Process and apparatus for double-sided chemomechanical polishing of
semiconductor wafers and semiconductor wafers obtainable thereby
    1.
    发明授权
    Process and apparatus for double-sided chemomechanical polishing of semiconductor wafers and semiconductor wafers obtainable thereby 失效
    用于半导体波形和半导体波形的双面化学抛光的工艺和装置可获得

    公开(公告)号:US5110428A

    公开(公告)日:1992-05-05

    申请号:US577678

    申请日:1990-09-04

    CPC classification number: H01L21/02024 B24B37/08 Y10T428/21

    Abstract: Semiconductor wafers, in particular, silicon wafers, with differently poled front and rear sides and high geometrical quality can be fabricated by double-sided polishing if the wafer surfaces are differently polarized during the polishing process. This can be achieved in a simple fashion, in that during polishing, an electric field is set up between the upper and lower polishing plates. This can be accomplished by providing the upper polishing plate between the plate surface and the polishing cloth with a thin conductive layer insulated with respect thereto, on which a voltage can be impressed, while both polishing plates are grounded to the frame.

    Abstract translation: 如果在抛光过程中晶片表面有不同的极化,则可以通过双面抛光来制造具有不同抛光的前侧和后侧以及高几何质量的半导体晶片,特别是硅晶片。 这可以以简单的方式实现,因为在抛光期间,在上和下抛光板之间建立电场。 这可以通过在板表面和抛光布之间设置相对于其间绝缘的薄导电层,同时在其上施加电压的同时将两个抛光板接地到框架来实现。

    Process for treating polishing cloths used for semiconductor wafers
    2.
    发明授权
    Process for treating polishing cloths used for semiconductor wafers 失效
    用于半导体波导处理抛光布的工艺

    公开(公告)号:US5167667A

    公开(公告)日:1992-12-01

    申请号:US533479

    申请日:1990-06-05

    CPC classification number: B24B53/017

    Abstract: In the chemo-mechanical polishing, in particular, of semiconductor wafers,he abrasion and the geometrical quality of the wafers decreases with increasing service life of the polishing cloth. This can be prevented by treating the polishing cloth in each case after the polishing operation in a manner such that a pressure field is impressed, essentially without mechanical stress, on the polishing cloth, which pressure field causes a treatment liquid to flow through the interior of the polishing cloth and in this process the residues produced during polishing are rendered mobile and removed. A baseplate placed transversely across the polishing cloth and having a flat working surface provided with exit openings for the treatment liquid is suitable for carrying out the process. In the treatment, the treatment liquid is forced beneath the baseplate into the moving polishing cloth so that the latter is gradually traversed by the zone through which flow takes place.

    Abstract translation: 在化学机械抛光中,特别是半导体晶片的研磨,晶片的磨损和几何质量随着抛光布的使用寿命的增加而减小。 这可以通过在抛光操作之后的每种情况下处理抛光布以这样的方式来防止,即在抛光布上施加压力场(基本上没有机械应力),该压力场使得处理液体流过内部 抛光布,并且在该过程中,在抛光期间产生的残余物被移动并移除。 横置于抛光布上的基板具有设置有用于处理液体的出口的平坦工作表面,适用于进行该过程。 在处理中,将处理液体强制在基板下方进入移动的抛光布中,使得后者逐渐穿过流过的区域。

    Rollover protection system for motor vehicles with a sensor-controlled actively deployable rotary bar
    3.
    发明申请
    Rollover protection system for motor vehicles with a sensor-controlled actively deployable rotary bar 审中-公开
    机动车辆翻转保护系统,带有传感器控制的可部署旋转杆

    公开(公告)号:US20080136155A1

    公开(公告)日:2008-06-12

    申请号:US11999152

    申请日:2007-12-04

    CPC classification number: B60R21/13 B60R2021/135

    Abstract: The invention is based on a known rollover protection system for motor vehicles having two seat-related rotary bars permanently articulated to the vehicle body, said rotary bars each being fixable in the stored resting position by means of a holding device, and being rotatable into a locked support position by means of a sensor-controlled drive. To compactly design the system with several functional parts, the invention provides a toggle lever arrangement to convert the movement of the drive into a rotary bar movement, said arrangement being articulated to the drive and the rotary bar such that it is folded at least partially within the area framed by the rotary bar when the rotary bar is in its resting position.

    Abstract translation: 本发明基于一种已知的用于机动车辆的翻车保护系统,其具有永久地铰接到车身的两个座椅相关旋转杆,所述旋转杆各自可通过保持装置固定在所存储的静止位置,并且可转动成 通过传感器控制的驱动器锁定支撑位置。 为了紧凑地设计具有多个功能部件的系统,本发明提供了一种肘杆装置,用于将驱动器的运动转换成旋转杆运动,所述装置铰接到驱动器和旋转杆,使得其至少部分地折叠在 当旋转杆处于其静止位置时由旋转杆构成的区域。

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