射板与天线之间的间隔大约是毫米波的四分之一波长，这提高了天线的辐射效率。 可以采用贯穿衬底电介质通孔的阵列来降低天线和反射板之间材料的有效介电常数，由此减小毫米波的波长并提高辐射效率。 还提供了用于设计，制造或测试这种半导体芯片的设计的设计结构。

公开(公告)号：US20120266116A1

公开(公告)日：2012-10-18

申请号：US13534350

申请日：2012-06-27

申请人： Hanyi Ding ,  Kai D. Feng ,  Zhong-Xiang He ,  Zhenrong Jin ,  Xuefeng Liu

发明人： Hanyi Ding ,  Kai D. Feng ,  Zhong-Xiang He ,  Zhenrong Jin ,  Xuefeng Liu

IPC分类号： G06F17/50

CPC分类号： H01Q1/2283 ,  H01Q1/40 ,  H01Q9/26 ,  H01Q9/285 ,  H01Q19/108 ,  H01Q19/30

摘要： A semiconductor chip integrating a transceiver, an antenna, and a receiver is provided. The transceiver is located on a front side of a semiconductor substrate. A through substrate via provides electrical connection between the transceiver and the receiver located on a backside of the semiconductor substrate. The antenna connected to the transceiver is located in a dielectric layer located on the front side of the substrate. The separation between the reflector plate and the antenna is about the quarter wavelength of millimeter waves, which enhances radiation efficiency of the antenna. An array of through substrate dielectric vias may be employed to reduce the effective dielectric constant of the material between the antenna and the reflector plate, thereby reducing the wavelength of the millimeter wave and enhance the radiation efficiency. A design structure for designing, manufacturing, or testing a design for such a semiconductor chip is also provided.

摘要翻译： 提供集成收发器，天线和接收器的半导体芯片。 收发器位于半导体衬底的前侧。 通过基底通孔提供收发器和位于半导体衬底背面的接收器之间的电连接。 连接到收发器的天线位于位于基板正面的电介质层中。 反射板与天线之间的间隔大约是毫米波的四分之一波长，这提高了天线的辐射效率。 可以采用贯穿衬底电介质通孔的阵列来降低天线和反射板之间材料的有效介电常数，由此减小毫米波的波长并提高辐射效率。 还提供了用于设计，制造或测试这种半导体芯片的设计的设计结构。

公开(公告)号：US08399927B2

公开(公告)日：2013-03-19

申请号：US13367646

申请日：2012-02-07

申请人： Hanyi Ding ,  Kai D. Feng ,  Zhong-Xiang He ,  Zhenrong Jin ,  Xuefeng Liu ,  Yun Shi

发明人： Hanyi Ding ,  Kai D. Feng ,  Zhong-Xiang He ,  Zhenrong Jin ,  Xuefeng Liu ,  Yun Shi

IPC分类号： H01L27/148

CPC分类号： H01L27/088 ,  H01L21/823462 ,  H01L21/823481 ,  H01L27/1207

摘要： A first field effect transistor includes a gate dielectric and a gate electrode located over a first portion of a top semiconductor layer in a semiconductor-on-insulator (SOI) substrate. A second field effect transistor includes a portion of a buried insulator layer and a source region and a drain region located underneath the buried insulator layer. In one embodiment, the gate electrode of the second field effect transistor is a remaining portion of the top semiconductor layer. In another embodiment, the gate electrode of the second field effect transistor is formed concurrently with the gate electrode of the first field effect transistor by deposition and patterning of a gate electrode layer. The first field effect transistor may be a high performance device and the second field effect transistor may be a high voltage device. A design structure for the semiconductor structure is also provided.

摘要翻译： 第一场效应晶体管包括栅极电介质和位于绝缘体上半导体（SOI））衬底中顶部半导体层的第一部分上方的栅电极。 第二场效应晶体管包括掩埋绝缘体层的一部分和位于掩埋绝缘体层下方的源区和漏区。 在一个实施例中，第二场效应晶体管的栅电极是顶部半导体层的剩余部分。 在另一个实施例中，第二场效应晶体管的栅极通过栅极电极层的沉积和图案化与第一场效应晶体管的栅电极同时形成。 第一场效应晶体管可以是高性能器件，第二场效应晶体管可以是高电压器件。 还提供了用于半导体结构的设计结构。

公开(公告)号：US08012814B2

公开(公告)日：2011-09-06

申请号：US12188366

申请日：2008-08-08

申请人： Hanyi Ding ,  Kai D. Feng ,  Zhong-Xiang He ,  Zhenrong Jin ,  Xuefeng Liu ,  Yun Shi

发明人： Hanyi Ding ,  Kai D. Feng ,  Zhong-Xiang He ,  Zhenrong Jin ,  Xuefeng Liu ,  Yun Shi

IPC分类号： H01L21/84

CPC分类号： H01L21/84 ,  H01L21/823462 ,  H01L21/823481 ,  H01L27/1203 ,  H01L27/1207

摘要： A first portion of a top semiconductor layer of a semiconductor-on-insulator (SOI) substrate is protected, while a second portion of the top semiconductor layer is removed to expose a buried insulator layer. A first field effect transistor including a gate dielectric and a gate electrode located over the first portion of the top semiconductor layer is formed. A portion of the exposed buried insulator layer is employed as a gate dielectric for a second field effect transistor. In one embodiment, the gate electrode of the second field effect transistor is a remaining portion of the top semiconductor layer. In another embodiment, the gate electrode of the second field effect transistor is formed concurrently with the gate electrode of the first field effect transistor by deposition and patterning of a gate electrode layer.

摘要翻译： 保护绝缘体上半导体（SOI）衬底的顶部半导体层的第一部分，同时去除顶部半导体层的第二部分以暴露掩埋的绝缘体层。 形成包括位于顶部半导体层的第一部分上方的栅极电介质和栅电极的第一场效应晶体管。 暴露的掩埋绝缘体层的一部分用作第二场效应晶体管的栅极电介质。 在一个实施例中，第二场效应晶体管的栅电极是顶部半导体层的剩余部分。 在另一个实施例中，第二场效应晶体管的栅极通过栅极电极层的沉积和图案化与第一场效应晶体管的栅电极同时形成。

公开(公告)号：US20100035370A1

公开(公告)日：2010-02-11

申请号：US12187436

申请日：2008-08-07

申请人： Hanyi Ding ,  Kai D. Feng ,  Zhong-Xiang He ,  Zhenrong Jin ,  Xuefeng Liu

发明人： Hanyi Ding ,  Kai D. Feng ,  Zhong-Xiang He ,  Zhenrong Jin ,  Xuefeng Liu

IPC分类号： H01L21/00

CPC分类号： H01Q1/40 ,  H01Q9/28

摘要： A semiconductor chip integrating a transceiver, an antenna, and a receiver is provided. The transceiver is formed on a front side of a semiconductor substrate. At least one through substrate via provides electrical connection between the transceiver and the backside of the semiconductor substrate. The antenna, which is connected to the transceiver, is formed in a dielectric layer on the front side. The reflector plate is connected to the through substrate via, and is formed on the backside. The separation between the reflector plate and the antenna is about the quarter wavelength of millimeter waves, which enhances radiation efficiency of the antenna. An array of through substrate trenches may be formed and filled with a dielectric material to reduce the effective dielectric constant of the material between the antenna and the reflector plate, thereby reducing the wavelength of the millimeter wave and enhance the radiation efficiency.

摘要翻译： 提供集成收发器，天线和接收器的半导体芯片。 收发器形成在半导体衬底的前侧。 至少一个通过衬底通孔提供收发器和半导体衬底的背面之间的电连接。 连接到收发器的天线形成在前侧的电介质层中。 反射板与穿通基板连接，并形成在背面。 反射板与天线之间的间隔大约是毫米波的四分之一波长，这提高了天线的辐射效率。 通过衬底沟槽的阵列可以形成并填充介电材料，以减小天线和反射板之间的材料的有效介电常数，从而减小毫米波的波长并提高辐射效率。

公开(公告)号：US20100032761A1

公开(公告)日：2010-02-11

申请号：US12188381

申请日：2008-08-08

申请人： Hanyi Ding ,  Kai D. Feng ,  Zhong-Xiang He ,  Zhenrong Jin ,  Xuefeng Liu ,  Yun Shi

发明人： Hanyi Ding ,  Kai D. Feng ,  Zhong-Xiang He ,  Zhenrong Jin ,  Xuefeng Liu ,  Yun Shi

IPC分类号： H01L27/12

CPC分类号： H01L27/088 ,  H01L21/823462 ,  H01L21/823481 ,  H01L27/1207

摘要： A first field effect transistor includes a gate dielectric and a gate electrode located over a first portion of a top semiconductor layer in a semiconductor-on-insulator (SOI) substrate. A second field effect transistor includes a portion of a buried insulator layer and a source region and a drain region located underneath the buried insulator layer. In one embodiment, the gate electrode of the second field effect transistor is a remaining portion of the top semiconductor layer. In another embodiment, the gate electrode of the second field effect transistor is formed concurrently with the gate electrode of the first field effect transistor by deposition and patterning of a gate electrode layer. The first field effect transistor may be a high performance device and the second field effect transistor may be a high voltage device. A design structure for the semiconductor structure is also provided.

摘要翻译： 第一场效应晶体管包括栅极电介质和位于绝缘体上半导体（SOI））衬底中顶部半导体层的第一部分上方的栅电极。 第二场效应晶体管包括掩埋绝缘体层的一部分和位于掩埋绝缘体层下方的源区和漏区。 在一个实施例中，第二场效应晶体管的栅电极是顶部半导体层的剩余部分。 在另一个实施例中，第二场效应晶体管的栅极通过栅极电极层的沉积和图案化与第一场效应晶体管的栅电极同时形成。 第一场效应晶体管可以是高性能器件，第二场效应晶体管可以是高电压器件。 还提供了用于半导体结构的设计结构。