公开(公告)号：US20090033902A1

公开(公告)日：2009-02-05

申请号：US12076732

申请日：2008-03-21

申请人： Heine Melle Mulder ,  Johannes Jacobus, Matheus Baselmans ,  Adrianus Franciscus, Petrus Engelen ,  Markus Franciscus, Antonius Eurlings ,  Hendrikus Robertus, Marie Greevenbroek ,  Patricius Aloysius, Jacobus Tinnemans ,  Paul Van Der Veen ,  Wilfred Edward Endendijk

发明人： Heine Melle Mulder ,  Johannes Jacobus, Matheus Baselmans ,  Adrianus Franciscus, Petrus Engelen ,  Markus Franciscus, Antonius Eurlings ,  Hendrikus Robertus, Marie Greevenbroek ,  Patricius Aloysius, Jacobus Tinnemans ,  Paul Van Der Veen ,  Wilfred Edward Endendijk

IPC分类号： G03B27/54 ,  G03B27/70

CPC分类号： G03F7/70058 ,  G03F7/70116 ,  G03F7/702 ,  G03F7/70216

摘要： A device manufacturing method includes conditioning a beam of radiation using an illumination system. The conditioning includes controlling an array of individually controllable elements and associated optical components of the illumination system to convert the radiation beam into a desired illumination mode, the controlling including allocating different individually controllable elements to different parts of the illumination mode in accordance with an allocation scheme, the allocation scheme selected to provide a desired modification of one or more properties of the illumination mode, the radiation beam or both. The method also includes patterning the radiation beam having the desired illumination mode with a pattern in its cross-section to form a patterned beam of radiation, and projecting the patterned radiation beam onto a target portion of a substrate.

摘要翻译： 装置制造方法包括使用照明系统来调节辐射束。 调节包括控制照明系统的独立可控元件阵列和相关联的光学部件，以将辐射束转换成期望的照明模式，该控制包括根据分配方案将不同的单独可控元件分配到照明模式的不同部分 ，所述分配方案被选择以提供照明模式，辐射束或两者的一个或多个属性的期望修改。 该方法还包括以具有图案的横截面图案化具有所需照明模式的辐射束，以形成图案化的辐射束，并将图案化的辐射束投射到基板的目标部分上。